专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US4379230A Automatic beam correction in a scanning transmission electron microscope 失效
标题翻译：扫描透射电子显微镜中的自动光束校正
公开(公告)号：US4379230A
公开(公告)日：1983-04-05
申请号：US184561
申请日：1980-09-05
申请人： Gijsbertus Bouwhuis , Hendrik De Lang , Nicolaas H. Dekkers
发明人： Gijsbertus Bouwhuis , Hendrik De Lang , Nicolaas H. Dekkers
IPC分类号： H01J37/153 , H01J37/21 , H01J37/244 , H01J37/26 , G01N23/00
CPC分类号： H01J37/21 , H01J37/153 , H01J37/244 , H01J2237/2446 , H01J2237/24475 , H01J2237/24578 , H01J2237/24592
摘要： In a scanning electron microscope, a periodic structure in the object plane is used for the detection of the focus condition of a spot-focussed electron beam scanning an object in order to correct defocusing and astigmatism in the scanning electron beam spot. To achieve this the detector comprises a plurality of individual elements which can be pair-wise read and an electronic circuit for forming a control signal for controlling the excitation of a spot-forming lens and a stigmator, respectively, from signals representing movement of the electron interference pattern at the detector, relative to the object scan, due to an out of focus condition. The signals are derived from corresponding pairs of detector elements which are situated at a fixed distance from each other in order to correct the focus and compensate for the astigmatism in the electron beam respectively. In the case of astimatism, signals from at least two pairs of detector elements spaced in directions at right-angles to one another, are used.
摘要翻译：在扫描电子显微镜中，物镜中的周期性结构用于检测点聚焦电子束扫描物体的聚焦条件，以便校正扫描电子束斑中的散焦和像散。为了实现这一点，检测器包括可以被成对读取的多个单独元件和用于形成控制信号的电子电路，用于分别由表示电子的移动的信号控制点形成透镜和点状器的激发相对于物体扫描，检测器处的干涉图案由于焦距不足而导致。这些信号是从对应的检测器元件对得出的，这些检测器元件分别位于彼此固定的距离处，以便校正聚焦并补偿电子束中的像散。在这种情况下，使用来自至少两对检测器元件的信号，该检测器元件以彼此成直角的方向间隔开。

2. 发明授权

US4352015A Anti-contamination diaphragm for an electron beam apparatus 失效
标题翻译：用于电子束装置的防污隔膜
公开(公告)号：US4352015A
公开(公告)日：1982-09-28
申请号：US180712
申请日：1980-08-25
申请人： Alfred Jore , Gerardus G. P. Van Gorkom , Nicolaas H. Dekkers
发明人： Alfred Jore , Gerardus G. P. Van Gorkom , Nicolaas H. Dekkers
IPC分类号： H01J37/20 , H01J37/09 , H01L21/027 , G01N23/00
CPC分类号： H01J37/09
摘要： In order to reduce object contamination during the examination or machining of the object in an electron beam apparatus, an anti-contamination diaphragm is provided in place of the customary diaphragm. The anti-contamination diaphragm has a central aperture which corresponds to a customary diaphragm aperture, and a concentric annular aperture for transmitting a non-paraxial hollow beam which irradiates a ring around the paraxial focus on the object. The conical hollow anti-contamination beam forms a barrier against contaminating residual gas molecules, notably hydrocarbon molecules.
摘要翻译：为了减少在电子束装置中的物体的检查或加工过程中的物体污染，提供了抗污染隔膜来代替常规隔膜。抗污染隔膜具有对应于常规隔膜孔的中心孔，以及用于传送非近轴中空梁的同心环形孔，其将围绕近轴焦点的环照射在物体上。锥形中空抗污染光束形成阻挡污染残留气体分子的屏障，特别是烃分子。

3. 发明授权

US4691103A Microscope for non-differentiated phase image formation 失效
标题翻译：显微镜用于非微分相图像形成
公开(公告)号：US4691103A
公开(公告)日：1987-09-01
申请号：US757998
申请日：1985-07-23
申请人： Jan B. Le Poole , Nicolaas H. Dekkers
发明人： Jan B. Le Poole , Nicolaas H. Dekkers
IPC分类号： G02B21/00 , H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： G02B21/002 , H01J37/263
摘要： The scanning system of a scanning microscope for the imaging of phase structures is adapted to form a scanning pattern which is free from discontinuities. The detector is divided into a number of sub-regions with the direction of the dividing lines of the detector being adapted to the scanning pattern. The scanning pattern is notably meander-shaped and the detector is divided into four quadrants. The deflection system is digitally controlled and the microscope may be an electron microscope.
摘要翻译：用于相结构成像的扫描显微镜的扫描系统适于形成没有不连续性的扫描图案。检测器被分成多个子区域，检测器的划分线的方向适合于扫描图案。扫描图案特别地是曲折形状，并且检测器被分成四个象限。偏转系统是数字控制的，显微镜可以是电子显微镜。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式