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    • 5. 发明授权
    • Optical membrane element having a longitudinally adjustable connecting element
    • 光学膜元件具有可纵向调节的连接元件
    • US09075321B2
    • 2015-07-07
    • US12748896
    • 2010-03-29
    • Ulrich MuellerMartin Rath
    • Ulrich MuellerMartin Rath
    • G03F1/64
    • G03F7/7015G02B5/208G03F1/64
    • An optical membrane element for an optical device in lithography, especially EUV (extreme ultraviolet) lithography, includes at least one membrane layer and a frame, which at least partially surrounds the membrane layer and at which at least part of the rim of the membrane layer is mounted. At least one tautening element is provided, which facilitates tautening of the membrane layer and wherein the optical membrane element can be used in a projection exposure system, especially for EUV lithography, such that the membrane layer of the membrane element can be adjustably tautened, such that the membrane layer is flat. A method for manufacturing a corresponding optical membrane element includes generating a tautening element lithographically together with the membrane layer.
    • 用于光刻中的光学器件的光学膜元件,特别是EUV(极紫外)光刻技术,包括至少一个膜层和框架,该膜层和框架至少部分地围绕膜层,膜层的至少部分边缘 被安装。 提供了至少一个拉伸元件,其有助于膜层的整顿,并且其中光学膜元件可以用于投影曝光系统,特别是用于EUV光刻,使得膜元件的膜层可以可调整地被拉紧,例如 膜层是平的。 用于制造相应的光学膜元件的方法包括与膜层一起光刻地产生拉伸元件。
    • 6. 发明授权
    • Leaf spring arrangement
    • 板簧安排
    • US08925909B2
    • 2015-01-06
    • US13515727
    • 2010-12-15
    • Rodscha DrabonUlrich MuellerPeter Stastny
    • Rodscha DrabonUlrich MuellerPeter Stastny
    • B60G11/10B60G11/04
    • B60G11/04B60G2204/121B60G2206/7101
    • In a leaf spring arrangement for a chassis of a motor vehicle, a leaf spring includes multiple layers made of a glass fiber composite plastic, a reinforcement made of a carbon composite plastic and being disposed between an upper and a lower one of the layers, and a core made of a different material than the reinforcement and being disposed between the upper and lower layers, wherein the reinforcement is arranged along a longitudinal a side of the core. The leaf spring is coupled at its center region to an axle of the motor vehicle by a center connection and to the vehicle body by bodywork connections, wherein the leaf spring is tilted by an angle relative to the vertical axis of the motor vehicle.
    • 在用于机动车辆的底盘的板簧装置中,板簧包括由玻璃纤维复合塑料制成的多层,由碳复合塑料制成的增强件,并且设置在上层和下层之间, 由不同于所述加强件的材料制成并设置在所述上​​层和下层之间的芯,其中所述加强件沿着所述芯的纵向方向布置。 板簧通过中心连接在其中心区域连接到机动车辆的车轴,并通过车身连接与车体相连,其中板簧相对于机动车辆的垂直轴线倾斜一定角度。