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1. 发明授权

US08462410B2 Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method 有权
公开(公告)号：US08462410B2
公开(公告)日：2013-06-11
申请号：US13412504
申请日：2012-03-05
申请人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
发明人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
IPC分类号： G02B26/08
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

2. 发明授权

US08149489B2 Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method 有权
标题翻译：镜面装置，镜面阵列，光学开关，镜面装置的制造方法以及镜面基板的制造方法
公开(公告)号：US08149489B2
公开(公告)日：2012-04-03
申请号：US11597234
申请日：2005-12-28
申请人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
发明人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
IPC分类号： G02B26/08
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
摘要翻译：镜装置包括被支撑为能够相对于镜基板（151）枢转的反射镜（153），形成在面向镜子的电极基板（101）上的驱动电极（103-1-103-4）基板以及布置在反射镜和电极基板之间的空间中的抗静电结构（106）。该结构可以固定镜的下表面的电位，并通过向抗静电结构施加第二电位来抑制反射镜的漂移。

3. 发明申请

US20080100899A1 Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, and Mirror Substrate Manufacturing Method 有权
标题翻译：镜像设备，镜像阵列，光交换机，镜像设备制造方法和镜像基板制造方法
公开(公告)号：US20080100899A1
公开(公告)日：2008-05-01
申请号：US11597234
申请日：2005-12-28
申请人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii
发明人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii
IPC分类号： G02B26/08 , B05D5/06 , G03F7/20 , B29C65/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
摘要翻译：反射镜装置包括被支撑为能够相对于镜基板（151）枢转的反射镜（153），形成在面向镜子的电极基板（101）上的驱动电极（103-1-1103-4）基板以及布置在反射镜和电极基板之间的空间中的抗静电结构（106）。该结构可以固定镜的下表面的电位，并通过向抗静电结构施加第二电位来抑制反射镜的漂移。

4. 发明授权

US08634121B2 Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method 有权
标题翻译：镜面装置，镜面阵列，光学开关，镜面装置的制造方法以及镜面基板的制造方法
公开(公告)号：US08634121B2
公开(公告)日：2014-01-21
申请号：US13412510
申请日：2012-03-05
申请人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
发明人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
IPC分类号： G02B26/08
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
摘要翻译：镜装置包括被支撑为能够相对于镜基板（151）枢转的反射镜（153），形成在面向镜子的电极基板（101）上的驱动电极（103-1-103-4）基板以及布置在反射镜和电极基板之间的空间中的抗静电结构（106）。该结构可以固定镜的下表面的电位，并通过向抗静电结构施加第二电位来抑制反射镜的漂移。

5. 发明授权

US08582189B2 Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method 有权
标题翻译：镜面装置，镜面阵列，光学开关，镜面装置的制造方法以及镜面基板的制造方法
公开(公告)号：US08582189B2
公开(公告)日：2013-11-12
申请号：US13412514
申请日：2012-03-05
申请人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
发明人： Fusao Shimokawa , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
IPC分类号： G02B26/08
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
摘要翻译：镜装置包括被支撑为能够相对于镜基板（151）枢转的反射镜（153），形成在面向镜子的电极基板（101）上的驱动电极（103-1-103-4）基板以及布置在反射镜和电极基板之间的空间中的抗静电结构（106）。该结构可以固定镜的下表面的电位，并通过向抗静电结构施加第二电位来抑制反射镜的漂移。

6. 发明申请

US20120162737A1 MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD 有权
公开(公告)号：US20120162737A1
公开(公告)日：2012-06-28
申请号：US13412514
申请日：2012-03-05
申请人： Shingo Uchiyama , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
发明人： Shingo Uchiyama , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
IPC分类号： G02B26/08 , B23P17/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

7. 发明申请

US20120162735A1 MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD 有权
标题翻译：镜子装置，镜面阵列，光学开关，反射镜装置制造方法和反射镜基板制造方法
公开(公告)号：US20120162735A1
公开(公告)日：2012-06-28
申请号：US13412504
申请日：2012-03-05
申请人： Shingo Uchiyama , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
发明人： Shingo Uchiyama , Shingo Uchiyama , Johji Yamaguchi , Makoto Sato , Kunihiko Sasakura , Hirofumi Morita , Shuichiro Inagaki , Katsuyuki Machida , Hiromu Ishii , Makoto Murakami
IPC分类号： G02B26/08
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
摘要翻译：镜装置包括被支撑为能够相对于镜基板（151）枢转的反射镜（153），形成在面向镜子的电极基板（101）上的驱动电极（103-1-103-4）基板以及布置在反射镜和电极基板之间的空间中的抗静电结构（106）。该结构可以固定镜的下表面的电位，并通过向抗静电结构施加第二电位来抑制反射镜的漂移。

