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1. 发明申请

US20220059382A1 Method and Apparatus for Detecting Positions of Wafers 有权
公开(公告)号：US20220059382A1
公开(公告)日：2022-02-24
申请号：US17302437
申请日：2021-05-03
申请人： HIWIN TECHNOLOGIES CORP.
发明人： Yan-Yu Chen , Ming-Shiou Liu
IPC分类号： H01L21/68 , G01B11/24 , G01B11/26
摘要： A method and an apparatus for detecting positions of wafers. A rotation table, on which the wafer with an aiming feature is disposed, rotates in a direction at a faster speed while a detector detects a periphery of the wafer and provides a controller with a detection result. The rotation table rotates in an opposite direction at a slower speed after the aiming feature passes the detector, while the detector detects the periphery of the wafer and provides the controller with a new detection result. A respective detection result corresponds to a rotation angle. When the aiming feature passes the detector again, the rotation table stops rotating, and the controller computes the eccentric position of the wafer and the position of the aiming feature according to the detection results and their rotation angles. Therefore, the time for detection may decrease.

2. 发明授权

US09625017B2 Circulating device for motion guide apparatus 有权
公开(公告)号：US09625017B2
公开(公告)日：2017-04-18
申请号：US13763750
申请日：2013-02-11
申请人： Hiwin Technologies Corp.
发明人： Yan-Yu Chen , Wuteng Hsieh
IPC分类号： F16H1/24 , F16H55/02 , F16H25/22
CPC分类号： F16H25/2214 , F16H25/2233 , Y10T74/19767
摘要： A motion guide device includes a ball nut attached onto a shaft and having helical grooves for receiving ball bearing elements, a ball circulating member is engaged with the ball nut and includes a ball circulating channel communicative with the helical groove of the ball nut, and includes an intermediate segment and two end segments, a ball coupler includes two flexible coupling members for engaging with the ball bearing elements, and the ball circulating member includes two opposite helical guide pathways for receiving the flexible coupling members of the ball coupler, and curved relative to the ball circulating member for smoothly guiding the flexible coupling members to move through the ball circulating member.

3. 发明授权

US09188210B2 External circulation type ball screw device 有权
标题翻译：外循环式滚珠丝杠装置
公开(公告)号：US09188210B2
公开(公告)日：2015-11-17
申请号：US13669871
申请日：2012-11-06
申请人： HIWIN TECHNOLOGIES CORP.
发明人： Ming-Yao Lin , Po-Chuan Hau , Yan-Yu Chen
IPC分类号： F16H25/22
CPC分类号： F16H25/2214 , Y10T74/19753
摘要： The invention provides an external circulation type ball screw device comprising screw shaft and nut having first and second screw grooves. A circulation member comprises first leg, second leg and connection portion. The first leg comprises a first end surface having first inner and outer points, and the second leg comprises a second end surface having second inner and outer points; first and second entrances formed on the first and second end surfaces of circulation passage; first and second thickness respectively provided between the first entrance and the first inner and outer points thereof; the second thickness being greater than the first; the third and fourth thickness respectively provided between the second entrance and the second inner and outer points thereof; the fourth thickness being greater than the third. The groove wall of the second screw groove occupied and the occurrence of broken teeth of the nut are reduced.
摘要翻译：本发明提供一种外循环型滚珠丝杠装置，其包括具有第一和第二螺纹槽的螺杆轴和螺母。循环构件包括第一腿，第二腿和连接部。第一腿包括具有第一内部和外部点的第一端面，并且第二腿包括具有第二内部和外部点的第二端面; 形成在循环通道的第一和第二端面上的第一入口和第二入口; 第一和第二厚度分别设置在第一入口与其第一内外点之间; 第二厚度大于第一厚度; 第三和第四厚度分别设置在第二入口与第二内部和外部点之间; 第四厚度大于第三厚度。占用第二螺纹槽的槽壁和螺母的齿的发生减少。

