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    • 8. 发明授权
    • Mounting member for polishing
    • 抛光用安装构件
    • US5871393A
    • 1999-02-16
    • US821275
    • 1997-03-20
    • Hajime Shiozawa
    • Hajime Shiozawa
    • B24B37/04B24B37/30B24B45/00B24B5/00
    • B24B37/22B24B45/00Y10S451/921
    • When a mounting member employed for fine polishing of semiconductor substrates or glass substrates etc. is constituted of a combination of a sheet of continuous porous structure and a template, operating efficiency is lowered by the need to change the template; this is a factor raising production costs, and edge portions of the polishing workpiece get damaged by contact with the template, causing production of defective articles. By making the mounting member for polishing a member in which water repellence was conferred on at least a surface skin layer of a continuous sheet of porous structure, fine polishing without a template was made possible.
    • 当用于半导体衬底或玻璃衬底等的精细抛光的安装构件由连续多孔结构片和模板的组合构成时,由于需要改变模板,操作效率降低; 这是提高生产成本的因素,并且抛光工件的边缘部分通过与模板接触而损坏,导致制造缺陷物品。 通过制造用于抛光多孔结构的连续片材的至少表面层的防水性构件的安装构件,可以进行无模板的精细研磨。