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    • 10. 发明授权
    • Resonator for thermo optic device
    • 热光器件谐振器
    • US09042697B2
    • 2015-05-26
    • US13483542
    • 2012-05-30
    • Gurtej Singh SandhuGuy T. BlalockHoward E. Rhodes
    • Gurtej Singh SandhuGuy T. BlalockHoward E. Rhodes
    • G02B6/10G02B6/26G02B6/42G02B6/132G02B6/12G02B6/136G02F1/01
    • G02B6/132G02B6/12004G02B6/12007G02B6/136G02F1/011G02F1/0147G02F2203/15
    • A resonator for thermo optic devices is formed in the same process steps as a waveguide and is formed in a depression of a lower cladding while the waveguide is formed on a surface of the lower cladding. Since upper surfaces of the resonator and waveguide are substantially coplanar, the aspect ratio, as between the waveguide and resonator in an area where the waveguide and resonator front one another, decreases thereby increasing the bandwidth of the resonator. The depression is formed by photomasking and etching the lower cladding before forming the resonator and waveguide. Pluralities of resonators are also taught that are formed in a plurality of depressions of the lower cladding. To decrease resonator bandwidth, waveguide(s) are formed in the depression(s) of the lower cladding while the resonator is formed on the surface. Thermo optic devices formed with these resonators are also taught.
    • 用于热光器件的谐振器以与波导相同的工艺步骤形成,并且形成在下包层的凹陷中,同时波导形成在下包层的表面上。 由于谐振器和波导的上表面基本上是共面的,因此在波导和谐振器彼此前向的区域中的波导和谐振器之间的纵横比减小,从而增加了谐振器的带宽。 在形成谐振器和波导之前,通过光掩模和蚀刻下部包层形成凹陷。 还教导了形成在下部包层的多个凹部中的多个谐振器。 为了减小谐振器带宽,当在表面上形成谐振器时,在下包层的凹陷中形成波导。 还教导了用这些谐振器形成的热光器件。