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1. 发明授权

US08988824B1 Method for manufacturing a magnetic write pole with a consistent bevel angle 有权
标题翻译：用于制造具有一致的斜角的磁写柱的方法
公开(公告)号：US08988824B1
公开(公告)日：2015-03-24
申请号：US14139779
申请日：2013-12-23
申请人： HGST Netherlands B.V.
发明人： Elizabeth A. Brinkman , Ning Shi , Brian R. York , Sue S. Zhang
IPC分类号： G11B5/127
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/232 , G11B5/235 , G11B5/3116 , G11B5/3163
摘要： A method for manufacturing a magnetic write head that has improved write poled uniformity and bevel angle control. The method uses a damascene process to form the write pole, wherein a trench is formed in a RIEable fill layer, and an adhesion layer is located only in areas outside of the trench. A seed layer is deposited into the trench, followed by a non-magnetic gap layer followed by electroplating of a magnetic material. A chemical mechanical polishing process is then performed, thereby forming a magnetic write pole within the trench. The adhesion layer located outside of the trench prevents de-lamination during the chemical mechanical polishing. However, not having any adhesion layer in the trench prevent oxidation related waviness or other deformation of the sides of the write pole.
摘要翻译：一种具有改进的写入极化均匀性和斜角控制的磁性写入头的制造方法。该方法使用镶嵌工艺来形成写入极，其中在RIEable填充层中形成沟槽，并且粘合层仅位于沟槽外部的区域中。种子层沉积到沟槽中，随后是非磁隙层，随后电镀磁性材料。然后执行化学机械抛光工艺，从而在沟槽内形成磁写入极。位于沟槽外部的粘合层防止化学机械抛光期间的脱层。然而，在沟槽中没有任何粘附层可防止氧化相关波纹或写柱的侧面的其它变形。

2. 发明授权

US09805747B2 Method for making a perpendicular magnetic recording write head with write pole having thin side gaps and thicker leading gap 有权
公开(公告)号：US09805747B2
公开(公告)日：2017-10-31
申请号：US14827705
申请日：2015-08-17
申请人： HGST Netherlands B.V.
发明人： April D. Hixson-Goldsmith , Ning Shi , Kyusik Shin , Suping Song , Brian R. York
IPC分类号： C23C14/00 , G11B5/31 , G11B5/127 , G11B5/23
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/232 , G11B5/3116 , G11B5/315
摘要： Ionized physical vapor deposition (IPVD) is used to form a magnetic recording disk drive write head main pole with thin side gap layers and a thicker leading gap layer. A metal or metal alloy is formed by IPVD in a trench with a bottom and outwardly sloping sidewalls. An optional Ru seed layer is deposited on the metal or metal alloy. This is followed by atomic layer deposition (ALD) of a Ru smoothing layer. If the IPVD results in metal or metal alloy side gap layers with a rough surface, the ALD process is modified, resulting in a smooth Ru smoothing layer that does not replicate the rough surface of the side gap layers.

3. 发明申请

US20170053668A1 METHOD FOR MAKING A PERPENDICULAR MAGNETIC RECORDING WRITE HEAD WITH WRITE POLE HAVING THIN SIDE GAPS AND THICKER LEADING GAP 有权
标题翻译：用于制作具有薄边和厚度导线缝隙的写入磁头的全磁性记录写头的方法
公开(公告)号：US20170053668A1
公开(公告)日：2017-02-23
申请号：US14827705
申请日：2015-08-17
申请人： HGST Netherlands B.V.
发明人： April D. Hixson-Goldsmith , Ning Shi , Kyusik Shin , Suping Song , Brian R. York
IPC分类号： G11B5/31 , G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/232 , G11B5/3116 , G11B5/315
摘要： Ionized physical vapor deposition (IPVD) is used to form a magnetic recording disk drive write head main pole with thin side gap layers and a thicker leading gap layer. A metal or metal alloy is formed by IPVD in a trench with a bottom and outwardly sloping sidewalls. An optional Ru seed layer is deposited on the metal or metal alloy. This is followed by atomic layer deposition (ALD) of a Ru smoothing layer. If the IPVD results in metal or metal alloy side gap layers with a rough surface, the ALD process is modified, resulting in a smooth Ru smoothing layer that does not replicate the rough surface of the side gap layers.
摘要翻译：电离物理气相沉积（IPVD）用于形成磁记录盘驱动写头主极，具有薄侧间隙层和较厚的前导间隙层。通过IPVD在具有底部和向外倾斜侧壁的沟槽中形成金属或金属合金。可选的Ru籽晶层沉积在金属或金属合金上。这之后是Ru平滑层的原子层沉积（ALD）。如果IPVD导致具有粗糙表面的金属或金属合金侧间隙层，则ALD工艺被改变，导致不平滑侧面间隙层的粗糙表面的光滑的Ru平滑层。

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