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    • 2. 发明申请
    • Method of Manufacturing Thermal Flow Meter
    • 制造热流量计的方法
    • US20160146652A1
    • 2016-05-26
    • US14899567
    • 2014-02-07
    • HITACHI AUTOMOTIVE SYSTEMS, LTD.
    • Norio ISHITSUKAMasatoshi OGATATsutomu KONOTsubasa WATANABEShinobu TASHIRONoboru TOKUYASU
    • G01F1/692
    • G01F1/692G01F1/684G01F5/00
    • An objective of the present invention is, in a thermal flowmeter having a structure including a resin portion formed in the vicinity of a diaphragm structural portion using a mold, to prevent destruction of the diaphragm structural portion at the time of pressing the mold, in a method of manufacturing the thermal flow meter, including: supporting a gas flow measurement element 200 on support members 102b and 111, the gas flow measurement element 200 including a cavity portion 202 surrounded by a substrate inclined portion 202a inclined to a substrate surface, a diaphragm 201 that covers the cavity portion, and an electrical resistive element formed in the diaphragm 201; and covering the gas flow measurement element 200 and the support members 102b and 111 with the resin portion 104 formed with the mold, to set the mold 14 such that an acting portion of pressure force by the mold that molds the resin portion 104 is positioned outside the substrate inclined portion 202a in the entire periphery of the diaphragm 201.
    • 本发明的目的在于,在具有使用模具形成在隔膜结构部附近的树脂部的结构的热式流量计中,为了防止压模时的膜结构部的破坏, 制造热流量计的方法包括:在支撑部件102b和111上支撑气体流量测量元件200,气体流量测量元件200包括由与基板表面倾斜的基板倾斜部分202a包围的空腔部分202,隔膜 201,其形成在隔膜201中;电阻元件, 并用形成有模具的树脂部分104覆盖气体流量测量元件200和支撑构件102b和111,以将模具14设置成使得模制树脂部分104的模具的压力作用部分位于外部 基板倾斜部分202a在隔膜201的整个周边。