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    • 1. 发明授权
    • Method and apparatus for optically determining physical parameters of
underlayers
    • 用于光学确定底层物理参数的方法和装置
    • US6091485A
    • 2000-07-18
    • US464640
    • 1999-12-15
    • Guoguang LiHongwei ZhuDale A. HarrisonAbdul Rahim ForouhiWeilu Xu
    • Guoguang LiHongwei ZhuDale A. HarrisonAbdul Rahim ForouhiWeilu Xu
    • G01N21/00
    • G01N21/41G01N21/55G01N21/59
    • A method and apparatus for optically determining a physical parameter of an underlayer such as the underlayer refractive index N.sub.u, extinction coefficient k.sub.u and/or thickness t.sub.u through a top layer having a first top layer thickness t.sub.1 and an assigned refractive index index n.sub.t and coefficient of extinction k.sub.t. The values of index n.sub.t and extinction coefficient k.sub.t can be estimated, optically determined or assigned based on prior knowledge. In a subsequent step a first reflectance R.sub.1 is measured over a wavelength range .DELTA..lambda. by using a test beam spanning that wavelength range. Then, a second reflectance R.sub.2 of the top layer and underlayer is measured using the test beam spanning wavelength range .DELTA..lambda. at a second top layer thickness t.sub.2. In a calculation step the physical parameter of the underlayer is determined from the first reflectance measurement R.sub.1, the second reflectance measurement R.sub.2, and the assigned or predetermined thickness values t.sub.1, t.sub.2, and the refractive index n.sub.t. and coefficient of extinction k.sub.t of the top layer. A dispersion model can be used in this calculation step. Alternatively, with transmissive samples, a first and second transmittance T.sub.1, T.sub.2 can be used.
    • 一种用于通过具有第一顶层厚度t1和所分配的折射率指数nt的顶层以及所分配的折射率指数nt和的系数来光学地确定诸如底层折射率Nu,消光系数ku和/或厚度tu的底层的物理参数的方法和装置 灭绝kt 指数nt和消光系数kt的值可以基于现有知识来估计,光学确定或分配。 在随后的步骤中,通过使用横跨该波长范围的测试光束,在波长范围DELTAλ上测量第一反射率R1。 然后,使用第二顶层厚度t2的跨越波长范围DELTAλ的测试光束来测量顶层和底层的第二反射率R2。 在计算步骤中,从第一反射率测量R1,第二反射率测量R2和分配的或预定的厚度值t1,t2和折射率nt确定底层的物理参数。 和顶层消光系数kt。 在该计算步骤中可以使用色散模型。 或者,对于透射样品,可以使用第一和第二透射率T1,T2。
    • 2. 发明授权
    • Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
    • 用于光学确定沉积在复合衬底上的薄膜的物理参数的方法和装置
    • US06392756B1
    • 2002-05-21
    • US09336404
    • 1999-06-18
    • Guoguang LiHongwei ZhuDale A. HarrisonAbdul Rahim ForouhiWeilu Xu
    • Guoguang LiHongwei ZhuDale A. HarrisonAbdul Rahim ForouhiWeilu Xu
    • G01B1106
    • G01B11/0641
    • A method and an apparatus for optically determining a physical parameter such as thickness t, index of refraction n, extinction coefficient k or a related physical parameter such as energy bandgap Eg of a thin film. A test beam having a wavelength range &Dgr;&lgr; is used to illuminate the thin film after it is deposited on a complex substrate which has at least two layers and exhibits a non-monotonic and an appreciably variable substrate optical response over wavelength range &Dgr;&lgr;. Alternatively, the thin film can be deposited between the at least two layers of the complex substrate. A measurement of a total optical response, consisting of the substrate optical response and an optical response difference due to the thin film is performed over wavelength range &Dgr;&lgr;. The at least two layers making up the complex substrate are chosen such that the effect of multiple internal reflections in the complex substrate and the film is maximized. The physical parameters are determined from the total optical response which can be in the form of a reflected and/or a transmitted beam.
