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1. 发明授权

US5262201A Low temperature process for converting silica precursor coatings to ceramic silica coatings by exposure to ammonium hydroxide or an environment to which water vapor and ammonia vapor have been added 失效
标题翻译：通过暴露于氢氧化铵或加入水蒸气和氨蒸气的环境将二氧化硅前体涂料转化为陶瓷二氧化硅涂层的低温方法
公开(公告)号：US5262201A
公开(公告)日：1993-11-16
申请号：US532828
申请日：1990-06-04
申请人： Grish Chandra , Loren A. Haluska , Keith W. Michael , Carl J. Bilgrien
发明人： Grish Chandra , Loren A. Haluska , Keith W. Michael , Carl J. Bilgrien
IPC分类号： C09D183/02 , B05D7/24 , C04B41/50 , C04B41/87 , C09D183/00 , C09D183/04 , H01L21/316 , H05K3/24 , H05K3/46 , B05P3/02
CPC分类号： C04B41/009 , C04B41/5035 , C04B41/87 , H01L21/316 , C04B2111/00844
摘要： This invention relates to a method of forming a ceramic coating on a substrate. The method comprises coating the substrate with a solution comprising a solvent and a silica precursor followed by evaporating the solvent to form a preceramic coating. The preceramic coating is then exposed to an environment comprising ammonium hydroxide or an environment to which water vapor and ammonia vapor have been added to facilitate conversion of the silica precursor to the ceramic coating. The preceramic coating is then subjected to a temperature sufficient to facilitate conversion of said preceramic coating to a ceramic coating.

2. 发明授权

US5711987A Electronic coatings 失效
标题翻译：电子涂料
公开(公告)号：US5711987A
公开(公告)日：1998-01-27
申请号：US725787
申请日：1996-10-04
申请人： Clayton R. Bearinger , Robert C. Camilletti , Loren A. Haluska , Keith W. Michael
发明人： Clayton R. Bearinger , Robert C. Camilletti , Loren A. Haluska , Keith W. Michael
IPC分类号： B05D7/00 , B05D7/24 , B32B9/00 , H01L21/312 , H01L23/29 , H01L23/31 , H01L23/58 , B05D5/12
CPC分类号： H01L23/573 , H01L23/296 , H01L23/3192 , H01L2924/0002 , Y10S257/922
摘要： The instant invention pertains to a multi-layer tamper proof electronic coating wherein the first layer is a protecting layer produced from preceramic silicon containing material and at least one filler. The second layer is a resin sealer coat produced from a sealer resin selected from the group consisting of colloidal inorganic-based siloxane resins, benzocyclobutene based resins, polyimide polymers, siloxane polyimides and parylenes. An optional third layer is a cap coating layer selected from SiO.sub.2 coating, SiO.sub.2 /ceramic oxide coating, silicon containing coatings, silicon carbon containing coatings, silicon nitrogen containing coatings, silicon oxygen nitrogen coatings, silicon nitrogen carbon containing coatings and/or diamond like coatings. An optional fourth layer is a resin overcoat produced from an overcoat resin selected from the group consisting of colloidal inorganic-based siloxane resins, benzocyclobutene based resins, polyimide polymers, siloxane polyimides, parylenes, photoresist polymers, siloxane room temperature vulcanizable compositions, or other organic polymer. The use of the multi-layer coating on the electronic device results in an electronic device that is resistant to analytical techniques such as ozone, UV-ozone, gaseous free radicals and ions, vapor or liquid borne reactive species, plasma, abrasion, radiation, light, wet etching and others; moisture; chemicals and other environmental contaminants; shock and erosion, delamination and/or separation.
摘要翻译：本发明涉及多层防篡改电子涂层，其中第一层是由含陶瓷硅材料和至少一种填料制成的保护层。第二层是由选自胶体无机基硅氧烷树脂，苯并环丁烯基树脂，聚酰亚胺聚合物，硅氧烷聚酰亚胺和对二甲苯基的密封树脂制成的树脂密封剂涂层。可选的第三层是选自SiO 2涂层，SiO 2 /陶瓷氧化物涂层，含硅涂层，含硅碳涂层，含硅氮涂层，硅氧氮涂层，含氮氮碳涂层和/或金刚石类涂层的覆盖层。任选的第四层是由选自胶体无机基硅氧烷树脂，苯并环丁烯基树脂，聚酰亚胺聚合物，硅氧烷聚酰亚胺，对二甲苯基，光致抗蚀剂聚合物，硅氧烷室温可硫化组合物或其它有机物的外涂层树脂生产的树脂外涂层聚合物。在电子设备上使用多层涂层导致电子装置耐分析技术如臭氧，紫外线臭氧，气态自由基和离子，蒸汽或液体反应物质，等离子体，磨损，辐射，光，湿蚀等; 湿气; 化学品和其他环境污染物; 冲击和侵蚀，分层和/或分离。

