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    • 5. 发明授权
    • Method of making an optical detector
    • 制造光学检测器的方法
    • US09520525B1
    • 2016-12-13
    • US14594050
    • 2015-01-09
    • HRL Laboratories, LLC
    • Daniel YapRajesh D. RajavelSarabjit MehtaHasan Sharifi
    • H01L21/00H01L31/18H01L27/146
    • H01L31/1844H01L27/14685H01L31/02363H01L31/035281H01L31/1892Y02E10/50
    • An infrared photo-detector with multiple discrete regions of a first absorber material. These regions may have geometric shapes with sloped sidewalls. The detector also may include a second absorber region comprising a second absorber material that absorbs light of a shorter wavelength than the light absorbed by the multiple discrete absorber regions of the first absorber material. The geometric shapes may extend only through the first absorber material. Alternatively, the geometric shapes may extend partially into the second absorber region. The detector has a metal reflector coupled to the multiple discrete absorber regions. The detector also has a substrate containing the discrete absorber regions and the second absorber region. The substrate can further include geometric shaped features etched into the substrate, with those features formed on the side of the substrate opposite the side containing the discrete absorber regions and the second absorber region.
    • 具有第一吸收材料的多个离散区域的红外光电检测器。 这些区域可以具有倾斜侧壁的几何形状。 检测器还可以包括第二吸收体区域,该第二吸收体区域吸收比由第一吸收体材料的多个分立吸收体区域吸收的光更短波长的光的第二吸收体材料。 几何形状可仅延伸穿过第一吸收材料。 或者,几何形状可以部分地延伸到第二吸收体区域中。 检测器具有耦合到多个分立吸收体区域的金属反射器。 检测器还具有包含离散吸收区域和第二吸收区域的基板。 衬底还可以包括蚀刻到衬底中的几何形状特征,其中这些特征形成在衬底的与包含离散吸收体区域和第二吸收体区域的侧面相反的一侧。