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    • 1. 发明申请
    • Variable capacitance measuring device comprising a glass-ceramic insulator
    • 包括玻璃 - 陶瓷绝缘体的可变电容测量装置
    • US20050088270A1
    • 2005-04-28
    • US10996023
    • 2004-11-23
    • Hai Mei
    • Hai Mei
    • G01L9/12G01D20060101G01L9/00G01L19/04G01L19/06
    • G01L19/06G01L9/0072G01L19/04G01L19/0636
    • A variable capacitance measuring device can comprise a glass-ceramic insulator having a coefficient of thermal expansion that closely matches the coefficient of thermal expansion of a metallic materials used within the device. The glass-ceramic material may chemically bond to the surfaces of the metallic materials to provide a hermetic seal and eliminate the need for a separate glass seal or grooves within the electrode assembly. Additionally, a single-piece electrode assembly can be used instead of a separate electrode assembly (for the electrical feedthrough) and electrode. A shim may be used during the formation of the insulating material to reduce the likelihood of the insulator adhering to surfaces of the electrode portion during the manufacturing process. Also, separate bake-out and getter activation cycles may be combined into a single heat cycle.
    • 可变电容测量装置可以包括具有与装置内使用的金属材料的热膨胀系数密切匹配的热膨胀系数的玻璃 - 陶瓷绝缘体。 玻璃陶瓷材料可以化学地结合到金属材料的表面以提供气密密封,并且消除对电极组件内的单独玻璃密封或凹槽的需要。 另外,可以使用单片式电极组件代替单独的电极组件(用于电馈通)和电极。 在形成绝缘材料期间可以使用垫片,以减少在制造过程中绝缘体粘附到电极部分表面的可能性。 此外,单独的烘烤和吸气剂激活循环可以组合成单个热循环。
    • 2. 发明授权
    • Variable capacitance measuring device
    • 可变电容测量装置
    • US07395716B2
    • 2008-07-08
    • US11392253
    • 2006-03-29
    • Hai Mei
    • Hai Mei
    • G01L9/12
    • G01L19/06G01L9/0072G01L19/0681
    • A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. Substantially varying topologies for ceramic-metal interfaces may reduce the likelihood of external contaminants from reaching the evacuated portion of the device. A tube can be used between the capacitor portion and a gettering housing to isolate external forces and getter activation heat from the sensor. The same tube also reduces heat loss from a heated sensor and protects the electronics from overheating. Embodiments also include processes for using and forming the devices.
    • 可变电容测量装置可以包括在各种不同实施例中的任何一个或多个特征允许实现可靠,紧凑的装置。 电容器电极,吸气外壳和夹断连接器可以沿着共同的轴线对准可以减小宽度尺寸而不会显着增加长度。 可以通过选择具有相对更靠近彼此的热膨胀系数的材料来降低温度引起的变化。 用于陶瓷 - 金属界面的基本变化的拓扑结构可能会降低外部污染物到达设备的抽真空部分的可能性。 可以在电容器部分和吸气外壳之间使用管,以隔离外力并从传感器吸收活化热。 相同的管还可减少加热传感器的热损失,并保护电子元件免于过热。 实施例还包括使用和形成装置的方法。
    • 3. 发明申请
    • Variable capacitance measuring device
    • 可变电容测量装置
    • US20050039535A1
    • 2005-02-24
    • US10952508
    • 2004-09-28
    • Hai Mei
    • Hai Mei
    • G01L9/00H01L31/112G01L19/04
    • G01L19/06G01L9/0072G01L19/0681
    • A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. Substantially varying topologies for ceramic-metal interfaces may reduce the likelihood of external contaminants from reaching the evacuated portion of the device. A tube can be used between the capacitor portion and a gettering housing to isolate external forces and getter activation heat from the sensor. The same tube also reduces heat loss from a heated sensor and protects the electronics from overheating. Embodiments also include processes for using and forming the devices.
    • 可变电容测量装置可以包括在各种不同实施例中的任何一个或多个特征允许实现可靠,紧凑的装置。 电容器电极,吸气外壳和夹断连接器可以沿着共同的轴线对准可以减小宽度尺寸而不会显着增加长度。 可以通过选择具有相对更靠近彼此的热膨胀系数的材料来降低温度引起的变化。 用于陶瓷 - 金属界面的基本变化的拓扑结构可能会降低外部污染物到达设备的抽真空部分的可能性。 可以在电容器部分和吸气外壳之间使用管,以隔离外力并从传感器吸收活化热。 相同的管还可减少加热传感器的热损失,并保护电子元件免于过热。 实施例还包括使用和形成装置的方法。
    • 5. 发明授权
    • Variable capacitance measuring device
    • US07000482B2
    • 2006-02-21
    • US10178170
    • 2002-06-24
    • Hai Mei
    • Hai Mei
    • G01L9/12
    • G01L19/06G01L9/0072G01L19/0681
    • A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. Substantially varying topologies for ceramic-metal interfaces may reduce the likelihood of external contaminants from reaching the evacuated portion of the device. A tube can be used between the capacitor portion and a gettering housing to isolate external forces and getter activation heat from the sensor. The same tube also reduces heat loss from a heated sensor and protects the electronics from overheating. Embodiments also include processes for using and forming the devices.
