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1. 发明授权

US5825913A System for finding the orientation of a wafer 失效
标题翻译：用于找到晶片取向的系统
公开(公告)号：US5825913A
公开(公告)日：1998-10-20
申请号：US503574
申请日：1995-07-18
申请人： Fariborz Rostami , James Harald Clark , David J. Michael , David J. Wilson
发明人： Fariborz Rostami , James Harald Clark , David J. Michael , David J. Wilson
IPC分类号： G06T7/00 , G06K9/36
CPC分类号： G06T7/0042 , G06T2207/30148 , H01L2223/54453
摘要： The invention can be used to find the orientation of a semiconductor wafer without wafer handling, i.e., in a non-contact manner. The invention uses knowledge of the position of a semiconductor wafer, and the position of an orientation feature of the wafer, to find the orientation of the wafer. According to the invention, a curved band image is formed that includes an image of an orientation feature. The curved band image is then transformed into a straight band image. The longitudinal position of the orientation feature is then determined in the coordinate system of the straight band image, which longitudinal position is then converted into an angular displacement in the coordinate system of the curved band image to provide the orientation of the wafer.
摘要翻译：本发明可以用于找到半导体晶片的方位，而不需要晶片处理，即以非接触方式。本发明使用半导体晶片的位置以及晶片的取向特征的位置的知识来找到晶片的取向。根据本发明，形成包括取向特征的图像的弯曲带图像。然后将弯曲的带状图像变换为直带图像。然后在直带图像的坐标系中确定取向特征的纵向位置，然后将该纵向位置转换成在弯曲带图像的坐标系中的角位移以提供晶片的取向。

2. 发明授权

US6011586A Low-profile image formation apparatus 失效
标题翻译：低调图像形成装置
公开(公告)号：US6011586A
公开(公告)日：2000-01-04
申请号：US759497
申请日：1996-12-04
申请人： Bill Lepior , E. John McGarry , Fariborz Rostami , Gilbert Chiang
发明人： Bill Lepior , E. John McGarry , Fariborz Rostami , Gilbert Chiang
IPC分类号： H04N7/18 , G02B13/16
CPC分类号： H04N7/18
摘要： An apparatus is provided for forming an image of the periphery of an object with a camera having optics disposed at a working distance that is significantly less than the focal length of the optics, without introducing image distortion. The invention provides an image formation apparatus having a reduced effective profile height by exploiting a folded optical path to provide reduced working distance between a camera and an object of interest, such as a semiconductor wafer, as compared with direct viewing of the object. In a preferred embodiment, the invention includes two reflecting substrates, a first reflecting substrate and a second reflecting substrate. The distance between the first and second reflecting substrates determines the number of times the light rays that form the image will bounce therebetween, and consequently, the number of images of an object periphery that will appear in the field of view (FOV) of the camera. The invention provides an image formation system that can operate within the small or narrow enclosures of some existing wafer fabrication equipment. The invention also provides reduced camera vibration.
摘要翻译：提供了一种装置，用于利用具有光学器件的照相机来形成物体的周边的图像，该光学器件设置在远远小于光学器件的焦距的工作距离处，而不引入图像失真。本发明提供了一种图像形成装置，其具有通过利用折叠的光学路径降低的有效轮廓高度，以提供相机和感兴趣对象（例如半导体晶片）之间相对于对象的直接观看而减小的工作距离。在优选实施例中，本发明包括两个反射基板，第一反射基板和第二反射基板。第一和第二反射基板之间的距离决定了形成图像的光线将在它们之间弹起的次数，因此，将会出现在相机的视野（FOV）中的物体周边的图像数量。本发明提供一种图像形成系统，其可以在一些现有的晶片制造设备的小或窄的外壳内操作。本发明还提供减少的相机振动。

3. 发明授权

US06483935B1 System and method for counting parts in multiple fields of view using machine vision 有权
标题翻译：使用机器视觉对多个视野中的零件进行计数的系统和方法
公开(公告)号：US06483935B1
公开(公告)日：2002-11-19
申请号：US09430107
申请日：1999-10-29
申请人： Fariborz Rostami , Todd O. Dampier , Edwin C. Mangalindan
发明人： Fariborz Rostami , Todd O. Dampier , Edwin C. Mangalindan
IPC分类号： G06K900
CPC分类号： G01N21/8901 , G06M1/101 , G06M7/00
摘要： A system and method for counting objects or parts on a continuously moving conveyor, or other elongated surface, provides a camera and associated machine vision system that acquire/capture and analyze multiple, successive fields of view taken within an area of interest defined by the system. Each of the fields of view includes flanking right and left overlap zones with respect to adjacent fields of view. The overlap zones are defined to be at least as wide as the maximum width of a part being counted. The captured fields of view are stored within the system and analyzed in succession based upon a set of rules. These rules determine whether or not a particular part within the subject field of view is to be counted. More specifically, the rules are applied within the overlap zones for each field of view to determine whether or not to count the part. Certain refinements to basic rules are employed to establish uncertainty regions within the overlapping zones to account for possible errors in tracking objects between fields of view.
摘要翻译：用于对连续移动的输送机或其它细长表面上的物体或部件进行计数的系统和方法提供了摄像机和相关联的机器视觉系统，其获取/捕获和分析由系统限定的关注区域内拍摄的多个连续的视场。每个视野包括相对于相邻视场的侧向的左右重叠区域。重叠区域被定义为至少与被计数的部件的最大宽度一样宽。捕获的视野被存储在系统内并且基于一组规则被连续分析。这些规则确定是否对主体视野内的特定部分进行计数。更具体地，在每个视场的重叠区域内应用规则以确定是否对该零件进行计数。采用对基本规则的某些改进来建立重叠区域内的不确定区域，以解决在视场之间跟踪对象的可能错误。

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