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    • 2. 发明申请
    • FLUID CONTROL DEVICE
    • 流体控制装置
    • US20160369903A1
    • 2016-12-22
    • US14898888
    • 2014-11-12
    • FUJIKIN INCORPORATED
    • Taichi KitanoTsutomu ShinoharaTadayuki YakushijinTomohiro NakataTsuyoshi TanikawaMichio Yamaji
    • F16K7/14F16K27/00
    • F16K7/14F15B13/0817F16K27/003
    • As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.
    • 作为形成主气体通道的通道,每个通道块3具有第一倒V通道,第一出口通道在第一倒V通道的顶点和第一开关阀的出口之间连通。 作为形成通气气体通道的通道,每个通道块3具有第二倒V通道和第二出口通道,第二出口通道在第二倒V通道的顶点和第二开关阀的出口之间连通。 作为形成第一副气体流入通道的通道,每个通道块具有通向第一开关阀的入口的第一入口通道和公共入口通道。 作为形成第二副气体流入通道的通道,每个通道块具有通向第二开关阀的入口的第二入口通道和连续到公共入口通道的连通路径。