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    • 7. 发明申请
    • Induced Resonance Comb Drive Scanner
    • 感应谐振梳驱动扫描器
    • US20090284816A1
    • 2009-11-19
    • US12122223
    • 2008-05-16
    • Wyatt O. DavisHakan Urey
    • Wyatt O. DavisHakan Urey
    • G02B26/08
    • G02B26/0841
    • Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying a drive voltage to a set of comb fingers disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure and by driving a second frame of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.
    • 简而言之,根据一个或多个实施例,通过将扫描平台的第一帧直接施加到设置在第一框架上的一组梳齿的驱动电压来直接驱动扫描平台的第一帧而将基于MEMS的扫描平台布置成具有提高的效率, 第一框架通过第一挠曲件的扭转振动并且通过经由第二挠曲件经由第二框架与第一框架的机械耦合来间接地驱动扫描平台的第二框架,其中阻尼损失和工作容量使得操作 扫描反射镜比将梳齿组设置在第二框架上并直接由驱动电压驱动时更有效。 扫描平台可以包括1D扫描仪,2D扫描器或多维扫描器。