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1. 发明授权

US07869474B2 Fast wavelength tuning techniques for external cavity lasers 有权
标题翻译：用于外腔激光器的快速波长调谐技术
公开(公告)号：US07869474B2
公开(公告)日：2011-01-11
申请号：US12349839
申请日：2009-01-07
申请人： Gerard Wysocki , Frank K. Tittel
发明人： Gerard Wysocki , Frank K. Tittel
IPC分类号： H01S3/139 , H01S3/086
CPC分类号： H01S5/141 , B82Y20/00 , G02B26/0808 , G02B26/0816 , G02B26/0883 , H01S5/0071 , H01S5/024 , H01S5/02415 , H01S5/028 , H01S5/3402
摘要： An apparatus comprising a laser source configured to emit a light beam along a first path, an optical beam steering component configured to steer the light beam from the first path to a second path at an angle to the first path, and a diffraction grating configured to reflect back at least a portion of the light beam along the second path, wherein the angle determines an external cavity length. Included is an apparatus comprising a laser source configured to emit a light beam along a first path, a beam steering component configured to redirect the light beam to a second path at an angle to the first path, wherein the optical beam steering component is configured to change the angle at a rate of at least about one Kilohertz, and a diffraction grating configured to reflect back at least a portion of the light beam along the second path.
摘要翻译：一种装置，包括被配置为沿着第一路径发射光束的激光源，配置成将光束从第一路径转向与第一路径成一定角度的第二路径的光束转向部件，以及衍射光栅，被配置为沿着第二路径反射光束的至少一部分，其中该角度确定外部腔体长度。包括一种装置，其包括配置成沿着第一路径发射光束的激光源，被配置为将光束以与第一路径成一定角度的方式重定向到第二路径的光束控制部件，其中光束转向部件被配置为以至少约1千赫的速率改变角度，以及衍射光栅，被配置成沿着第二路径反射光束的至少一部分。

2. 发明申请

US20100067554A1 Fast wavelength tuning techniques for external cavity lasers 有权
标题翻译：用于外腔激光器的快速波长调谐技术
公开(公告)号：US20100067554A1
公开(公告)日：2010-03-18
申请号：US12349839
申请日：2009-01-07
申请人： Gerard Wysocki , Frank K. Tittel
发明人： Gerard Wysocki , Frank K. Tittel
IPC分类号： H01S3/1055 , H01S3/08 , G02B26/08
CPC分类号： H01S5/141 , B82Y20/00 , G02B26/0808 , G02B26/0816 , G02B26/0883 , H01S5/0071 , H01S5/024 , H01S5/02415 , H01S5/028 , H01S5/3402
摘要： An apparatus comprising a laser source configured to emit a light beam along a first path, an optical beam steering component configured to steer the light beam from the first path to a second path at an angle to the first path, and a diffraction grating configured to reflect back at least a portion of the light beam along the second path, wherein the angle determines an external cavity length. Included is an apparatus comprising a laser source configured to emit a light beam along a first path, a beam steering component configured to redirect the light beam to a second path at an angle to the first path, wherein the optical beam steering component is configured to change the angle at a rate of at least about one Kilohertz, and a diffraction grating configured to reflect back at least a portion of the light beam along the second path.
摘要翻译：一种装置，包括被配置为沿着第一路径发射光束的激光源，配置成将光束从第一路径转向与第一路径成一定角度的第二路径的光束转向部件，以及衍射光栅，被配置为沿着第二路径反射光束的至少一部分，其中该角度确定外部腔体长度。包括一种装置，其包括配置成沿着第一路径发射光束的激光源，被配置为将光束以与第一路径成一定角度的方式重定向到第二路径的光束控制部件，其中光束转向部件被配置为以至少约1千赫的速率改变角度，以及衍射光栅，被配置成沿着第二路径反射光束的至少一部分。

