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1. 发明授权

US6036784A Apparatus for holding substrates 失效
标题翻译：用于保持基板的装置
公开(公告)号：US6036784A
公开(公告)日：2000-03-14
申请号：US25251
申请日：1998-02-18
申请人： Gwo-Jou Huang , Jong-Yen Lin , Chieh-Ling Hsiao
发明人： Gwo-Jou Huang , Jong-Yen Lin , Chieh-Ling Hsiao
IPC分类号： C23C16/458 , G02F1/1333 , C23C16/00
CPC分类号： C23C16/4583 , G02F1/1333
摘要： An apparatus for holding substrate includes a base housing. A plurality of pins are set on the top surface of the base housing. Further, the top surface has a plurality of openings through the top surface. The base housing has a first opening set on the bottom portion of one side of the base housing. Lift means is set in the base housing. A support member having an oblique surface structure is provided in the cylindrical housing and can upwardly pass through an opening formed on top of the cylindrical housing. A plate having a plurality of pins formed thereon is connected to the top of the support member. A substrate holder can be separated from the base housing, and the substrate holder includes a plate. A glass substrate is fixed on the plate by means of a plurality of fixers.
摘要翻译：保持基板的装置包括基座壳体。多个销设置在基座壳体的顶表面上。此外，顶表面具有穿过顶表面的多个开口。基座壳体具有设置在基座壳体的一侧的底部上的第一开口。提升装置设置在底座外壳中。具有倾斜表面结构的支撑构件设置在圆筒形壳体中，并且可以向上穿过形成在圆柱形壳体顶部上的开口。在其上形成有多个销的板连接到支撑构件的顶部。衬底保持器可以与基座壳体分离，并且衬底保持器包括板。玻璃基板通过多个固定器固定在板上。

2. 发明授权

US5844788A Voltage oscillating circuit and method 失效
标题翻译：电压振荡电路及方法
公开(公告)号：US5844788A
公开(公告)日：1998-12-01
申请号：US692504
申请日：1996-08-05
申请人： Jong-Yen Lin
发明人： Jong-Yen Lin
IPC分类号： H02M7/519 , H02M5/45
CPC分类号： H02M7/519 , H02M2001/0045
摘要： The present invention comprises a circuit for generating a large-amplitude oscillating voltage. The circuit includes a power supply means for providing an input voltage and a power supply switching means including a solid state relay (SSR) connected to the power supply means for switching on and off the power supply means. The circuit further includes an voltage oscillating means connected to the power supply switching means to be activated by the input voltage and a voltage regulating means connected in series between the power supply switching means and the voltage oscillating means for regulating the input voltage. The circuit further includes a gate driver means connected in parallel between the power supply means and the voltage oscillating means for generating a driving voltage to the voltage oscillating means for generating the large-amplitude oscillating voltage when the solid state relay is switched on.
摘要翻译：本发明包括用于产生大幅度振荡电压的电路。电路包括用于提供输入电压的电源装置和包括连接到电源装置的用于接通和断开电源装置的固态继电器（SSR）的电源切换装置。该电路还包括连接到电源开关装置以由输入电压激活的电压振荡装置和串联连接在电源开关装置和用于调节输入电压的电压振荡装置之间的电压调节装置。电路还包括并联连接在电源装置和电压振荡装置之间的栅极驱动器装置，用于在固态继电器接通时产生用于产生大幅度振荡电压的电压振荡装置的驱动电压。

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