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    • 2. 发明授权
    • Process for polymerization with suppressed polymer scale formation
    • 具有抑制聚合物垢形成的聚合方法
    • US5574115A
    • 1996-11-12
    • US355281
    • 1994-12-12
    • Toshihide ShimizuMikio WatanabeToshihiko Nakano
    • Toshihide ShimizuMikio WatanabeToshihiko Nakano
    • C08F2/00C08F2/20C09K3/00
    • C08F2/004
    • A polymer scale preventive agent for use in polymerization of a monomer having an ethylenically unsaturated double bond, comprising an alkaline solution containing: (A) a condensation product of (A-1) a condensate of acetone with a hydroxybenzene compound having at least two hydroxyl groups, and (A-2) an aldehyde compound; (B) an inorganic colloid; and (C) a water-soluble polymeric compound. This agent is used for forming a coating on the inner wall, etc. of a polymerization vessel. Such a vessel is effective in preventing polymer scale deposition, not only on the areas in the liquid-phase region but also on the areas around the interface between the gas and liquid phases in the vessel, and useful in producing a polymer that shows very few fish eyes and good whiteness when formed into sheets or the like.
    • 一种用于聚合具有烯键式不饱和双键的单体的聚合物防垢剂,其包含碱性溶液,该碱性溶液含有:(A)(A-1)缩合产物与丙酮的缩合物与具有至少两个羟基的羟基苯化合物 基团和(A-2)醛化合物; (B)无机胶体; 和(C)水溶性聚合物。 该试剂用于在聚合容器的内壁等上形成涂层。 这样的容器不仅可以有效地防止聚合物垢沉积,而且不仅在液相区域中,而且在容器中的气相和液相之间的界面周围的区域上也是有效的,并且可用于制备显示非常少的聚合物 当形成片材等时,鱼眼睛和白度良好。
    • 5. 发明授权
    • Semiconductor device having critical path connected by feedback ring oscillator
    • 具有通过反馈环形振荡器连接的关键路径的半导体器件
    • US06515549B2
    • 2003-02-04
    • US09793655
    • 2001-02-27
    • Toshihiko Nakano
    • Toshihiko Nakano
    • H03B524
    • H03K3/0315Y10S331/03
    • In a semiconductor integrated circuit, a selector 1 selects a signal FB at the input thereof by giving a proper level to a signal EN. By setting two-phase scan clocks SC1, SC2 of F/F 2,4 so that F/F 2,4 are set to the through state, a signal can be passed from F/F 2 to F/F 4 under a through state in the above circuit. Further, there can be fabricated a critical path-ring oscillator which is self-oscillated in the critical path by negatively feeding back the output of F/F 4 to F/F 2 through the signal FB. The logic in the ring is required to be an inverted logic. In a test other than a speed screening test or at the normal operation time, a proper level is given to the signal EN so that the selector 1 is switched to select the input side, thereby cutting a negative feedback path through which the output of F/F 4 is negatively fed back to F/F2.
    • 在半导体集成电路中,选择器1通过给信号EN赋予适当的电平来选择其输入端的信号FB。 通过设置F / F 2,4的两相扫描时钟SC1,SC2使得F / F 2,4被设置为通过状态,可以在直通下通过F / F 2将信号从F / F 2传递到F / F 4 状态在上述电路。 此外,可以制造关键路径环形振荡器,其通过信号FB将F / F 4的输出负向反馈到F / F 2而在关键路径中自振荡。 环中的逻辑必须是反向逻辑。 在除了速度筛选测试之外的测试中或在正常操作时间,对信号EN给出适当的电平,使得选择器1被切换以选择输入侧,从而切割负反馈路径,通过该负路反馈路径输出F / F 4反馈回F / F2。
    • 10. 发明申请
    • PELLICLE FOR HIGH NUMERICAL APERTURE EXPOSURE DEVICE
    • 高数值孔径曝光装置用透镜
    • US20090042107A1
    • 2009-02-12
    • US12162420
    • 2007-01-30
    • Masahiro KondouToshihiko Nakano
    • Masahiro KondouToshihiko Nakano
    • G03F1/00
    • G03F1/62
    • A pellicle that is used in a semiconductor lithography process and that can be used in an exposure device with an optical system having a numerical aperture of 1.0 or above, is provided. The pellicle of the present invention uses a pellicle film that has had its film thickness adjusted so as to exhibit transmittance of 95% or above at angles of incidence of exposure light with respect to the pellicle film in the range of from 0° to 20°. By using the pellicle of the present invention, it is possible to produce a semiconductor having an unprecedented fine circuit pattern at good yield while preventing adherence of dust to a reticle.
    • 提供了用于半导体光刻工艺中并且可以用于具有数值孔径为1.0或更大的光学系统的曝光装置中的防护薄膜组件。 本发明的防护薄膜组件使用其薄膜厚度调整为使曝光光相对于防护薄膜的入射角在0°〜20°范围内的透射率为95%以上的防护薄膜组件 。 通过使用本发明的防护薄膜组件,可以以良好的成品率制造具有前所未有的微细电路图案的半导体,同时防止灰尘附着在掩模版上。