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1. 发明授权

US08897910B2 Particle beam-assisted ultra-precision machining method for single-crystal brittle materials 有权
标题翻译：单晶脆性材料的粒子束辅助超精密加工方法
公开(公告)号：US08897910B2
公开(公告)日：2014-11-25
申请号：US13159811
申请日：2011-06-14
申请人： Fengzhou Fang , Yunhui Chen , Zongwei Xu , Zhongjun Qiu , Xiaodong Zhang , Tengfei Dai , Xiaotang Hu
发明人： Fengzhou Fang , Yunhui Chen , Zongwei Xu , Zhongjun Qiu , Xiaodong Zhang , Tengfei Dai , Xiaotang Hu
IPC分类号： G06F19/00 , B24B1/00 , C23C14/00 , B23K15/00 , B23K26/00 , G21K5/10 , H01J37/08 , A61N5/00 , G21G5/00 , B28D5/00 , C30B29/06 , C30B29/08 , C30B33/04
CPC分类号： B28D5/00 , B24B7/228 , B24B37/042 , C30B29/06 , C30B29/08 , C30B33/04
摘要： The invention relates to a new technology which uses a surface modification method for ultra-precision machining, and in particular relates to a particle beam-assisted ultraprecision machining method for single-crystal brittle materials. The invention, the particle beam-assisted ultra-precision machining method for single-crystal brittle materials, can significantly improve machining accuracy, reduce surface finish and greatly reduce tool wear during ultra-precision machining of brittle materials. The method adopts the technical proposal that the method comprises of the following steps: a) utilizing simulation software to simulate modification parameters according to cutting depth, surface roughness and other machining requirements; b) using particle beams to bombard or irradiate the surface of a single-crystal brittle material to be machined, according to the energy and fluence obtained from the simulation results; c) utilizing ultra-precision cutting (or grinding) technology to perform ultra precise cutting on the single-crystal material which is bombarded or irradiated by the particle beams; and d) measuring and characterizing the surface quality of the machined material and comparing the improvement of the machined surface quality with that of the unmodified machined surface. The method is mainly used for machining the single-crystal brittle materials.
摘要翻译：本发明涉及一种使用表面改性方法进行超精密加工的新技术，特别涉及用于单晶脆性材料的粒子束辅助超精密加工方法。本发明是用于单晶脆性材料的粒子束辅助超精密加工方法，可以显着提高加工精度，降低表面光洁度，大大减少脆性材料超精密加工过程中的刀具磨损。该方法采用技术方案，该方法包括以下步骤：a）利用模拟软件根据切割深度，表面粗糙度等加工要求模拟修改参数; b）根据从仿真结果得到的能量和能量，使用粒子束轰击或照射要加工的单晶脆性材料的表面; c）利用超精密切割（或研磨）技术对被粒子束轰击或照射的单晶材料进行超精密切割; 以及d）测量和表征加工材料的表面质量，并将加工表面质量的改善与未修饰的加工表面的改进进行比较。该方法主要用于加工单晶脆性材料。

