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1. 发明申请

US20160033548A1 INSPECTION METHOD AND ITS APPARATUS FOR THERMAL ASSIST TYPE MAGNETIC HEAD ELEMENT 有权
标题翻译：检验方法及其辅助类型磁头元件的设备
公开(公告)号：US20160033548A1
公开(公告)日：2016-02-04
申请号：US14813306
申请日：2015-07-30
申请人： HITACHI HIGH-TECH FINE SYSTEMS CORPORATION
发明人： Kaifeng ZHANG , Takenori HIROSE , Masahiro WATANABE , Toshinori SUGIYAMA , Akira TOBITA
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , G01Q60/06 , G01Q60/08
摘要： To detect near-field light, which is generated by a thermal assist type magnetic head element, and leaking light with high sensitivity and to more accurately obtain the spatial intensity distribution of a near-field light generation area, an inspection apparatus for a thermal assist type magnetic head element is adapted so that a distance between a cantilever and the surface of a specimen and the excitation amplitude of the cantilever are set to be small to detect near-field light with high sensitivity by the suppression of an influence of other light components, a distance between the cantilever and the surface of the specimen and the excitation amplitude of the cantilever are set to be large to detect other light components present in the vicinity of near-field light with high sensitivity by the suppression of an influence of the amount of detected near-field light when other light components are measured.
摘要翻译：为了检测由热辅助型磁头元件产生的近场光和具有高灵敏度的泄漏光并且更精确地获得近场光产生区域的空间强度分布，用于热辅助的检查装置适于使悬臂与样品表面之间的距离和悬臂的激发振幅设定得较小，以便通过抑制其它光成分的影响来检测具有高灵敏度的近场光将悬臂与试样的表面之间的距离和悬臂的激发振幅设定得较大，以通过抑制量的影响来高灵敏度地检测存在于近场光附近的其他光分量当测量其他光分量时，检测到的近场光。

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