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1. 发明申请

US20150149475A1 DATA HARMONIC ANALYSIS METHOD AND DATA ANALYSIS DEVICE 审中-公开
标题翻译：数据和谐分析方法和数据分析装置
公开(公告)号：US20150149475A1
公开(公告)日：2015-05-28
申请号：US14401623
申请日：2013-07-05
申请人： HITACHI, LTD.
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： G06F17/30
CPC分类号： G06F16/9024 , G06K9/6296
摘要： The present invention provides a data harmonic analysis method and a data analysis device for data analysis in which a plurality of data items to be analyzed are acquired; similarities among a plurality of data sources that generate the data values of the acquired plurality of data items are obtained; a hierarchical graph is generated as a graph structure indicating the acquired plurality of data items, with a plurality of child nodes corresponding to the plurality of data items being located in a lower layer and a parent node that has no data item being located in an upper layer; the connection rate between the parent node and each of the plurality of child nodes is calculated by using the information of the obtained similarities in the generated hierarchical graph; and harmonic analysis is applied, on the basis of the generated hierarchical graph, to the data values in the graph.
摘要翻译：本发明提供一种用于数据分析的数据谐波分析方法和数据分析装置，其中获取要分析的多个数据项; 获得生成所获取的多个数据项的数据值的多个数据源之间的相似度; 生成分层图作为指示所获取的多个数据项的图形结构，其中与多个数据项对应的多个子节点位于下层，并且没有数据项位于上层的父节点层; 通过使用生成的分层图中获得的相似度的信息来计算父节点与多个子节点中的每一个之间的连接速率; 并根据生成的分层图将谐波分析应用于图中的数据值。

2. 发明申请

US20150015893A1 Optical Inspection Apparatus and Method Thereof 有权
标题翻译：光学检测装置及其方法
公开(公告)号：US20150015893A1
公开(公告)日：2015-01-15
申请号：US14378478
申请日：2013-02-12
申请人： Hitachi, Ltd.
发明人： Kenji Nakahira , Toshifumi Honda
IPC分类号： G01N21/88 , G01N21/21 , G01N21/45 , G01N21/95 , G01N21/84
CPC分类号： G01N21/88 , G01N21/21 , G01N21/45 , G01N21/8422 , G01N21/8806 , G01N21/94 , G01N21/95 , G01N2201/06113 , G01N2201/0697 , G01N2201/0698 , G06T7/0008
摘要： An object of the present invention is to provide an optical inspection apparatus that suppresses an influence of quantum noise and obtains superior defect detection performance even when an amount of light is small and a method thereof.In order to resolve the above problem, the present invention provides an optical inspection apparatus that includes a light source which radiates light to a sample; a light interference device which causes target light transmitted, scattered, or reflected from the sample and reference light to interfere with each other, such that strength of light after the interference becomes lower than strength of the target light; a photon counter which measures a photon number of the light after the interference by the light interference device; and a defect identifier which identifies the presence or absence of a defect, on the basis of a detected photon number obtained by the photon counter.
摘要翻译：本发明的目的在于提供抑制量子噪声的影响的光学检查装置，即使在光量小的情况下也能够得到优异的缺陷检测性能及其方法。为了解决上述问题，本发明提供了一种光学检查装置，其包括向样品照射光的光源; 光干涉装置，其使得从样品和参考光透射，散射或反射的目标光彼此干涉，使得干涉后的光强度变得低于目标光的强度; 光子计数器，其测量由光干涉装置干涉后的光的光子数; 以及基于由光子计数器获得的检测到的光子数来识别缺陷的存在或不存在的缺陷识别符。

3. 发明授权

US09360434B2 Optical inspection apparatus and method thereof 有权
标题翻译：光学检查装置及其方法
公开(公告)号：US09360434B2
公开(公告)日：2016-06-07
申请号：US14378478
申请日：2013-02-12
申请人： Hitachi, Ltd.
发明人： Kenji Nakahira , Toshifumi Honda
IPC分类号： G01B9/02 , G01N21/88 , G06T7/00 , G01N21/21 , G01N21/45 , G01N21/84 , G01N21/95 , G01N21/94
CPC分类号： G01N21/88 , G01N21/21 , G01N21/45 , G01N21/8422 , G01N21/8806 , G01N21/94 , G01N21/95 , G01N2201/06113 , G01N2201/0697 , G01N2201/0698 , G06T7/0008
摘要： An object of the present invention is to provide an optical inspection apparatus that suppresses an influence of quantum noise and obtains superior defect detection performance even when an amount of light is small and a method thereof.In order to resolve the above problem, the present invention provides an optical inspection apparatus that includes a light source which radiates light to a sample; a light interference device which causes target light transmitted, scattered, or reflected from the sample and reference light to interfere with each other, such that strength of light after the interference becomes lower than strength of the target light; a photon counter which measures a photon number of the light after the interference by the light interference device; and a defect identifier which identifies the presence or absence of a defect, on the basis of a detected photon number obtained by the photon counter.
摘要翻译：本发明的目的在于提供抑制量子噪声的影响的光学检查装置，即使在光量小的情况下也能够得到优异的缺陷检测性能及其方法。为了解决上述问题，本发明提供了一种光学检查装置，其包括向样品照射光的光源; 光干涉装置，其使得从样品和参考光透射，散射或反射的目标光彼此干涉，使得干涉后的光强度变得低于目标光的强度; 光子计数器，其测量由光干涉装置干涉后的光的光子数; 以及基于由光子计数器获得的检测到的光子数来识别缺陷的存在或不存在的缺陷识别符。

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