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    • 2. 发明授权
    • Electro-static discharge protection circuit and method for making the same
    • 静电放电保护电路及其制作方法
    • US06943396B2
    • 2005-09-13
    • US10464382
    • 2003-06-17
    • Grant McNeil
    • Grant McNeil
    • H01L23/60H01L23/62H01L27/00H01L27/02H01L27/085H01L27/108H01L29/76H01L29/94H01L31/119
    • H01L27/0255H01L27/10841H01L27/10897
    • As disclosed herein, an electrostatic discharge (ESD) protection circuit is provided for an integrated circuit including a semiconductor substrate. The ESD protection circuit includes a plurality of active devices formed in the semiconductor substrate, the active devices being formed by a process including a plurality of steps carried out to form, at the same time, a plurality of active devices having a function other than ESD protection. For example, the ESD circuit may include an array of vertical transistors formed according to a process including many of the steps used to form, at the same time, vertical transistors of a DRAM array. Also disclosed is the formation of an ESD circuit in an “unusable” area of a semiconductor chip, such as under a bond pad, land or under bump metallization of the chip.
    • 如本文所公开的,为包括半导体衬底的集成电路提供了静电放电(ESD)保护电路。 ESD保护电路包括形成在半导体衬底中的多个有源器件,有源器件通过包括多个步骤的处理形成,同时形成具有除了ESD之外的功能的多个有源器件 保护。 例如,ESD电路可以包括根据包括用于同时形成DRAM阵列的垂直晶体管的许多步骤的工艺形成的垂直晶体管阵列。 还公开了在半导体芯片的“不可用”区域中形成ESD电路,例如在焊盘下方,芯片的焊盘或凸块下方金属化。