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1. 发明申请

US20130037714A1 Charged-Particle Microscopy Imaging Method 有权
标题翻译：带电粒子显微镜成像方法
公开(公告)号：US20130037714A1
公开(公告)日：2013-02-14
申请号：US13572206
申请日：2012-08-10
申请人： Faysal Boughorbel , Berend Helmerus Lich , Cornelis Sander Kooijman , Eric Gerardus Theodoor Bosch , Alan Frank de Jong
发明人： Faysal Boughorbel , Berend Helmerus Lich , Cornelis Sander Kooijman , Eric Gerardus Theodoor Bosch , Alan Frank de Jong
IPC分类号： H01J37/26
CPC分类号： H01J37/222 , G01N23/22 , G01N2223/423 , H01J37/28 , H01J2237/226
摘要： Charged-particle microscopy includes irradiating a sample in N measurement sessions, each having an associated beam parameter (P) value; Detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, where n is an integer in the range 1≦n≦N, and processing the set (S) by: Defining a Point Spread Function (K) having a kernel value Kn for each value of n; Defining a spatial variable (V); Defining an imaging quantity (Q) having for each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; For each value of n, determining a minimum divergence min D(Mn∥Kn*V) between Mn and Qn, solving for V while applying constraints on the values Kn.
摘要翻译：带电粒子显微术包括在N个测量会话中照射样品，每个测量会话具有相关的光束参数（P）值; 检测在每个测量会话期间发射的辐射，将被测量（M）与每个测量会话相关联，从而提供数据对{Pn，Mn}的数据集（S），其中n是范围1＆nlE; n＆nlE; N，并通过以下方式处理集合（S）：定义每个n值具有内核值Kn的点扩展函数（K）; 定义空间变量（V）; 定义对于n的每个值具有作为Kn和V的三维卷积的值Qn的成像量（Q），使得Qn = Kn * V; 对于n的每个值，确定Mn和Qn之间的最小发散最小值D（Mn∥Kn* V），在对Kn进行约束的同时求解V。

2. 发明申请

US20110266440A1 SEM Imaging Method 有权
标题翻译： SEM成像方法
公开(公告)号：US20110266440A1
公开(公告)日：2011-11-03
申请号：US13098300
申请日：2011-04-29
申请人： Faysal Boughorbel , Cornelis Sander Kooijman , Berend Helmerus Lich , Eric Gerardus Theodoor Bosch
发明人： Faysal Boughorbel , Cornelis Sander Kooijman , Berend Helmerus Lich , Eric Gerardus Theodoor Bosch
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/226 , H01J2237/2611
摘要： A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1≦i≦N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.
摘要翻译：一种使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤：在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的束参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; 在每个测量会话期间检测由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编辑数据对（Pi，Mi）的数据集（D）其中：采用统计盲分离（BSS）技术来自动处理数据集（D），并将其空间解析为成像对（Qk，Lk）的结果集（R），其中具有值Qk的成像量（Q）与参考表面S的离散深度级Lk相关联。

3. 发明授权

US08581189B2 Charged particle microscopy imaging method 有权
标题翻译：带电粒子显微镜成像方法
公开(公告)号：US08581189B2
公开(公告)日：2013-11-12
申请号：US13572206
申请日：2012-08-10
申请人： Faysal Boughorbel , Eric Gerardus Theodoor Bosch , Cornelis Sander Kooijman , Berend Helmerus Lich , Alan Frank de Jong
发明人： Faysal Boughorbel , Eric Gerardus Theodoor Bosch , Cornelis Sander Kooijman , Berend Helmerus Lich , Alan Frank de Jong
IPC分类号： H01J37/26
CPC分类号： H01J37/222 , G01N23/22 , G01N2223/423 , H01J37/28 , H01J2237/226
摘要： A charged-particle microscopy includes irradiating a sample in measurement sessions, each having an associated beam parameter (P) value detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, wherein an integer in the range of 1≦n≦N, and processing the set (S) by: defining a Point Spread Function (K) having a kernel value Kn for each value n; defining a spatial variable (V); defining an imaging quantity (Q) having fore each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; for each value of n, determining a minimum divergence min D(Mn∥Kn*V) between Mn and Qn, solving V while applying constraints on the values Kn.
摘要翻译：带电粒子显微术包括在测量会话中照射样本，每个测量会话具有检测在每个测量会话期间发射的辐射的相关联的波束参数（P）值，将被测量（M）与每个测量会话相关联，从而提供数据集（S）数据对{Pn，Mn}，其中1 @ n @ N范围内的整数，并且通过以下方式来处理集合（S）：定义每个值n具有内核值Kn的点扩展函数（K）定义空间变量（V）; 定义在每个值n之前具有作为Kn和V的三维卷积的值Qn的成像量（Q），使得Qn = Kn * V; 对于n的每个值，确定Mn和Qn之间的最小发散最小值D（Mn∥Kn* V），同时对值Kn施加约束来求解V。

