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    • 10. 发明申请
    • Pressure Sensor
    • 压力传感器
    • US20160313199A1
    • 2016-10-27
    • US15035838
    • 2014-11-12
    • HITACHI AUTOMOTIVE SYSTEMS, LTD.
    • Atsushi KAZAMAJunji ONOZUKAHiroshi ONUKIMiho TOBITAMasayuki HIO
    • G01L9/00
    • G01L9/0055G01L9/0044G01L19/0038G01L19/0084G01L19/04
    • In a pressure sensor having a configuration in which strain gauges are provided on a diaphragm, a change in sensor characteristic caused by a positional shift of the strain gauges is suppressed, and a change in sensor output in response to a change in temperature is suppressed. The pressure sensor is a pressure sensor obtained by arranging, on a diaphragm having a long side and a short side, a sensor chip in which four strain gauges having the same characteristic and constituting a bridge circuit are provided, the pressure sensor being for detecting, in the bridge circuit, voltage output that is in proportion to a pressure applied to the diaphragm, and the pressure sensor is configured as follows: the four strain gauges are arranged to be adjacent to one another in the vicinity of the center of the diaphragm so that two strain gauges are arranged along the short side and the other two strain gauges are arranged along the long side; and the diaphragm has a thin portion in a long-side direction seen from the sensor chip.
    • 在具有应变仪设置在隔膜上的结构的压力传感器中,抑制了由应变计的位置偏移引起的传感器特性的变化,并且抑制了响应于温度变化的传感器输出的变化。 压力传感器是通过在具有长边和短边的隔膜上布置传感器芯片而获得的压力传感器,其中设置有具有相同特性并构成桥接电路的四个应变计,所述压力传感器用于检测, 在桥式电路中,与施加到隔膜的压力成比例的电压输出,并且压力传感器的构造如下:四个应变片布置成在隔膜中心附近彼此相邻, 两个应变计沿着短边排列,另外两个应变计沿长边排列; 并且隔膜在从传感器芯片观察的长边方向上具有薄的部分。