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1. 发明授权

US07372497B2 Effective method to improve sub-micron color filter sensitivity 有权
标题翻译：提高亚微米滤色片灵敏度的有效方法
公开(公告)号：US07372497B2
公开(公告)日：2008-05-13
申请号：US10833565
申请日：2004-04-28
申请人： Fu-Tien Weng , Yu-Kung Hsiao , Chin-Kung Chang , Hung-Jen Hsu , Yi-Ming Dai , Chin-Chen Kuo
发明人： Fu-Tien Weng , Yu-Kung Hsiao , Chin-Kung Chang , Hung-Jen Hsu , Yi-Ming Dai , Chin-Chen Kuo
IPC分类号： H04N5/225
CPC分类号： H01L27/14685 , H01L27/14621 , H01L27/14623 , H01L27/14625 , H01L27/14627
摘要： An image sensor device and method for forming said device are described. The image sensor structure comprises a substrate with photodiodes, an interconnect structure formed on the substrate, a color filter layer above the interconnect structure, a first microlens array, an overcoat layer, and a second microlens array. A key feature is that a second microlens has a larger radius of curvature than a first microlens. Additionally, each first microlens and second microlens is a flat convex lens. Thus, a thicker second microlens with a short focal length is aligned above a thinner first microlens having a long focal length. A light column that includes a first microlens, a second microlens and a color filter region is formed above each photodiode. A second embodiment involves replacing a second microlens in each light column with a plurality of smaller second microlenses that focus light onto a first microlens.
摘要翻译：描述了用于形成所述装置的图像传感器装置和方法。图像传感器结构包括具有光电二极管的衬底，形成在衬底上的互连结构，在互连结构上方的滤色器层，第一微透镜阵列，外涂层和第二微透镜阵列。一个关键特征是第二微透镜具有比第一微透镜更大的曲率半径。另外，每个第一微透镜和第二微透镜是平凸透镜。因此，具有短焦距的较厚的第二微透镜在具有长焦距的较薄的第一微透镜上对准。在每个光电二极管上方形成包括第一微透镜，第二微透镜和滤色器区域的光柱。第二实施例涉及用多个将光聚焦到第一微透镜上的多个较小的第二微透镜替换每个光柱中的第二微透镜。

2. 发明申请

US20050242271A1 Effective method to improve sub-micron color filter sensitivity 有权
标题翻译：提高亚微米滤色片灵敏度的有效方法
公开(公告)号：US20050242271A1
公开(公告)日：2005-11-03
申请号：US10833565
申请日：2004-04-28
申请人： Fu-Tien Weng , Yu-Kung Hsiao , Chin-Kung Chang , Hung-Jen Hsu , Yi-Ming Dai , Chin-Chen Kuo
发明人： Fu-Tien Weng , Yu-Kung Hsiao , Chin-Kung Chang , Hung-Jen Hsu , Yi-Ming Dai , Chin-Chen Kuo
IPC分类号： H01L27/00 , H01L27/146 , H01L31/00 , H01L31/0216 , H01L31/0232
CPC分类号： H01L27/14685 , H01L27/14621 , H01L27/14623 , H01L27/14625 , H01L27/14627
摘要： An image sensor device and method for forming said device are described. The image sensor structure comprises a substrate with photodiodes, an interconnect structure formed on the substrate, a color filter layer above the interconnect structure, a first microlens array, an overcoat layer, and a second microlens array. A key feature is that a second microlens has a larger radius of curvature than a first microlens. Additionally, each first microlens and second microlens is a flat convex lens. Thus, a thicker second microlens with a short focal length is aligned above a thinner first microlens having a long focal length. A light column that includes a first microlens, a second microlens and a color filter region is formed above each photodiode. A second embodiment involves replacing a second microlens in each light column with a plurality of smaller second microlenses that focus light onto a first microlens.
摘要翻译：描述了用于形成所述装置的图像传感器装置和方法。图像传感器结构包括具有光电二极管的衬底，形成在衬底上的互连结构，在互连结构上方的滤色器层，第一微透镜阵列，外涂层和第二微透镜阵列。一个关键特征是第二微透镜具有比第一微透镜更大的曲率半径。另外，每个第一微透镜和第二微透镜是平凸透镜。因此，具有短焦距的较厚的第二微透镜在具有长焦距的较薄的第一微透镜上对准。在每个光电二极管上方形成包括第一微透镜，第二微透镜和滤色器区域的光柱。第二实施例涉及用多个将光聚焦到第一微透镜上的多个较小的第二微透镜替换每个光柱中的第二微透镜。

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