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    • 1. 发明授权
    • Thin film transistor formed by an etching process with high anisotropy
    • 通过具有高各向异性的蚀刻工艺形成的薄膜晶体管
    • US06815270B2
    • 2004-11-09
    • US10438725
    • 2003-05-15
    • Takatoshi TsujimuraMasatomo TakeichiKai R. SchleupenEvan G. Colgan
    • Takatoshi TsujimuraMasatomo TakeichiKai R. SchleupenEvan G. Colgan
    • H01L2100
    • H01L27/12H01L27/124H01L27/1248H01L29/66765Y10S438/90
    • The present invention discloses a thin film transistor and a process for forming thereof by a high anisotropy etching process. A thin film transistor according to the present invention comprises a transistor element including a gate electrode, a gate insulating layer, a semiconductor layer, and source and drain electrodes; a passivation layer being deposited on the layers and having first openings for contact holes; and an interlayer insulator extending along with the passivation layer and having second openings for the contact holes, the first openings and the second openings being aligned each other over the substrate, wherein an electrical conductive layer is deposited on an inner wall of the contact hole and the inner wall is formed by the first and second openings tapered smoothly and continuously through an anisotropic etching process.
    • 本发明公开了一种薄膜晶体管及其通过高各向异性蚀刻工艺形成的方法。 根据本发明的薄膜晶体管包括晶体管元件,其包括栅极电极,栅极绝缘层,半导体层以及源极和漏极电极; 钝化层沉积在层上并具有用于接触孔的第一开口; 以及与所述钝化层一起延伸并具有用于所述接触孔的第二开口的层间绝缘体,所述第一开口和所述第二开口在所述衬底上彼此对准,其中导电层沉积在所述接触孔的内壁上,并且 内壁由第一和第二开口形成,其平滑且连续地通过各向异性蚀刻工艺而逐渐变细。
    • 5. 发明授权
    • Self-aligned structures for improved wide viewing angle for liquid crystal displays
    • 自对准结构,用于改善液晶显示器的广视角
    • US06256080B1
    • 2001-07-03
    • US09339262
    • 1999-06-23
    • Evan G. ColganShui-Chih A. LienKai R. Schleupen
    • Evan G. ColganShui-Chih A. LienKai R. Schleupen
    • G02F11337
    • G02F1/133753G02F1/133512G02F1/133707
    • In accordance with the present invention, a liquid crystal display cell includes a first substrate having a light absorbent material patterned thereon. The light absorbent material includes a portion disposed within a pixel area. A conductive layer is formed on the light absorbent material for forming a first transparent electrode. A second electrode is spaced apart from the first electrode by a gap. The gap includes liquid crystal. A ridge or a trench is formed in the pixel area and projects into the liquid crystal. The ridge or trench is self-aligned to the portions of the light absorbent material in the pixel area. The first electrode and the second electrode provide an electric field therebetween wherein the ridge or trench provides pretilt control for the liquid crystal to provide an improved wide viewing angle and the portions of the light absorbent material absorb light leaked from the ridge. Other embodiments for active and passive displays are included as well as a method for employing the invention.
    • 根据本发明,液晶显示单元包括具有图案化的吸光材料的第一基板。 吸光材料包括设置在像素区域内的部分。 在用于形成第一透明电极的光吸收材料上形成导电层。 第二电极通过间隙与第一电极间隔开。 间隙包括液晶。 在像素区域中形成脊或沟槽并突出到液晶中。 脊或沟槽与像素区域中的光吸收材料的部分自对准。 第一电极和第二电极在其间提供电场,其中脊或沟槽为液晶提供预先控制以提供改进的宽视角,并且光吸收材料的部分吸收从脊部泄漏的光。 包括有源和无源显示器的其它实施例以及采用本发明的方法。
    • 6. 发明授权
    • Passive liquid crystal display having pre-tilt control structure and light absorbent material at a center
    • 无源液晶显示器,其中心具有预倾角控制结构和吸光材料
    • US06400440B1
    • 2002-06-04
    • US09339263
    • 1999-06-23
    • Evan G. ColganShui-Chih A. LienKai R. Schleupen
    • Evan G. ColganShui-Chih A. LienKai R. Schleupen
    • G02F11337
    • G02F1/133707G02F1/133512G02F1/133753
    • In accordance with the present invention, a passive liquid crystal display cell includes a first substrate having a light absorbent material patterned thereon. A first conductive material is formed in a position relative to the light absorbent material for forming one of a data line and a gate line. The position may be over the light absorbent material or below the light absorbent material (and may include transparent layers in between). A second conductive material is spaced apart from the first conductive material by a gap. The gap includes liquid crystal, and the second conductive material forms the other of the data line and the gate line. A pretilt control structure is formed adjacent to the liquid crystal. The gate line and the data line provide an electric field therebetween wherein the pretilt control structure provides pretilt for the liquid crystal to provide a wide viewing angle.
    • 根据本发明,无源液晶显示单元包括具有图案化的吸光材料的第一基板。 第一导电材料形成在相对于吸光材料的位置,用于形成数据线和栅极线之一。 该位置可以在吸光材料之上或光吸收材料之下(并且可以包括两者之间的透明层)。 第二导电材料通过间隙与第一导电材料间隔开。 间隙包括液晶,第二导电材料形成数据线和栅极线中的另一个。 与液晶相邻地形成预倾斜的控制结构。 栅极线和数据线在其间提供电场,其中预倾斜控制结构为液晶提供预倾斜以提供宽视角。