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    • 10. 发明授权
    • Varactor having improved Q-factor and method of fabricating the same using SiGe heterojunction bipolar transistor
    • 具有改进的Q因子的变容二极管及其使用SiGe异质结双极晶体管的制造方法
    • US06686640B2
    • 2004-02-03
    • US10044107
    • 2002-01-11
    • Bongki MheenDongwoo SuhJin-Yeong Kang
    • Bongki MheenDongwoo SuhJin-Yeong Kang
    • H01L2993
    • H01L29/66174H01L29/66242H01L29/93
    • A varactor includes a semiconductor substrate of a first conductivity type, a high-concentration buried collector region of a second conductivity type formed in an upper portion of the semiconductor substrate, a collector region of the second conductivity type formed on a first surface of the high-concentration buried collector region, a high-concentration collector contact region of the second conductivity type formed on a second surface of the high-concentration buried collector region, a high-concentration silicon-germanium base region of the first conductivity type formed on the collector region, a metal silicide layer formed on the silicon-germanium base region, a first electrode layer formed to contact the metal silicide layer, and a second electrode layer formed to be electrically connected to the collector contact region.
    • 变容二极管包括第一导电类型的半导体衬底,形成在半导体衬底的上部的第二导电类型的高浓度集电区,在第一表面上形成第二导电类型的集电极区 浓度埋集电极区域,形成在高浓度埋集体区域的第二表面上的第二导电类型的高浓度集电极接触区域,形成在集电体上的第一导电类型的高浓度硅 - 锗基区域 形成在硅 - 锗基区上的金属硅化物层,形成为与金属硅化物层接触的第一电极层和形成为与集电极接触区电连接的第二电极层。