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2. 发明申请

US20130299348A1 SPUTTERING APPARATUS 有权
标题翻译：溅射装置
公开(公告)号：US20130299348A1
公开(公告)日：2013-11-14
申请号：US13938289
申请日：2013-07-10
申请人： HON HAI PRECISION INDUSTRY CO., LTD.
发明人： WEI-CHENG LING
IPC分类号： C23C14/50
CPC分类号： C23C14/50 , C23C14/02 , C23C14/505 , C23C14/56 , H01J37/34 , H01L21/6719 , H01L21/67207
摘要： A sputtering apparatus includes a support assembly and posts. The support assembly includes an upper base, a lower base, seat members, and connection posts interconnected between the upper base and the lower base. The upper base defines cutouts. The seat members are rotatably mounted on the lower base and aligned with the cutouts. Each seat member includes a hollow receiving post, a support post moveably received in the receiving post, a lever bar pivotably connected to the receiving post, and a drive post, the drive post and the support post are coupled to opposite ends of the lever bar. Each seat member is rotatable about a longitudinal axis of the receiving post. The posts fix workpieces in place. Each post includes a rod body portion having a first end and an opposite second end, an engagement portion at the first end, and a protrusion extending from the second end.
摘要翻译：溅射装置包括支撑组件和支柱。支撑组件包括上底座，下底座，座椅构件和在上基座和下基座之间互连的连接柱。上部基座定义了切口。座椅构件可旋转地安装在下底座上并与切口对准。每个座椅构件包括中空的接收柱，可移动地容纳在接收柱中的支撑柱，可枢转地连接到接收柱的杆杆，以及驱动柱，驱动柱和支撑柱联接到杆杆的相对端。每个座椅构件可围绕接收柱的纵向轴线旋转。柱子固定工件。每个柱包括具有第一端和相对的第二端的杆体部分，在第一端处的接合部分和从第二端延伸的突出部。

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