2. 发明申请

US20120012563A1 PARTICLE BEAM-ASSISTED ULTRA-PRECISION MACHINING METHOD FOR SINGLE-CRYSTAL BRITTLE MATERIALS 有权
标题翻译：用于单晶玻璃材料的粒子束辅助超精密加工方法
公开(公告)号：US20120012563A1
公开(公告)日：2012-01-19
申请号：US13159811
申请日：2011-06-14
申请人： Fengzhou Fang , Yunhui Chen , Zongwei Xu , Zhongjun Qiu , Xiaodong Zhang , Tengfei Dai , Xiaotang Hu
发明人： Fengzhou Fang , Yunhui Chen , Zongwei Xu , Zhongjun Qiu , Xiaodong Zhang , Tengfei Dai , Xiaotang Hu
IPC分类号： B23K15/08
CPC分类号： B28D5/00 , B24B7/228 , B24B37/042 , C30B29/06 , C30B29/08 , C30B33/04
摘要： The invention relates to a new technology which uses a surface modification method for ultra-precision machining, and in particular relates to a particle beam-assisted ultraprecision machining method for single-crystal brittle materials. The invention, the particle beam-assisted ultra-precision machining method for single-crystal brittle materials, can significantly improve machining accuracy, reduce surface finish and greatly reduce tool wear during ultra-precision machining of brittle materials. The method adopts the technical proposal that the method comprises of the following steps: a) utilizing simulation software to simulate modification parameters according to cutting depth, surface roughness and other machining requirements; b) using particle beams to bombard or irradiate the surface of a single-crystal brittle material to be machined, according to the energy and fluence obtained from the simulation results; c) utilizing ultra-precision cutting (or grinding) technology to perform ultra precise cutting on the single-crystal material which is bombarded or irradiated by the particle beams; and d) measuring and characterizing the surface quality of the machined material and comparing the improvement of the machined surface quality with that of the unmodified machined surface. The method is mainly used for machining the single-crystal brittle materials.
摘要翻译：本发明涉及一种使用表面改性方法进行超精密加工的新技术，特别涉及用于单晶脆性材料的粒子束辅助超精密加工方法。本发明是用于单晶脆性材料的粒子束辅助超精密加工方法，可以显着提高加工精度，降低表面光洁度，大大减少脆性材料超精密加工过程中的刀具磨损。该方法采用技术方案，该方法包括以下步骤：a）利用模拟软件根据切割深度，表面粗糙度等加工要求模拟修改参数; b）根据从仿真结果得到的能量和能量，使用粒子束轰击或照射要加工的单晶脆性材料的表面; c）利用超精密切割（或研磨）技术对被粒子束轰击或照射的单晶材料进行超精密切割; 以及d）测量和表征加工材料的表面质量，并将加工表面质量的改善与未修饰的加工表面的改进进行比较。该方法主要用于加工单晶脆性材料。

3. 发明申请

US20130000452A1 METHOD FOR PREVENTING WEAR OF MONOCRYSTALLINE DIAMOND TOOLS BY APPLYING MULTIPLE PHYSICAL FIELDS DURING ULTRA-PRECISION MACHINING 审中-公开
标题翻译：通过在超精密加工中应用多个物理场地来预防单晶金刚石工具的磨损方法
公开(公告)号：US20130000452A1
公开(公告)日：2013-01-03
申请号：US13515280
申请日：2010-07-09
申请人： Fengzhou Fang , Zhongjun Qiu , Xiaotang Hu , Hongwei Zhang
发明人： Fengzhou Fang , Zhongjun Qiu , Xiaotang Hu , Hongwei Zhang
IPC分类号： B26D7/08
CPC分类号： B24B53/001 , B23B27/20 , B23B2222/44 , B23B2222/84 , B23B2226/31 , B23B2260/092 , B23B2270/022 , B23B2270/38 , Y10T83/0405
摘要： A method for preventing the wear of monocrystalline diamond tools by applying multiple physical fields during ultra-precision machining is disclosed, wherein dislocation form of lower energy state will appear by applying different physical fields such as electric field, magnetic field and laser irradiation around the diamond tool so as to change the construction of crystal interface and interfacial energy. Consequently, solid transformation will appear in the materials during the cutting process of nano-scale precision so as to change the cutting characteristic of the materials and prevent the wear of monocrystalline diamond tools during ultra-precision machining The method can be mainly used for ultra-precision machining
摘要翻译：公开了一种通过在超精密加工期间应用多个物理场来防止单晶金刚石工具的磨损的方法，其中通过在钻石周围施加不同的物理场，例如电场，磁场和激光照射，将出现较低能态的位错形式工具，以改变晶界面和界面能的结构。因此，在纳米尺度精密切割过程中材料将出现固体转变，从而改变材料的切割特性，防止单晶金刚石工具在超精密加工过程中的磨损。该方法主要用于超精密加工，精密加工

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