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    • 3. 发明授权
    • Apparatus for measuring aperture size of near-field optical probe and method thereof
    • 用于测量近场光学探针的孔径尺寸的装置及其方法
    • US06791071B2
    • 2004-09-14
    • US10242723
    • 2002-09-13
    • Gi-myung WooPetrov NikolaiMyung-bok Lee
    • Gi-myung WooPetrov NikolaiMyung-bok Lee
    • G02B704
    • G01Q60/22
    • An apparatus and method for measuring an aperture of a near-field optical probe is provided. The apparatus includes a light source, an optical detector, and a filter. The light source radiates light to the near-field optical probe. The optical detector is positioned before the near-field optical probe and receives the light transmitted through the near-field optical probe to detect light intensity. The filter is disposed between the light source and the optical detector and transmits only light of wavelengths in a specific mode from the light transmitted through the near-field optical probe. Thus, an aperture diameter of the near-field optical probe can accurately be measured in real-time without damaging the near-field optical probe.
    • 提供了一种用于测量近场光学探针的孔径的装置和方法。 该装置包括光源,光学检测器和滤光器。 光源将光照射到近场光学探头。 光检测器位于近场光探头之前,并接收透过近场光探针的光以检测光强度。 滤光器设置在光源和光学检测器之间,并且仅透射通过近场光学探针的光仅透射特定模式的波长的光。 因此,近场光学探针的孔径可以精确地实时测量而不损坏近场光学探针。