4. 发明授权

US11721573B2 Method and apparatus for detecting positions of wafers 有权
公开(公告)号：US11721573B2
公开(公告)日：2023-08-08
申请号：US17302437
申请日：2021-05-03
申请人： HIWIN TECHNOLOGIES CORP.
发明人： Yan-Yu Chen , Ming-Shiou Liu
IPC分类号： H01L21/68 , G01B11/26 , G01B11/24
CPC分类号： H01L21/681 , G01B11/24 , G01B11/26
摘要： A method for detecting positions of wafers includes: rotating a rotation table with a wafer thereon in a first direction at a first speed; detecting a contour of the wafer rotating in the first direction at the first speed to provide contour data; rotating the rotation table in a second direction at a second speed when an aiming feature of the wafer passes the detector in the first direction at the first speed; detecting the contour of the wafer rotating in the second direction at the second speed to provide new contour data; and stopping the rotation of the rotation table and the detection of the wafer according to an accumulation of contour data and corresponding rotation angles, to estimate an eccentric position of the wafer and a position of the aiming feature when the aiming feature passes the detector in the second direction at the second speed.

5. 发明授权

US09597807B2 Robot teaching device 有权
公开(公告)号：US09597807B2
公开(公告)日：2017-03-21
申请号：US14523192
申请日：2014-10-24
申请人： HIWIN TECHNOLOGIES CORP.
发明人： Wen-Chia Wu , Yan-Yu Chen
IPC分类号： B25J9/18 , G05B19/19 , B25J13/06 , B25J13/00
CPC分类号： B25J13/06 , B25J13/006 , Y10S901/03
摘要： A robot teaching device is suitable for being signal connected to a controller used to control a robot, and includes: a connecting base which includes an enable switch and a first connector, and is connected to the controller by a transmission wire; a motion device which is removably disposed in the connecting base, and includes a second connector connected to the first connector, and a touch screen for displaying plural virtual keys. The motion device will be wirelessly signal connected to the controller, when it is removed from the connecting base, and the touch screen will display the virtual keys. When the motion device is inserted in the connecting base, and the enable switch is not pressed, the first and second connectors will be connected, and the virtual keys will be switched off. The virtual keys will be switched on after the enable switch is kept being pressed.

6. 发明授权

US08935967B2 Roller element retainer for ball screw device 有权
标题翻译：滚珠丝杠保持器用于滚珠丝杠装置
公开(公告)号：US08935967B2
公开(公告)日：2015-01-20
申请号：US13721187
申请日：2012-12-20
申请人： Hiwin Technologies Corp.
发明人： Yan-Yu Chen , Wuteng Hsieh
IPC分类号： F16H25/22
CPC分类号： F16H25/2223 , F16H25/2214 , Y10T74/19753 , Y10T74/19772 , Y10T74/19777
摘要： A motion guide device includes a ball nut attached onto a shaft and having helical grooves for forming a ball guiding raceway between the ball nut and the elongated shaft and for receiving ball bearing elements, a circulating device attached to the ball nut and having a pathway communicative with the raceway for forming an endless ball guiding passage between the ball nut and the elongated shaft and the circulating device and for engaging with bearing elements, and a retaining device includes a shorter chain for engaging into the helical grooves or raceway of the screw shaft and the ball nut, and a longer chain for engaging into the pathway of the circulating device.
摘要翻译：运动引导装置包括一个安装在轴上的滚珠螺母，并具有用于在滚珠螺母和细长轴之间形成滚珠导轨的螺旋槽，用于接收滚珠轴承元件，连接在滚珠螺母上的循环装置，用于在滚珠螺母和细长轴之间形成环形滚珠引导通道的滚道和循环装置并用于与轴承元件接合，并且保持装置包括用于啮合到螺旋槽或螺杆轴的滚道中的较短的链条，滚珠螺母和用于接合到循环装置的通路中的较长链条。

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