4. 发明授权

US08232523B2 SEM imaging method 有权
标题翻译： SEM成像方法
公开(公告)号：US08232523B2
公开(公告)日：2012-07-31
申请号：US13098300
申请日：2011-04-29
申请人： Faysal Boughorbel , Cornelis Sander Kooijman , Berend Helmerus Lich , Eric Gerardus Theodoor Bosch
发明人： Faysal Boughorbel , Cornelis Sander Kooijman , Berend Helmerus Lich , Eric Gerardus Theodoor Bosch
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/226 , H01J2237/2611
摘要： A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1≦i≦N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.
摘要翻译：使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤：在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的束参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; 在每个测量会话期间检测由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编辑数据对（Pi，Mi）的数据集（D）其中：采用统计盲分离（BSS）技术来自动处理数据集（D），并将其空间解析为成像对（Qk，Lk）的结果集（R），其中具有值Qk的成像量（Q）与参考表面S的离散深度级Lk相关联。

5. 发明授权

US08586921B2 Charged-particle microscope providing depth-resolved imagery 有权
标题翻译：带电粒子显微镜，提供深度分辨图像
公开(公告)号：US08586921B2
公开(公告)日：2013-11-19
申请号：US13572449
申请日：2012-08-10
申请人： Faysal Boughorbel , Pavel Potocek , Cornelis Sander Kooijman , Berend Helmerus Lich
发明人： Faysal Boughorbel , Pavel Potocek , Cornelis Sander Kooijman , Berend Helmerus Lich
IPC分类号： H01J37/26
CPC分类号： H01J37/222 , G01N23/22 , G01N2223/423 , H01J37/28 , H01J2237/226
摘要： A method of charged-particle microscopy, comprising: irradiating a sample surface S to cause radiation to emanate from the sample; detecting at least a portion of said emitted radiation recording an output On of said detector arrangement as a function of emergence angle θn of said emitted radiation, measured relative to an axis normal to S thus compiling a measurement set M={(On, θn)} for a plurality of values of θn; automatically deconvolving the measurement set M and spatially resolve it into a result set R={(VK, Lk)},in which a spatial variable V demonstrates a value Vk at an associated discrete death level Lk referenced to the surface S, whereby n and K are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.
摘要翻译：一种带电粒子显微镜的方法，包括：照射样品表面S以引起辐射从样品中发出; 检测所述发射辐射的至少一部分，记录所述检测器装置的输出On作为所述发射辐射的出射角度的函数，相对于垂直于S的轴测量，从而编译测量集M = {（On，thetan） }多个价值观; 自动去卷积测量集M，并将其空间解析为结果集R = {（VK，Lk）}，其中空间变量V表示参考表面S的相关离散死亡水平Lk的值Vk，由此n和 K是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。

