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    • 4. 发明授权
    • Fast firing flattening apparatus for sintered multilayer ceramic electronic substrates
    • 烧结多层陶瓷电子基板快速平整装置
    • US07258537B2
    • 2007-08-21
    • US10942559
    • 2004-09-16
    • Raschid J BezamaRenee L Weisman
    • Raschid J BezamaRenee L Weisman
    • B29C43/18B22F3/14
    • H01L21/4807
    • An apparatus for flattening sintered ceramic electronic packaging substrates having opposing faces with undesired camber interleaves the substrates with spacers. At least one heating zone includes a heat transfer medium movable toward and away from the stack of interleaved ceramic substrates and spacers to apply a desired rate of heat by direct contact with or close proximity to sides of the stack. A plunger applies pressure to the stack in a direction normal to the faces of the substrates. At least one cooling zone includes a heat transfer medium movable toward and away from the stack to remove heat introduced in the heating zone by direct contact with or close proximity to sides of the stack. A reducing gas supply is operatively connected to the at least one heating zone and at least one cooling zone to supply gas to maintain a controlled reducing atmosphere within the apparatus.
    • 用于使具有不希望的弯曲面的相对面的烧结陶瓷电子封装基板平坦化的装置用衬垫交织基板。 至少一个加热区域包括能够朝向和远离堆叠的交错的陶瓷基板和间隔件移动的传热介质,以通过与堆叠的侧面直接接触或紧邻堆叠来施加期望的热量。 柱塞在与基板的表面垂直的方向上对堆叠施加压力。 至少一个冷却区域包括能够朝向和远离堆叠移动的传热介质,以通过与堆叠的侧面直接接触或靠近堆叠来移除在加热区域中引入的热量。 还原气体供应可操作地连接到所述至少一个加热区域和至少一个冷却区域以供应气体以在该设备内保持受控的还原气氛。