8. 发明申请

US20090244676A1 Mirror Device and Mirror Device Manufacturing Method 有权
标题翻译：镜像设备和镜像设备制造方法
公开(公告)号：US20090244676A1
公开(公告)日：2009-10-01
申请号：US12086222
申请日：2006-12-27
申请人： Shingo Uchiyama , Fusao Shimokawa , Johji Yamaguchi , Kunihiko Sasakura , Hiromu Ishii
发明人： Shingo Uchiyama , Fusao Shimokawa , Johji Yamaguchi , Kunihiko Sasakura , Hiromu Ishii
IPC分类号： G02B26/08 , H01L21/64
CPC分类号： G02B26/0841 , G02B26/101
摘要： When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.
摘要翻译：当反射镜（230）以最大角度旋转时，沿着与电极基板（300）水平的方向从反射镜（230）的旋转中心到反射镜（230）的边缘的距离大于距离垂直于水平方向并沿着旋转中心延伸到沿水平方向的电极（340a-340d）的远端。即使当反射镜230旋转以与电极基板300接触时，由于在旋转时反射镜230接触的位置上不存在电极340a〜340d，因此， 230），并且可以防止电极（340a-340d）电沉积。

9. 发明授权

US07978388B2 Mirror device and mirror device manufacturing method incorporating a collision preventive structure 有权
标题翻译：具有防碰撞结构的镜面装置和镜面装置的制造方法
公开(公告)号：US07978388B2
公开(公告)日：2011-07-12
申请号：US12086222
申请日：2006-12-27
申请人： Shingo Uchiyama , Fusao Shimokawa , Johji Yamaguchi , Kunihiko Sasakura , Hiromu Ishii
发明人： Shingo Uchiyama , Fusao Shimokawa , Johji Yamaguchi , Kunihiko Sasakura , Hiromu Ishii
IPC分类号： G02B26/10
CPC分类号： G02B26/0841 , G02B26/101
摘要： When a mirror (230) rotates with a maximum angle, a distance from the rotation center of the mirror (230) to the edge of the mirror (230) along a direction horizontal to an electrode substrate (300) is larger than a distance from a perpendicular, perpendicular to the horizontal direction and extending through the rotation center, to the distal end of an electrode (340a-340d) along the horizontal direction. Even when the mirror (230) rotates to come into contact with the electrode substrate (300), since the electrode (340a-340d) does not exist at a position with which the mirror (230) comes into contact when rotating, the mirror (230) and the electrode (340a-340d) can be prevented from being electrodeposited.
摘要翻译：当反射镜（230）以最大角度旋转时，沿着与电极基板（300）水平的方向从反射镜（230）的旋转中心到反射镜（230）的边缘的距离大于距离垂直于水平方向并沿着旋转中心延伸到沿水平方向的电极（340a-340d）的远端。即使当反射镜230旋转以与电极基板300接触时，由于在旋转时反射镜230接触的位置上不存在电极340a〜340d，因此， 230），并且可以防止电极（340a-340d）电沉积。

10. 发明申请

US20090323149A1 OPTICAL SWITCH, OPTICAL SWITCH CONTROL METHOD AND COMMUNICATIION SYSTEM 有权
标题翻译：光开关，光开关控制方法及通讯系统
公开(公告)号：US20090323149A1
公开(公告)日：2009-12-31
申请号：US12309904
申请日：2007-08-20
申请人： Masato Mizukami , Johji Yamaguchi , Naru Nemoto , Kunihiko Sasakura
发明人： Masato Mizukami , Johji Yamaguchi , Naru Nemoto , Kunihiko Sasakura
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G02B6/2931 , G02B6/29313 , G02B6/3512 , G02B6/356 , G02B6/3588 , Y10S359/90
摘要： When a light intensity upon a perturbation is detected, an error calculation/correction unit (85) in a control unit (8) corrects and updates the above-described initial manipulated variables based on perturbation manipulated variables and manipulated variables, i.e., operation manipulated variables to obtain the maximum light intensity from the light intensity value at each perturbation manipulated variable, thereby adjusting the tilt angle of a mirror. More specifically, assuming that the time series data of an acquired output light intensity can be approximated to a cosine function, the error calculation/correction unit (85) calculates a phase difference θ between the cosine function and a sine or cosine function used to set x- and y-axis perturbation patterns for a circular trajectory perturbation. Manipulated variables at coordinates defined by the phase difference θ and polar coordinates of a radius voltage to perturb the mirror are calculated. Voltage values at coordinates defined by a function for setting the driving voltages of the mirror (230) are calculated and set as the driving voltages for one output port.
摘要翻译：当检测到扰动时的光强度时，控制单元（8）中的误差计算/校正单元（85）基于扰动操作变量和操作变量（即操作操作变量）来校正和更新上述初始操纵变量以从每个扰动操纵变量处的光强度值获得最大光强度，从而调整反射镜的倾斜角度。更具体地，假设所获取的输出光强度的时间序列数据可以近似为余弦函数，则误差计算/校正单元（85）计算余弦函数和用于设置的正弦或余弦函数之间的相位差θ 用于圆轨迹扰动的x轴和y轴扰动模式。计算由相位差θ定义的坐标处的操纵变量和扰动反射镜的半径电压的极坐标。计算由用于设置反射镜（230）的驱动电压的功能所确定的坐标处的电压值，并将其设置为一个输出端口的驱动电压。

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