6. 发明申请

US20130037715A1 CHARGED-PARTICLE MICROSCOPE PROVIDING DEPTH-RESOLVED IMAGERY 有权
标题翻译：充电颗粒显微镜提供深度解析的图像
公开(公告)号：US20130037715A1
公开(公告)日：2013-02-14
申请号：US13572449
申请日：2012-08-10
申请人： Faysal Boughorbel , Pavel Potocek , Cornelis Sander Kooijman , Berend Helmerus Lich
发明人： Faysal Boughorbel , Pavel Potocek , Cornelis Sander Kooijman , Berend Helmerus Lich
IPC分类号： H01J37/26
CPC分类号： H01J37/222 , G01N23/22 , G01N2223/423 , H01J37/28 , H01J2237/226
摘要： A method of examining a sample using a charged-particle microscope, comprising the following steps: Mounting the sample on a sample holder; Using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; Using a detector arrangement to detect at least a portion of said emitted radiation, which method comprises the following steps: Recording an output On of said detector arrangement as a function of emergence angle θn of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M={(On, θn)} for a plurality of values of θn; Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(Vk, Lk)}, in which a spatial variable V demonstrates a value Vk at an associated discrete depth level Lk referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.
摘要翻译：使用带电粒子显微镜检查样品的方法，包括以下步骤：将样品安装在样品架上; 使用粒子光学柱将至少一束颗粒辐射引导到样品的表面S上，从而产生引起发射的辐射从样品中发出的相互作用; 使用检测器装置来检测所述发射辐射的至少一部分，该方法包括以下步骤：根据出射角度和角度记录所述检测器装置的输出On;所发射的辐射的n相对于轴线正常测量到S，从而针对多个值进行编译测量集M = {（On，＆thetas; n）}; n; 使用计算机处理装置自动地对测量集M进行解卷积并将其空间解析为结果集R = {（Vk，Lk）}，其中空间变量V表示以参考表面的相关离散深度级Lk的值Vk S，其中n和k是整数序列的成员，空间变量V表示作为其体积中的位置的函数的样本的物理性质。

7. 发明申请

US20090316994A1 METHOD AND FILTER FOR RECOVERY OF DISPARITIES IN A VIDEO STREAM 审中-公开
标题翻译：在视频流中恢复不同的方法和过滤器
公开(公告)号：US20090316994A1
公开(公告)日：2009-12-24
申请号：US12442416
申请日：2007-09-28
申请人： Faysal Boughorbel
发明人： Faysal Boughorbel
IPC分类号： G06K9/46
CPC分类号： G06T7/246 , G06T7/593
摘要： The invention concerns a method for recovery, through a digital filtering processing, of the disparities (di,k) in the digital images (1, 2; 10, 20) of a video stream containing digitized images formed of lines of pixels, so that data on the disparities (di,k) between images are yielded by the digital filtering processing. The method includes an initial stage of determination of image sites (i, j) to be pinpointed in depth, and the filtering being a recursive filtering calculating the disparities (di,k) between said sites (i, j) of said images (1, 2; 10, 20) on the basis of weighted averaging (ωi,k) governed simultaneously (1) by the characteristics (ci,1, cj,1) of the pixels of the sites (i, j) and by the image similarities between said sites (j) and sites (j′) close to said sites. The quality of the convergence of the filtering may be enhanced by adding at each iteration (k) a small random excitation (εi,k) to the depth estimate (δi,k) deduced from the disparity (di,k).
摘要翻译：本发明涉及一种通过数字滤波处理来恢复包含由像素线形成的数字化图像的视频流的数字图像（1,2,10,20）中的差异（di，k）的方法，使得通过数字滤波处理产生图像之间的差异（di，k）的数据。该方法包括确定深度精确定位的图像位置（i，j）的初始阶段，并且该滤波是递归滤波，其计算所述图像（1，j）的所述位置（i，j）之间的差异（i，j）基于由站点（i，j）的像素的特征（ci，1，cj，1））和图像（i，j）同时（1）控制的加权平均（omegai，k）所述站点（j）和靠近所述站点的站点（j'）之间的相似性。可以通过在从视差（di，k）推导出的深度估计（deltai，k）的每次迭代（k）中加入小的随机激励（epsiloni，k）来增强滤波的收敛的质量。