    • 6. 发明授权
    • System and method for producing and delivering vapor
    • 用于生产和输送蒸汽的系统和方法
    • US07680399B2
    • 2010-03-16
    • US11349068
    • 2006-02-07
    • Daryl BuchananFaisal TariqHai MeiStuart Tison
    • Daryl BuchananFaisal TariqHai MeiStuart Tison
    • A01G13/06
    • F22B35/005F22B35/00
    • Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.
    • 公开了用于生产和输送蒸气的系统和方法。 容纳液体的蒸发器罐可以被加热,使得罐内的液体被加热并产生蒸气。 然后可以调节该蒸气到目的地的流动。 本发明的实施例可以控制该液体的温度,使得蒸发器罐中基本上保持饱和蒸气条件。 蒸发器罐耦合到质量流量控制器,其调节蒸汽向下游部件的输送。 通过基本上保持蒸发器罐内的饱和蒸汽状态,可以基本上保持质量流量控制器处的蒸汽压力,并且获得稳定且一致的蒸汽流量。
    • 8. 发明授权
    • Variable capacitance measuring device
    • US07043994B2
    • 2006-05-16
    • US10952508
    • 2004-09-28
    • Hai Mei
    • Hai Mei
    • G01L19/04
    • G01L19/06G01L9/0072G01L19/0681
    • A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. Substantially varying topologies for ceramic-metal interfaces may reduce the likelihood of external contaminants from reaching the evacuated portion of the device. A tube can be used between the capacitor portion and a gettering housing to isolate external forces and getter activation heat from the sensor. The same tube also reduces heat loss from a heated sensor and protects the electronics from overheating. Embodiments also include processes for using and forming the devices.
    • 9. 发明申请
    • Pressure sensor device and method
    • 压力传感器装置及方法
    • US20050230768A1
    • 2005-10-20
    • US10827026
    • 2004-04-19
    • Hai Mei
    • Hai Mei
    • G01L9/00H01L29/84
    • G01L19/0061G01L19/148
    • Embodiments of the present invention provide a diaphragm pressure gauge with an interface printed circuit board (“PCB”) contained in a reference pressure chamber of the diaphragm pressure gauge for receiving signals from one or more sensing elements in the reference pressure chamber. The sensing elements can comprise, for example, piezoelectric strain gauges, piezoresistive strain gauges, capacitor elements or other elements used in determining the deflection in the diaphragm. The interface PCB can be configured to connect the sensing elements to pass-through electrical connections in the housing of the reference pressure chamber. Thus, signals can be communicated from the sensing elements, through the interface board and out of the reference pressure chamber via the pass-through electrical connections.
    • 本发明的实施例提供了一种隔膜压力表,其具有包含在隔膜压力计的参考压力室中的接口印刷电路板(“PCB”),用于接收来自参考压力室中的一个或多个感测元件的信号。 感测元件可以包括例如用于确定隔膜中的偏转的压电应变仪,压阻应变仪,电容器元件或其他元件。 接口PCB可以被配置为将感测元件连接到参考压力室的壳体中的直通电连接。 因此,信号可以从感测元件通过接口板通过传递电连接而从参考压力室传出。
    • 10. 发明授权
    • Variable capacitance measuring device
    • 可变电容测量装置
    • US06837111B2
    • 2005-01-04
    • US10228612
    • 2002-08-27
    • Hai Mei
    • Hai Mei
    • G01L9/12G01D20060101G01L9/00G01L19/04G01L19/06
    • G01L19/06G01L9/0072G01L19/04G01L19/0636
    • A variable capacitance measuring device can comprise a glass-ceramic insulator having a coefficient of thermal expansion that closely matches the coefficient of thermal expansion of a metallic materials used within the device. The glass-ceramic material may chemically bond to the surfaces of the metallic materials to provide a hermetic seal and eliminate the need for a separate glass seal or grooves within the electrode assembly. Additionally, a single-piece electrode assembly can be used instead of a separate electrode assembly (for the electrical feedthrough) and electrode. A shim may be used during the formation of the insulating material to reduce the likelihood of the insulator adhering to surfaces of the electrode portion during the manufacturing process. Also, separate bake-out and getter activation cycles may be combined into a single heat cycle.
    • 可变电容测量装置可以包括具有与装置内使用的金属材料的热膨胀系数密切匹配的热膨胀系数的玻璃 - 陶瓷绝缘体。 玻璃陶瓷材料可以化学地结合到金属材料的表面以提供气密密封,并且消除对电极组件内的单独玻璃密封或凹槽的需要。 另外,可以使用单片式电极组件代替单独的电极组件(用于电馈通)和电极。 在形成绝缘材料期间可以使用垫片,以减少在制造过程中绝缘体粘附到电极部分表面的可能性。 此外,单独的烘烤和吸气剂激活循环可以组合成单个热循环。