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    • 3. 发明授权
    • Structure and method for parallel testing of dies on a semiconductor wafer
    • 用于半导体晶片上的管芯并联测试的结构和方法
    • US07781890B2
    • 2010-08-24
    • US11614241
    • 2006-12-21
    • Ali PourkeramatiEungjoon Park
    • Ali PourkeramatiEungjoon Park
    • H01L23/48
    • G01R31/2884H01L22/32H01L2224/05554
    • In accordance with an embodiment of the present invention, a semiconductor wafer has a plurality of dies each having a circuit and a plurality of contact pads. The plurality of contact pads include a first contact pad to receive a power supply voltage, a second contact pad to receive a ground voltage, and a third contact pad to receive a test control signal. The third contact pad is connected to a programmable self-test engine (PSTE) embedded on the corresponding die so that the test control signal activates the PSTE to initiate a self-test. A probe card has a plurality of sets of probe pins, each set of probe pins having three probe pins for contacting the first, second, and third contact pads of one of a corresponding number of the plurality of dies. During wafer test, the plurality of sets of probe pins come in contact with a corresponding number of dies so that the self-test is carried out simultaneously in the corresponding number of dies.
    • 根据本发明的实施例,半导体晶片具有多个具有电路和多个接触焊盘的管芯。 多个接触焊盘包括用于接收电源电压的第一接触焊盘,用于接收接地电压的第二接触焊盘以及用于接收测试控制信号的第三接触焊盘。 第三接触垫连接到嵌入在相应管芯上的可编程自检引擎(PSTE),使得测试控制信号激活PSTE以启动自检。 探针卡具有多组探针,每组探针具有三个探针,用于接触相应数量的多个管芯之一的第一,第二和第三接触焊盘。 在晶片测试期间,多组探针与相应数量的模具接触,使得在相应数量的模具中同时进行自检。
    • 4. 发明授权
    • Flash memory architecture and method of operation
    • 闪存架构和操作方法
    • US06288938B1
    • 2001-09-11
    • US09433245
    • 1999-11-03
    • Eungjoon ParkAli Pourkeramati
    • Eungjoon ParkAli Pourkeramati
    • G11C1400
    • G11C16/0416H01L29/7886
    • A flash memory device and its method of operation provide for selective, e.g., bit-by-bit, erase operation resulting in much narrower distribution for erase threshold voltage VTE. Latches that couple to the array are set or reset depending on cell content during erase verify. The output of the latches are then applied to selected cells to perform erase. The flash architecture allows for bit-by-bit erase verify operation resulting in a tighter VTE distribution and elimination of the need for preprogramming. In a preferred embodiment, the flash cell is programmed by CHE tunneling and erased by FN tunneling both occurring on the same side (e.g., drain side) of the cell transistor.
    • 闪速存储器件及其操作方法提供了选择性的,例如逐位的擦除操作,导致擦除阈值电压VTE的分布更窄。 耦合到阵列的锁存器根据擦除验证期间的单元格内容设置或复位。 然后将锁存器的输出应用于选定的单元进行擦除。 闪存架构允许逐位擦除验证操作,导致更紧密的VTE分发和消除对预编程的需要。 在优选实施例中,闪存单元通过CHE隧道编程,并通过发生在单元晶体管的同一侧(例如,漏极侧)上的FN隧道擦除。
    • 5. 发明授权
    • Structure and method for parallel testing of dies on a semiconductor wafer
    • 用于半导体晶片上的管芯并联测试的结构和方法
    • US07173444B2
    • 2007-02-06
    • US10340558
    • 2003-01-09
    • Ali PourkeramatiEungjoon Park
    • Ali PourkeramatiEungjoon Park
    • G01R31/02G01R31/06
    • G01R31/2884H01L22/32H01L2224/05554
    • In accordance with an embodiment of the present invention, a semiconductor wafer has a plurality of dies each having a circuit and a plurality of contact pads. The plurality of contact pads include a first contact pad to receive a power supply voltage, a second contact pad to receive a ground voltage, and a third contact pad to receive a test control signal. The third contact pad is connected to a programmable self-test engine (PSTE) embedded on the corresponding die so that the test control signal activates the PSTE to initiate a self-test. A probe card has a plurality of sets of probe pins, each set of probe pins having three probe pins for contacting the first, second, and third contact pads of one of a corresponding number of the plurality of dies. During wafer test, the plurality of sets of probe pins come in contact with a corresponding number of dies so that the self-test is carried out simultaneously in the corresponding number of dies.