3. 发明授权

US07733924B2 Piezo activated mode tracking system for widely tunable mode-hop-free external cavity mid-IR semiconductor lasers 失效
标题翻译：压电激活模式跟踪系统，用于广泛的无模式跳跃型外腔中红外半导体激光器
公开(公告)号：US07733924B2
公开(公告)日：2010-06-08
申请号：US11203785
申请日：2005-08-15
申请人： Gerard Wysocki , Frank K. Tittel , Robert F. Curl
发明人： Gerard Wysocki , Frank K. Tittel , Robert F. Curl
IPC分类号： H01S3/10
CPC分类号： H01S5/141 , B82Y20/00 , G01N21/3504 , G01N21/39 , H01S3/139 , H01S5/0222 , H01S5/02415 , H01S5/0617 , H01S5/06817 , H01S5/1039 , H01S5/3401
摘要： A widely tunable, mode-hop-free semiconductor laser operating in the mid-IR comprises a QCL laser chip having an effective QCL cavity length, a diffraction grating defining a grating angle and an external cavity length with respect to said chip, and means for controlling the QCL cavity length, the external cavity length, and the grating angle. The laser of claim 1 wherein said chip may be tuned over a range of frequencies even in the absence of an anti-reflective coating. The diffraction grating is controllably pivotable and translatable relative to said chip and the effective QCL cavity length can be adjusted by varying the injection current to the chip. The laser can be used for high resolution spectroscopic applications and multi species trace-gas detection. Mode-hopping is avoided by controlling the effective QCL cavity length, the external cavity length, and the grating angle so as to replicate a virtual pivot point.
摘要翻译：在中红外工作的可广泛调谐的无模式跳变半导体激光器包括具有有效QCL腔长度的QCL激光器芯片，相对于所述芯片限定光栅角度和外部腔体长度的衍射光栅，以及用于控制QCL腔长度，外腔长度和光栅角度。 2.如权利要求1所述的激光器，其特征在于，即使在没有抗反射涂层的情况下，也可以在频率范围内调节所述芯片。衍射光栅相对于所述芯片可控制地枢转和平移，并且可以通过改变对芯片的注入电流来调节有效的QCL腔体长度。激光可用于高分辨率光谱应用和多种痕量气体检测。通过控制有效的QCL腔长度，外腔长度和光栅角度来避免跳频，以便复制虚拟枢轴点。

4. 发明授权

US08334980B2 Integrated embedded processor based laser spectroscopic sensor 有权
公开(公告)号：US08334980B2
公开(公告)日：2012-12-18
申请号：US13325568
申请日：2011-12-14
申请人： Stephen So , Gerard Wysocki , J. Patrick Frantz , Frank K. Tittel
发明人： Stephen So , Gerard Wysocki , J. Patrick Frantz , Frank K. Tittel
IPC分类号： G01N21/00
CPC分类号： G01N21/39 , G01N21/1702 , G01N21/274 , G01N2021/1708
摘要： A novel low-power and compact laser spectroscopic sensor is described herein. Embodiments of the disclosed sensor utilize state-of-the-art microprocessors and digital processing techniques to reduce power consumption and integrate functions into a small device. In particular, novel software methods are disclosed which allow the use of low-power microprocessors which draw no more than about 0.02 W of power. Such low-power enables long battery life and allows embodiments of the sensor to be used in portable applications. In addition, the system architecture and methods described in this disclosure allow a single integrated embedded processor to control all the subsystems necessary for a laser spectroscopic sensor further reducing sensor size and power consumption. In addition, a power efficient method of calibrating a photoacoustic laser spectroscopic sensor is disclosed.

5. 发明授权

US08098376B2 Integrated embedded processor based laser spectroscopic sensor 有权
标题翻译：基于集成嵌入式处理器的激光光谱传感器
公开(公告)号：US08098376B2
公开(公告)日：2012-01-17
申请号：US12440373
申请日：2006-10-06
申请人： Stephen So , Gerard Wysocki , J. Patrick Frantz , Frank K. Tittel
发明人： Stephen So , Gerard Wysocki , J. Patrick Frantz , Frank K. Tittel
IPC分类号： G01N21/00
CPC分类号： G01N21/39 , G01N21/1702 , G01N21/274 , G01N2021/1708
摘要： A novel low-power and compact laser spectroscopic sensor is described herein. Embodiments of the disclosed sensor utilize state-of-the-art microprocessors and digital processing techniques to reduce power consumption and integrate functions into a small device. In particular, novel software methods are disclosed which allow the use of low-power microprocessors which draw no more than about 0.02 W of power. Such low-power enables long battery life and allows embodiments of the sensor to be used in portable applications. In addition, the system architecture and methods described in this disclosure allow a single integrated embedded processor to control all the subsystems necessary for a laser spectroscopic sensor further reducing sensor size and power consumption. In addition, a power efficient method of calibrating a photoacoustic laser spectroscopic sensor is disclosed.
摘要翻译：这里描述了一种新颖的低功率和紧凑的激光光谱传感器。所公开的传感器的实施例利用最先进的微处理器和数字处理技术来降低功耗并将功能集成到小型设备中。特别地，公开了允许使用不超过约0.02W功率的低功率微处理器的新型软件方法。这种低功率使得电池寿命长，并允许传感器的实施例在便携式应用中使用。此外，本公开中描述的系统架构和方法允许单个集成嵌入式处理器控制激光光谱传感器所需的所有子系统，进一步降低传感器尺寸和功耗。另外，公开了一种校正光声激光光谱传感器的功率有效的方法。

