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1. 发明授权

US5431735A Phosphorus effusion cell for molecular beam epitaxy 失效
标题翻译：用于分子束外延的磷积液细胞
公开(公告)号：US5431735A
公开(公告)日：1995-07-11
申请号：US181802
申请日：1994-01-14
申请人： Fernando F. Briones
发明人： Fernando F. Briones
IPC分类号： C23C14/24 , C30B23/06 , C23C16/00
CPC分类号： C23C14/243 , C23C14/24 , C30B23/066
摘要： A phosphorus effusion cell for molecular beam epitaxy is disclosed. It consists of a vessel in which, by sublimation of red phosphorus, the vapor of this element is produced, the vessel being closed by means of a vacuum tight valve which regulates its flow. In the vessel, there are two zones having different temperatures, one of sublimation of red phosphorus and another of condensation and re-evaporation of white phosphorus, both zones being thermally insulated by means of reflecting screens which prevent the temperature of the heating resistance from having to reach temperatures above 350.degree. C. The valve, intermittent closing of which regulates the effusion of phosphorus vapor, is at a temperature slightly above that of the thermostated zone of condensation/re-evaporation of the white phosphorus. It finds applicable in the manufacture of semiconducting structures.
摘要翻译：公开了一种用于分子束外延的磷积液单元。它由一个容器组成，通过红磷的升华，产生该元素的蒸气，容器通过调节其流动的真空密封阀封闭。在容器中，存在两个具有不同温度的区域，其中一个是红磷升华，另一个是白磷的冷凝和再蒸发，两个区域通过反射屏蔽层进行绝热，防止加热阻力的温度具有达到高于350℃的温度。调节磷蒸汽渗出的阀门间歇关闭温度略高于白磷冷凝/再蒸发恒温区的温度。它适用于半导体结构的制造。

2. 发明授权

US5482892A Method of producing white phosphorus for molecular beam epitaxy 失效
标题翻译：分子束外延生产白磷的方法
公开(公告)号：US5482892A
公开(公告)日：1996-01-09
申请号：US403975
申请日：1995-03-15
申请人： Fernando F. Briones
发明人： Fernando F. Briones
IPC分类号： C23C14/24 , C30B23/06 , H01L21/20
CPC分类号： C23C14/243 , C23C14/24 , C30B23/066
摘要： A phosphorus effusion cell for molecular beam epitaxy is disclosed. It consists of a vessel in which, by sublimation of red phosphorus, the vapor of this element is produced, the vessel being closed by means of a vacuum tight valve which regulates its flow. In the vessel, there are two zones having different temperatures, one of sublimation of red phosphorus and another of condensation and re-evaporation of white phosphorus, both zones being thermally insulated by means of reflecting screens which prevent the temperature of the heating resistance from having to reach temperatures above 350.degree. C. The valve, intermittent closing of which regulates the effusion of phosphorus vapor, is at a temperature slightly above that of the thermostated zone of condensation/re-evaporation of the white phosphorus. It finds applicable in the manufacture of semiconducting structures.
摘要翻译：公开了一种用于分子束外延的磷积液单元。它由一个容器组成，通过红磷的升华，产生该元素的蒸气，容器通过调节其流动的真空密封阀封闭。在容器中，存在两个具有不同温度的区域，其中一个是红磷升华，另一个是白磷的冷凝和再蒸发，两个区域通过反射屏蔽层进行绝热，防止加热阻力的温度具有达到高于350℃的温度。调节磷蒸汽渗出的阀门间歇关闭温度略高于白磷冷凝/再蒸发恒温区的温度。它适用于半导体结构的制造。

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