会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明申请
    • MATERIAL EVALUATION DEVICE AND METHOD
    • 材料评估装置和方法
    • US20160327498A1
    • 2016-11-10
    • US15213913
    • 2016-07-19
    • FUJITSU LIMITED
    • Hideshi YamaguchiTakeshi Soeda
    • G01N23/225
    • G01N23/2251H01J37/244H01J2237/24578
    • A detector is the one which detects reflected electrons or secondary electrons emitted from a sample as a result of irradiation with an electron beam by an electron beam irradiation unit, and its one end is set into a non-contact state where it is separated from and faces the sample and the other end is supported on and fixed to a drive mechanism, and the drive mechanism freely moves the detector random positions three-dimensionally with respect to the sample. According to this configuration, it is possible to detect reflected electrons and secondary electrons scattered in random directions appropriately, and accurate evaluation of a crystal grain diameter in which no crystal grain boundary is overlooked and acquisition of an isotropic surface shape image are achieved.
    • 检测器是通过电子束照射单元检测由电子束照射而从样品发射的反射电子或二次电子的检测器,其一端设定为非接触状态, 面对样品,另一端支撑并固定在驱动机构上,并且驱动机构相对于样品三维自由移动检测器随机位置。 根据该结构,可以适当地检测在随机方向上散射的反射电子和二次电子,并且可以精确地评价不忽略晶粒边界的晶粒直径,并获得各向同性的表面形状图像。