6. 发明申请

US20100177316A1 Integrated Embedded Processor Based Laser Spectroscopic Sensor 有权
标题翻译：基于集成嵌入式处理器的激光光谱传感器
公开(公告)号：US20100177316A1
公开(公告)日：2010-07-15
申请号：US12440373
申请日：2006-10-06
申请人： Stephen So , Gerard Wysocki , J. Patrick Frantz , Frank K. Tittel
发明人： Stephen So , Gerard Wysocki , J. Patrick Frantz , Frank K. Tittel
IPC分类号： G01N21/00
CPC分类号： G01N21/39 , G01N21/1702 , G01N21/274 , G01N2021/1708
摘要： A novel low-power and compact laser spectroscopic sensor is described herein. Embodiments of the disclosed sensor utilize state-of-the-art microprocessors and digital processing techniques to reduce power consumption and integrate functions into a small device. In particular, novel software methods are disclosed which allow the use of low-power microprocessors which draw no more than about 0.02 W of power. Such low-power enables long battery life and allows embodiments of the sensor to be used in portable applications. In addition, the system architecture and methods described in this disclosure allow a single integrated embedded processor to control all the subsystems necessary for a laser spectroscopic sensor further reducing sensor size and power consumption. In addition, a power efficient method of calibrating a photoacoustic laser spectroscopic sensor is disclosed.
摘要翻译：这里描述了一种新颖的低功率和紧凑的激光光谱传感器。所公开的传感器的实施例利用最先进的微处理器和数字处理技术来降低功耗并将功能集成到小型设备中。特别地，公开了允许使用不超过约0.02W功率的低功率微处理器的新型软件方法。这种低功率使得电池寿命长，并允许传感器的实施例在便携式应用中使用。此外，本公开中描述的系统架构和方法允许单个集成嵌入式处理器控制激光光谱传感器所需的所有子系统，进一步降低传感器尺寸和功耗。另外，公开了一种校正光声激光光谱传感器的功率有效的方法。

7. 发明授权

US4817096A Multiple wavelength excimer laser 失效
标题翻译：多波长准分子激光器
公开(公告)号：US4817096A
公开(公告)日：1989-03-28
申请号：US240370
申请日：1988-08-29
申请人： William L. Nighan , Roland A. Sauerbrey , Frank K. Tittel
发明人： William L. Nighan , Roland A. Sauerbrey , Frank K. Tittel
IPC分类号： H01S3/225 , H01S3/30 , H01S3/097 , H01S3/22 , H01S3/223
CPC分类号： H01S3/225
摘要： A transverse electrically excited gas laser comprises a mixture of rare gases and a fluorine donor at selected partial pressures so as to permit UV and/or visible rare gas-halide laser oscillation at two or more wavelengths simultaneously.
摘要翻译：横向电激励气体激光器以选定的分压包括稀有气体和氟供体的混合物，以便允许UV和/或可见稀有气体卤化物激光器在两个或更多个波长下同时振荡。