3. 发明授权

US4753855A Multilayer ceramic coatings from metal oxides for protection of electronic devices 失效
标题翻译：用于保护电子设备的金属氧化物的多层陶瓷涂层
公开(公告)号：US4753855A
公开(公告)日：1988-06-28
申请号：US938677
申请日：1986-12-04
申请人： Loren A. Haluska , Keith W. Michael , Leo Tarhay
发明人： Loren A. Haluska , Keith W. Michael , Leo Tarhay
IPC分类号： H01L21/312 , C23C18/12 , H01L21/314 , H01L21/56 , H01L23/29 , H01L23/31 , B05D3/06 , B05D5/12
CPC分类号： H01L23/3171 , H01L21/56 , H01L23/291 , H01L23/296 , H01L2924/0002 , H01L2924/19041
摘要： This invention relates to materials produced by diluting in a solvent a preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
摘要翻译：本发明涉及通过在溶剂中稀释氢硅倍半硅氧烷树脂和选自烷氧化铝，烷氧基钛和烷氧基锆的金属氧化物前体的陶瓷前体混合物而制备的材料。将预陶瓷混合溶剂溶液施加到基材上并通过加热进行陶瓷化。可以在陶瓷化的SiO 2 /金属氧化物涂层上施加含有硅碳，硅氮或硅碳氮的一种或多种陶瓷涂层。 CVD或PECVD顶涂层可用于进一步的保护。本发明对于涂覆电子器件特别有用。

4. 发明授权

US5348839A Photodelineable coatings from hydrogen silsesquioxane resin 失效
标题翻译：来自氢倍半硅氧烷树脂的光导涂层
公开(公告)号：US5348839A
公开(公告)日：1994-09-20
申请号：US34958
申请日：1993-03-22
申请人： Loren A. Haluska , Keith W. Michael
发明人： Loren A. Haluska , Keith W. Michael
IPC分类号： G03F7/028 , C09D183/04 , G03F7/038 , G03F7/075 , H01L21/027 , G03C1/72 , B05D3/02 , C08J3/28
CPC分类号： G03F7/0757
摘要： Disclosed are compositions which are useful for forming photodelineable coatings on substrates. The compositions contain a solvent, hydrogen silsesquioxane resin and an initiator which generates free radicals upon exposure to radiation.
摘要翻译：公开了可用于在基材上形成可光切割涂层的组合物。组合物含有溶剂，氢倍半硅氧烷树脂和在暴露于辐射时产生自由基的引发剂。

5. 发明授权

US5238787A Photodelineable coatings from hydrogen silsesquioxane resin 失效
标题翻译：来自氢化硅树脂的可光聚合涂料
公开(公告)号：US5238787A
公开(公告)日：1993-08-24
申请号：US688418
申请日：1991-04-22
申请人： Loren A. Haluska , Keith W. Michael
发明人： Loren A. Haluska , Keith W. Michael
IPC分类号： G03F7/028 , C09D183/04 , G03F7/038 , G03F7/075 , H01L21/027
CPC分类号： G03F7/0757
摘要： The present invention relates to a method of forming patterned coatings on substrates, especially electronic devices, by negative resist techniques. The method comprises applying a preceramic coating comprising hydrogen silsesquioxane resin and an initiator onto the substrate and then radiating a selected region of the coating for a time sufficient to cure the resin. The uncured coating is then rinsed away leaving the patterned coating.

6. 发明授权

US4997482A Coating composition containing hydrolyzed silicate esters and other metal oxide precursors 失效
标题翻译：含有水解硅酸酯和其它金属氧化物前体的涂料组合物
公开(公告)号：US4997482A
公开(公告)日：1991-03-05
申请号：US411753
申请日：1989-09-25
申请人： Loren A. Haluska , Keith W. Michael
发明人： Loren A. Haluska , Keith W. Michael
IPC分类号： C04B41/50 , C04B41/52 , H01L21/314 , H01L21/316 , H01L21/318 , H01L23/29 , H01L23/31
CPC分类号： C04B41/5035 , C04B41/52 , H01L21/314 , H01L21/316 , H01L21/3185 , H01L23/291 , H01L23/3171 , H01L2924/0002 , H01L2924/19041
摘要： This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
摘要翻译：本发明涉及通过在溶剂中稀释部分水解的硅酸酯和选自烷氧化铝，钛醇盐和烷氧基锆的金属氧化物前体的陶瓷前体混合物而制备的材料。将预陶瓷混合溶剂溶液施加到基材上并通过加热进行陶瓷化。可以在陶瓷化的SiO 2 /金属氧化物涂层上施加含有硅碳，硅氮或硅碳氮的一种或多种陶瓷涂层。 CVD或PECVD顶涂层可用于进一步的保护。本发明对于涂覆电子器件特别有用。

7. 发明授权

US4842888A Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors 失效
标题翻译：来自硅酸盐和其他金属氧化物前体的混合物的氨中的热解的陶瓷涂层
公开(公告)号：US4842888A
公开(公告)日：1989-06-27
申请号：US178749
申请日：1988-04-07
申请人： Loren A. Haluska , Keith W. Michael , Leo Tarhay
发明人： Loren A. Haluska , Keith W. Michael , Leo Tarhay
IPC分类号： C04B41/87 , C04B41/45 , C04B41/52 , C04B41/89 , C23C18/12 , H01L21/314 , H01L21/316
CPC分类号： H01L21/316 , C04B41/4554 , C04B41/52 , C23C18/1204 , C23C18/1295 , H01L21/314 , C04B2111/00844
摘要： Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors are soluble compounds, for example alkoxides, of aluminum, titanium, or zirconium. The coatings produced are useful for the protection of electronic devices. One or more coatings containing amorphous silicon, silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the nitrided ceramic SiO.sub.2 /metal oxide coating for still further protection of electronic devices.