    • 根据本发明的实施例,半导体晶片具有多个具有电路和多个接触焊盘的管芯。 多个接触焊盘包括用于接收电源电压的第一接触焊盘,用于接收接地电压的第二接触焊盘和用于接收测试控制信号的第三接触焊盘。 第三接触垫连接到嵌入在相应管芯上的可编程自检引擎(PSTE),使得测试控制信号激活PSTE以启动自检。 探针卡具有多组探针,每组探针具有三个探针,用于接触相应数量的多个管芯之一的第一,第二和第三接触焊盘。 在晶片测试期间,多组探针与相应数量的模具接触,使得在相应数量的模具中同时进行自检。
    • 6. 发明授权
    • Structure and method for parallel testing of dies on a semiconductor wafer
    • 用于半导体晶片上的管芯并联测试的结构和方法
    • US07449350B2
    • 2008-11-11
    • US11614252
    • 2006-12-21
    • Ali PourkeramatiEungjoon Park
    • Ali PourkeramatiEungjoon Park
    • G01R31/26
    • G01R31/2884H01L22/32H01L2224/05554
    • In accordance with an embodiment of the present invention, a semiconductor wafer has a plurality of dies each having a circuit and a plurality of contact pads. The plurality of contact pads include a first contact pad to receive a power supply voltage, a second contact pad to receive a ground voltage, and a third contact pad to receive a test control signal. The third contact pad is connected to a programmable self-test engine (PSTE) embedded on the corresponding die so that the test control signal activates the PSTE to initiate a self-test. A probe card has a plurality of sets of probe pins, each set of probe pins having three probe pins for contacting the first, second, and third contact pads of one of a corresponding number of the plurality of dies. During wafer test, the plurality of sets of probe pins come in contact with a corresponding number of dies so that the self-test is carried out simultaneously in the corresponding number of dies.
    • 根据本发明的实施例,半导体晶片具有多个具有电路和多个接触焊盘的管芯。 多个接触焊盘包括用于接收电源电压的第一接触焊盘,用于接收接地电压的第二接触焊盘和用于接收测试控制信号的第三接触焊盘。 第三接触垫连接到嵌入在相应管芯上的可编程自检引擎(PSTE),使得测试控制信号激活PSTE以启动自检。 探针卡具有多组探针,每组探针具有三个探针,用于接触相应数量的多个管芯之一的第一,第二和第三接触焊盘。 在晶片测试期间,多组探针与相应数量的模具接触,使得在相应数量的模具中同时进行自检。
    • 7. 发明申请
    • Structure and Method for Parallel Testing of Dies on a Semiconductor Wafer
    • 半导体晶片上芯片并联测试的结构和方法
    • US20070102701A1
    • 2007-05-10
    • US11614241
    • 2006-12-21
    • Ali PourkeramatiEungjoon Park
    • Ali PourkeramatiEungjoon Park
    • H01L23/58
    • G01R31/2884H01L22/32H01L2224/05554
    • In accordance with an embodiment of the present invention, a semiconductor wafer has a plurality of dies each having a circuit and a plurality of contact pads. The plurality of contact pads include a first contact pad to receive a power supply voltage, a second contact pad to receive a ground voltage, and a third contact pad to receive a test control signal. The third contact pad is connected to a programmable self-test engine (PSTE) embedded on the corresponding die so that the test control signal activates the PSTE to initiate a self-test. A probe card has a plurality of sets of probe pins, each set of probe pins having three probe pins for contacting the first, second, and third contact pads of one of a corresponding number of the plurality of dies. During wafer test, the plurality of sets of probe pins come in contact with a corresponding number of dies so that the self-test is carried out simultaneously in the corresponding number of dies.
    • 根据本发明的实施例,半导体晶片具有多个具有电路和多个接触焊盘的管芯。 多个接触焊盘包括用于接收电源电压的第一接触焊盘,用于接收接地电压的第二接触焊盘以及用于接收测试控制信号的第三接触焊盘。 第三接触垫连接到嵌入在相应管芯上的可编程自检引擎(PSTE),使得测试控制信号激活PSTE以启动自检。 探针卡具有多组探针,每组探针具有三个探针,用于接触相应数量的多个管芯之一的第一,第二和第三接触焊盘。 在晶片测试期间,多组探针与相应数量的模具接触,使得在相应数量的模具中同时进行自检。
    • 8. 发明申请
    • STRUCTURE AND METHOD FOR PARALLEL TESTING OF DIES ON A SEMICONDUCTOR WAFER
    • 在半导体晶片上并行测试晶体的结构和方法
    • US20070099312A1
    • 2007-05-03
    • US11614252
    • 2006-12-21
    • Ali PourkeramatiEungjoon Park
    • Ali PourkeramatiEungjoon Park
    • H01L21/00
    • G01R31/2884H01L22/32H01L2224/05554
    • In accordance with an embodiment of the present invention, a semiconductor wafer has a plurality of dies each having a circuit and a plurality of contact pads. The plurality of contact pads include a first contact pad to receive a power supply voltage, a second contact pad to receive a ground voltage, and a third contact pad to receive a test control signal. The third contact pad is connected to a programmable self-test engine (PSTE) embedded on the corresponding die so that the test control signal activates the PSTE to initiate a self-test. A probe card has a plurality of sets of probe pins, each set of probe pins having three probe pins for contacting the first, second, and third contact pads of one of a corresponding number of the plurality of dies. During wafer test, the plurality of sets of probe pins come in contact with a corresponding number of dies so that the self-test is carried out simultaneously in the corresponding number of dies.
    • 根据本发明的实施例,半导体晶片具有多个具有电路和多个接触焊盘的管芯。 多个接触焊盘包括用于接收电源电压的第一接触焊盘,用于接收接地电压的第二接触焊盘和用于接收测试控制信号的第三接触焊盘。 第三接触垫连接到嵌入在相应管芯上的可编程自检引擎(PSTE),使得测试控制信号激活PSTE以启动自检。 探针卡具有多组探针,每组探针具有三个探针,用于接触相应数量的多个管芯之一的第一,第二和第三接触焊盘。 在晶片测试期间,多组探针与相应数量的模具接触,使得在相应数量的模具中同时进行自检。