8. 发明授权

US5458999A Interferometric phase shifting method for high resolution microlithography 失效
标题翻译：用于高分辨率微光刻的干涉相移方法
公开(公告)号：US5458999A
公开(公告)日：1995-10-17
申请号：US82243
申请日：1993-06-24
申请人： Gabor Szabo , Frank K. Tittel , Joseph R. Cavallaro , Motoi Kido
发明人： Gabor Szabo , Frank K. Tittel , Joseph R. Cavallaro , Motoi Kido
IPC分类号： G03F1/26 , G03F1/29 , G03F7/20 , G03F9/00
CPC分类号： G03F1/26 , G03F1/29 , G03F7/70283 , G03F7/70408
摘要： A phase shifting method uses a special interferometer in which the illuminating beam is divided into two or more components and the mask is irradiated from both sides. The pattern to be transferred onto the wafer (the mask) is generated on an optically transmissive substrate by appropriately combining reflective, transparent and absorptive areas. The optical paths of the beams illuminating the back side and the front side of the mask (that will be called transmitted and reflected beams respectively) are chosen so that the phase of the two beams is different by approximately an odd multiple of .pi. radians at the surface of the mask. The combined beams are projected onto the target wafer by suitable optics. The phase difference between the illuminating beams reduces the edge blurring that results from diffraction effects. This steepens the slope of the intensity profile at the edge of the features making it possible to achieve smaller feature sizes in the microlithographic replication without using those phase shifting elements of the conventional phase shifting method which made mask fabrication difficult. As a consequence of the lack of the phase shifting layers, the wavelength range of the method of this invention can easily be extended towards shorter wavelengths, and, further, the new mask is less vulnerable to optical damage. The additional freedom that the phase relation and intensity of the beams can be varied continuously allows for optimization that can lead to improved resolution, compared to conventional phase shifting techniques.
摘要翻译：相移方法使用特殊的干涉仪，其中将照明光束分成两个或更多个部件，并且从两侧照射该掩模。通过适当地组合反射，透明和吸收区域，在透光性基板上产生要转印到晶片上的图案（掩模）。选择照射掩模的背侧和前侧（分别被称为透射和反射光束）的光束的光路，使得两个光束的相位在表面的面具。组合的光束通过合适的光学器件投射到目标晶片上。照明光束之间的相位差减少了由衍射效应引起的边缘模糊。这使得特征边缘处的强度分布的斜率变浅，使得可以在微光刻复制中实现更小的特征尺寸，而不需要使得难以进行掩模制造的常规相移方法的那些相移元件。由于缺少相移层，本发明方法的波长范围可以容易地扩展到更短的波长，而且新的掩模不太容易受到光学损伤。与传统的相移技术相比，光束的相位关系和强度可以连续变化的附加自由度允许优化，这可以导致改进的分辨率。

9. 发明授权

US07248611B2 Frequency scanning pulsed laser having synchronously set subthreshold current 有权
标题翻译：频率扫描脉冲激光器具有同步设置的亚阈值电流
公开(公告)号：US07248611B2
公开(公告)日：2007-07-24
申请号：US10284781
申请日：2002-10-31
申请人： Anatoliy A. Kosterev , Frank K. Tittel
发明人： Anatoliy A. Kosterev , Frank K. Tittel
IPC分类号： H01S3/00 , H01S3/13
CPC分类号： B82Y20/00 , G01N21/031 , G01N21/39 , H01S5/0014 , H01S5/06216 , H01S5/12 , H01S5/3402
摘要： The present invention provides methods and apparatus for flexible and reproducible control of quantum cascade laser frequency scans having short (nanosecond) pulse excitations. In accordance with a preferred embodiment of the invention, a method of digital frequency control for pulsed quantum cascade lasers includes digitally synthesizing a sub-threshold current, converting the sub-threshold current to analog form, and generating laser pulses. Preferably, the sub-threshold current is synchronized to the laser pulses.
摘要翻译：本发明提供了具有短（纳秒）脉冲激励的量子级联激光频率扫描的灵活和可重复控制的方法和装置。根据本发明的优选实施例，脉冲量子级联激光器的数字频率控制方法包括数字合成亚阈值电流，将亚阈值电流转换为模拟形式，并产生激光脉冲。优选地，子阈值电流与激光脉冲同步。

10. 发明授权

US4660210A Two-halogen donor mixture for XeF (C.fwdarw.A) laser 失效
标题翻译：用于XeF（C-> A）激光的双卤素供体混合物
公开(公告)号：US4660210A
公开(公告)日：1987-04-21
申请号：US840982
申请日：1986-03-14
申请人： William L. Nighan , Frank K. Tittel , William L. Wilson, Jr.
发明人： William L. Nighan , Frank K. Tittel , William L. Wilson, Jr.
IPC分类号： H01S3/097 , H01S3/225 , H01S3/22
CPC分类号： H01S3/09707 , H01S3/225
摘要： An improved electric discharge XeF excimer laser employs a reaction gas mixture containing NF.sub.3 and F.sub.2 in proportions that tailor the kinetics of the electrochemical reactions in order to achieve a substantial increase in power.
摘要翻译：改进的放电XeF准分子激光器采用包含NF 3和F 2的反应气体混合物，其比例可以调整电化学反应的动力学，以实现功率的显着增加。

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