    • 用于光学地确定诸如厚度t,折射率n,消光系数k或相关物理参数(诸如薄膜的能带隙Eg)的物理参数的方法和装置。 具有波长范围DELTAlambd的测试光束在其沉积在具有至少两层的复合衬底上并且在波长范围DELTAlambd上表现出非单调和可观的可变衬底光学响应之后,用于照射薄膜。 或者,薄膜可以沉积在复合基板的至少两层之间。 在波长范围DELTAlambd上执行由基板光学响应和由薄膜引起的光学响应差异的总光学响应的​​测量。 选择构成复合衬底的至少两层,使得复合衬底和膜中的多次内部反射的影响最大化。 物理参数由可以是反射和/或透射束形式的总光学响应确定。
    • 5. 发明授权
    • Seed layer comprising FCC structure
    • 种子层包括FCC结构
    • US08696874B2
    • 2014-04-15
    • US13367991
    • 2012-02-07
    • Shoutao WangWeilu XuChunghee ChangXiaoguang MaMark JohnsonAbebe HailuCharles Chen
    • Shoutao WangWeilu XuChunghee ChangXiaoguang MaMark JohnsonAbebe HailuCharles Chen
    • C23C14/34
    • G11B5/84G11B5/732G11B5/7325G11B5/738
    • An apparatus and method are provided for improving perpendicular magnetic recording media. The present invention provides media, and a method of fabricating media in a cost-effective manner, with a reduced ruthenium (Ru) content interlayer structure, while meeting media performance requirements. A perpendicular magnetic recording medium is provided comprising a non-magnetic substrate having a surface, and a layer stack situated on the substrate surface. The layer stack comprises, in overlying sequence from the substrate surface a magnetically soft underlayer; an amorphous or crystalline, non-magnetic seed layer; an interlayer structure for crystallographically orienting a layer of a perpendicular magnetic recording material situated on the underlayer; and at least one crystallographically oriented, magnetically hard, perpendicular magnetic recording layer situated on the interlayer structure. The interlayer structure is a stacked structure comprising, in overlying sequence: a chromium alloy situated on the seed layer; and an upper interlayer situated on the chromium alloy.
    • 提供了用于改进垂直磁记录介质的装置和方法。 本发明在满足介质性能要求的同时,提供了具有降低的钌(Ru)含量层间结构的以成本有效的方式制造介质的介质和方法。 提供了包括具有表面的非磁性基底和位于基底表面上的层叠的垂直磁记录介质。 层叠体以从衬底表面的叠加顺序包括一个软磁软底层; 无定形或结晶的非磁性种子层; 用于晶体取向位于底层上的垂直磁记录材料层的层间结构; 以及位于层间结构上的至少一个晶体取向的磁性硬的垂直磁记录层。 层间结构是层叠结构,其叠加顺序为:位于种子层上的铬合金; 和位于铬合金上的上层。
    • 8. 发明授权
    • Recording media interlayer structure
    • 记录介质层间结构
    • US08025993B2
    • 2011-09-27
    • US11709822
    • 2007-02-23
    • Abebe HailuWeilu XuXiaoguang MaChung-Hee ChangShoutao WangCharles C. Chen
    • Abebe HailuWeilu XuXiaoguang MaChung-Hee ChangShoutao WangCharles C. Chen
    • G11B5/66
    • G11B5/732G11B5/65G11B5/667G11B5/7325
    • A perpendicular magnetic recording medium comprises a layer stack formed over a surface of a non-magnetic substrate, and comprising, in overlying sequence from the surface: a magnetically soft underlayer; an interlayer structure for crystallographically orienting a layer of a perpendicular magnetic recording material formed thereon; and at least one crystallographically oriented, magnetically hard, perpendicular magnetic recording layer on the interlayer structure; wherein the interlayer structure is a triple-layer stacked structure comprising: a first interlayer of a first non-magnetic material proximal the magnetically soft underlayer and containing Ru; a second interlayer of a second non-magnetic material in overlying contact with the first interlayer and not containing Ru; and a third interlayer of a third non-magnetic material in overlying contact with the second interlayer and containing Ru.
    • 垂直磁记录介质包括形成在非磁性衬底的表面上的层叠层,并且包括从表面叠加的顺序:软磁性底层; 用于晶体取向形成在其上的垂直磁记录材料层的层间结构; 以及在层间结构上的至少一个晶体取向的磁性硬的垂直磁记录层; 其中所述层间结构是三层堆叠结构,包括:靠近所述磁软底层并包含Ru的第一非磁性材料的第一中间层; 第二非磁性材料的第二中间层与第一中间层重叠接触并且不含Ru; 以及第三非磁性材料的第三中间层,与第二夹层重叠接触并含有Ru。