8. 发明申请

US20090080767A1 METHOD FOR DETERMINING A DEPTH MAP FROM IMAGES, DEVICE FOR DETERMINING A DEPTH MAP 失效
标题翻译：用于确定图像深度图的方法，用于确定深度图的设备
公开(公告)号：US20090080767A1
公开(公告)日：2009-03-26
申请号：US12282904
申请日：2007-03-14
申请人： Faysal Boughorbel
发明人： Faysal Boughorbel
IPC分类号： G06K9/00
CPC分类号： G06T7/55
摘要： Window based matching is used for determining a depth map from images obtained from different orientations. A set of fixed matching windows is used for points of the image for which the depth is to be determined. The set of matching windows covers a footprint of pixels around the point of the image, and the average number (0) of matching windows that a pixel of the footprint (FP) belongs to is less than one plus the number of pixels in the footprint divided by 15 (0
摘要翻译：基于窗口的匹配用于从从不同方向获得的图像中确定深度图。一组固定的匹配窗口用于要确定深度的图像的点。匹配窗口的集合覆盖了图像点周围的像素的占地面积，并且占用空间（FP）的像素所属的匹配窗口的平均数（0）小于一个加上足迹中的像素数量除以15（0

9. 发明授权

US08340399B2 Method for determining a depth map from images, device for determining a depth map 失效
标题翻译：用于从图像确定深度图的方法，用于确定深度图的装置
公开(公告)号：US08340399B2
公开(公告)日：2012-12-25
申请号：US12282904
申请日：2007-03-14
申请人： Faysal Boughorbel
发明人： Faysal Boughorbel
IPC分类号： G06K9/00 , G06K9/36
CPC分类号： G06T7/55
摘要： Window based matching is used for determining a depth map from images obtained from different orientations. A set of fixed matching windows is used for points of the image for which the depth is to be determined. The set of matching windows covers a footprint of pixels around the point of the image, and the average number (O) of matching windows that a pixel of the footprint (FP) belongs to is less than one plus the number of pixels in the footprint divided by 15 (O
摘要翻译：基于窗口的匹配用于从从不同方向获得的图像中确定深度图。一组固定的匹配窗口用于要确定深度的图像的点。匹配窗口的集合覆盖图像点周围的像素的占地面积，并且占用空间（FP）的像素所属的匹配窗口的平均数（O）小于一个加上足迹中的像素数量除以15（O

10. 发明授权

US08698078B2 Charged-particle microscopy with occlusion detection 有权
标题翻译：具有闭塞检测的带电粒子显微镜
公开(公告)号：US08698078B2
公开(公告)日：2014-04-15
申请号：US13472183
申请日：2012-05-15
申请人： Daniel Woodrow Phifer, Jr. , Faysal Boughorbel
发明人： Daniel Woodrow Phifer, Jr. , Faysal Boughorbel
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/2442 , H01J2237/2445 , H01J2237/24475 , H01J2237/2448 , H01J2237/2611 , H01J2237/2807 , H01J2237/2817
摘要： This invention relates to a method of examining a sample using a charged-particle microscope. This invention solves the problem of occlusion effects, whereby a given line-of-sight behind a particular region on a sample and a given detector is blocked by a topographical feature on the sample, thus hampering detection of the emitted radiation emanating from the occluded region. This problem is solved by using at least a first and second detector configuration to detect each portion of the emitted radiation and to produce at least a first and second corresponding image based thereupon; and using computer processing apparatus to automatically compare different members of the set of corresponding images and mathematically identify on the sample at least one occlusion region with an occluded line-of-sight relative to at least one of the detector configurations.
摘要翻译：本发明涉及使用带电粒子显微镜检查样品的方法。本发明解决了遮挡效应的问题，由此样品和给定检测器上的特定区域后面的给定视线被样品上的形貌特征阻挡，从而妨碍了从封闭区域发出的辐射的检测。通过使用至少第一和第二检测器配置来检测所发射的辐射的每个部分并且基于此产生至少第一和第二对应的图像来解决该问题; 并且使用计算机处理设备自动比较所述对应图像集合中的不同成员，并且相对于所述检测器配置中的至少一个在所述至少一个具有闭塞视线的遮挡区域上数学地识别所述样本。

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