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    • 8. 发明授权
    • Source for thermal physical vapor deposition of organic electroluminescent layers
    • 有机电致发光层热物理气相沉积的来源
    • US07025832B2
    • 2006-04-11
    • US10621471
    • 2003-07-18
    • Ki Beom KimSang Dae KimYoon Soo HanYoon Heung TakSeok Joo Kim
    • Ki Beom KimSang Dae KimYoon Soo HanYoon Heung TakSeok Joo Kim
    • C23C14/24
    • C23C14/12C23C14/243C23C14/543H01L51/56
    • A deposition source is provided which is installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organic electroluminescent layers onto the substrate. The deposition source includes a vessel formed of a top plate on which a vapor efflux aperture is formed, a side wall, and a bottom wall; a heating device that supplies heat to the deposition material received in the vessel, the heating device being capable of moving vertically; and a moving device that moves the heating device (or the bottom wall), the moving device (or the bottom wall) being operated in response to the signal of a sensing device on varied distances between the heating device and the surface of said deposition material. Thus, the heating device is moved downward (or the bottom wall) is moved upward by the moving device to maintain the distance between the heating device (or the substrate to be coated) and the surface of the deposition material at an initially-set value when the thickness of the deposition material is decreased.
    • 提供沉积源,其安装在室中,通过施加的电力加热以将热量传递到容纳在其中的气相沉积材料,并将其中产生的汽化沉积材料施加到衬底上以在衬底上形成沉积有机电致发光层。 沉积源包括由其上形成有蒸汽流出孔的顶板形成的容器,侧壁和底壁; 加热装置,其向容纳在容器中的沉积材料供热,所述加热装置能够垂直移动; 以及移动装置,其使加热装置(或底壁)移动,移动装置(或底壁)响应于感测装置的信号在加热装置和所述沉积材料的表面之间的不同距离上被操作 。 因此,加热装置通过移动装置向下移动(或底壁),以将加热装置(或待涂覆的基板)与沉积材料的表面之间的距离保持在初始设定值 当沉积材料的厚度减小时。