8. 发明授权

US4826733A Sin-containing coatings for electronic devices 失效
标题翻译：含Sin的电子器件涂料
公开(公告)号：US4826733A
公开(公告)日：1989-05-02
申请号：US937276
申请日：1986-12-03
申请人： Loren A. Haluska , Keith W. Michael , Sarah S. Snow , Leo Tarhay , Ronald H. Baney
发明人： Loren A. Haluska , Keith W. Michael , Sarah S. Snow , Leo Tarhay , Ronald H. Baney
IPC分类号： H01L21/318 , B32B9/04
CPC分类号： H01L21/3185 , Y10T428/31663
摘要： A method of forming at low temperatures silicon- and nitrogen-containing ceramic or ceramic-like coatings for the protection of electronic devices. The coatings are produced by the ceramification at temperatures of, or below, 400 degrees Centigrade of preceramic silicon nitrogen-containing polymer coatings deposited from a solvent solution. The coatings are useful for planarizing the surfaces of electronic devices and for passivation.
摘要翻译：在低温下形成用于保护电子器件的含硅和含氮陶瓷或陶瓷样涂层的方法。通过在从溶剂溶液沉积的含陶瓷硅氮聚合物涂层的400摄氏度或更低的温度下的陶瓷化产生涂层。涂层可用于平面化电子器件的表面和钝化。

9. 发明授权

US4822697A Platinum and rhodium catalysis of low temperature formation multilayer ceramics 失效
标题翻译：铂和铑催化低温形成多层陶瓷
公开(公告)号：US4822697A
公开(公告)日：1989-04-18
申请号：US937273
申请日：1986-12-03
申请人： Loren A. Haluska , Keith W. Michael , Leo Tarhay
发明人： Loren A. Haluska , Keith W. Michael , Leo Tarhay
IPC分类号： C04B41/50 , C04B41/52 , C23C18/12 , H01L21/312 , H01L21/314 , H01L21/316 , H01L21/56 , H01L23/29 , H05K3/28 , B32B9/00
CPC分类号： H01L23/296 , C04B41/5035 , C04B41/5066 , C04B41/52 , C23C18/1208 , C23C18/122 , C23C18/1225 , C23C18/1275 , C23C18/1295 , H01L21/02134 , H01L21/0217 , H01L21/022 , H01L21/02222 , H01L21/02282 , H01L21/02337 , H01L21/3124 , H01L21/316 , H01L21/56 , H01L23/291 , H01L21/31612 , H01L2924/0002
摘要： This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.

10. 发明授权

US5635249A Luminescent ceramic coatings 失效
标题翻译：发光陶瓷涂层
公开(公告)号：US5635249A
公开(公告)日：1997-06-03
申请号：US346651
申请日：1994-11-30
申请人： Loren A. Haluska , Keith W. Michael , Udo C. Pernisz
发明人： Loren A. Haluska , Keith W. Michael , Udo C. Pernisz
IPC分类号： C01B33/12 , C03C17/00 , C03C17/34 , C04B41/50 , C04B41/87 , C09D183/04 , C09D183/05 , C09K11/02 , C14C11/00 , C23C18/12 , H01L23/58 , B05D3/02
CPC分类号： C04B41/87 , C03C17/007 , C03C17/009 , C03C17/3411 , C03C17/3417 , C03C17/3435 , C03C17/3441 , C04B41/009 , C04B41/5035 , C09D183/04 , C09K11/02 , C14C11/00 , C23C18/1208 , C23C18/1212 , C23C18/122 , C23C18/1225 , C23C18/127 , C23C18/1279 , H01L23/573 , H01L23/58 , C03C2217/45 , C03C2217/465 , C03C2217/47 , C03C2217/475 , C03C2217/479 , C04B2111/00844 , C04B2111/80 , C04B2111/94 , H01L27/02 , H01L2924/0002
摘要： The present invention relates to a method of forming luminescent coatings on substrates and the substrates coated thereby. The method comprises applying a coating comprising hydrogen silsesquioxane resin and a phosphor filler on a substrate and heating the coated substrate at a temperature sufficient to convert the hydrogen silsesquioxane resin to a ceramic coating.
摘要翻译：本发明涉及在基材上形成发光涂层的方法以及由此涂覆的基材。该方法包括将包含氢倍半硅氧烷树脂和磷光体填料的涂层施加到基底上，并在足以将氢倍半硅氧烷树脂转化成陶瓷涂层的温度下加热涂覆的基底。

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