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    • 1. 发明授权
    • Methods of manufacturing solid state image pickup devices
    • 制造固态图像拾取装置的方法
    • US08183084B2
    • 2012-05-22
    • US12911844
    • 2010-10-26
    • Tetsuya ItanoFumihiro InuiMasanori Ogura
    • Tetsuya ItanoFumihiro InuiMasanori Ogura
    • H01L21/00
    • G03F7/70425G03F7/70466H01L27/146
    • A method of manufacturing a solid state image pickup device having a plurality of pixels each including a photoelectric conversion region for converting light into a signal charge, and a plurality of wiring layers including first and second wiring layers. The method includes steps of forming the first wiring layer as a pattern by dividing a desired pattern into a plurality of patterns, connecting the divided patterns, and exposing the plurality of patterns, and forming the second wiring layer as a pattern by batch exposure processing. A connecting position along which the divided patterns are connected is arranged in a pixel area in which the plurality of pixels are arranged. The wiring included in the first wiring layer is formed by a vertical direction wiring arranged in parallel with and not crossing the connecting position in the pixel area, and the wiring included in the second wiring layer is formed by a horizontal direction wiring arranged in parallel with and crossing the connecting position in the pixel area.
    • 一种制造具有多个像素的固态图像拾取装置的方法,每个像素都包括用于将光转换为信号电荷的光电转换区域,以及包括第一和第二布线层的多个布线层。 该方法包括以下步骤:通过将期望的图案分成多个图案,连接分割图案和曝光多个图案来形成第一布线层作为图案,并且通过批量曝光处理形成第二布线层作为图案。 连接分割图案的连接位置被布置在多个像素排列的像素区域中。 包括在第一布线层中的布线由垂直方向布线形成,该垂直方向布线与像素区域中的连接位置平行且不相交,并且包括在第二布线层中的布线由与水平方向布线平行布置的水平方向布线形成 并穿过像素区域中的连接位置。
    • 9. 发明授权
    • Solid-state image sensor, camera using the same, camera control system, and signal output device
    • 固态图像传感器,使用相机的相机,相机控制系统和信号输出装置
    • US07286170B2
    • 2007-10-23
    • US10693455
    • 2003-10-27
    • Fumihiro InuiTetsuya ItanoMasanori Ogura
    • Fumihiro InuiTetsuya ItanoMasanori Ogura
    • H04N5/217
    • H04N5/378H01L27/14643H04N5/363
    • A solid-state image sensor has a sensor array that includes an array of pixel cells. The solid-state image sensor sequentially selects one line from plural lines of the sensor array and sequentially reads out signal charge and reset levels of pixel photosensor cells belonging to the selected line via first and second optical-signal common output lines and first and second noise-signal common output lines. Differential signals are amplified and output via signal less noise (S-N) read-out circuits. The optical-signal and the noise-signal common output lines are arranged parallel to one another in the sequence of the first optical-signal common output line, the first noise-signal common output line, the second noise-signal common output line, and the second optical-signal common output line. The solid stage image sensor may be used in a camera and in a camera control system.
    • 固态图像传感器具有包括像素单元阵列的传感器阵列。 固态图像传感器从传感器阵列的多行依次选择一行,并通过第一和第二光信号公共输出线顺序地读出属于所选行的像素光电传感器单元的信号电荷和复位电平,以及第一和第二噪声 信号通用输出线。 差分信号通过信噪比较小的噪声(S-N)读出电路进行放大和输出。 光信号和噪声信号公共输出线按照第一光信号公共输出线,第一噪声信号公共输出线,第二噪声信号公共输出线和 第二光信号公共输出线。 实体平台图像传感器可以用在照相机和照相机控制系统中。