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    • 10. 发明授权
    • System for active array temperature sensing and cooling
    • 有源阵列温度传感和冷却系统
    • US08348503B2
    • 2013-01-08
    • US11764703
    • 2007-06-18
    • Thomas P. BrodyPaul R. MalmbergJoseph A. Marcanio
    • Thomas P. BrodyPaul R. MalmbergJoseph A. Marcanio
    • G01K3/00
    • C23C14/562C23C14/042C23C14/541H01L51/0008H01L51/0023H01L51/529H01L51/56H01L2924/0002H01L2924/00
    • A system and method for providing an active array of temperature sensing and cooling elements, including an active heatsink which further includes an active temperature sensing layer, a thermoelectric cooling layer, and a heatsink, which further includes a plurality of cooling channels. The temperature sensing element within the active temperature sensing layer includes a plurality of switching transistors, a linear transistor, a current sense resistor, a thermistor, a voltage sensing bus, a voltage setting bus, a current measurement bus, a measurement switching bus, a sense control bus, a storage capacitor, and a supply voltage, all under the control of a process control computer. The method of using an active array of temperature sensing and cooling elements includes the steps of aligning the shadow mask, depositing the material, detecting a thermal gradient, and controlling the thermoelectric cooling.
    • 一种用于提供温度感测和冷却元件的有源阵列的系统和方法,包括有源散热器,其还包括有源温度感测层,热电冷却层和散热器,其还包括多个冷却通道。 有源温度检测层内的温度检测元件包括多个开关晶体管,线性晶体管,电流检测电阻,热敏电阻,电压感测总线,电压设定总线,电流测量总线,测量开关总线, 感测控制总线,存储电容器和电源电压,全部由过程控制计算机控制。 使用温度感测和冷却元件的有源阵列的方法包括对准荫罩,沉积材料,检测热梯度和控制热电冷却的步骤。