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    • 4. 发明授权
    • Media isolated electrostatically actuated valve
    • 介质隔离静电阀
    • US07168675B2
    • 2007-01-30
    • US11018799
    • 2004-12-21
    • Eugen I. CabuzCleopatra CabuzTzu-Yu Wang
    • Eugen I. CabuzCleopatra CabuzTzu-Yu Wang
    • F16K7/04
    • F16K31/02
    • A valve structure having a top part, a flexible media conveyance, such as a tube, a diaphragm and a bottom part with a support for the tube. The top surface of the diaphragm and the bottom surface of the top part may have electrodes attached. When there is no electric potential applied across the electrodes, the diaphragm may rest on and close the passageway in the flexible tube for effectively preventing a fluid flow. When an electrical potential is applied to the electrodes, the diaphragm may be pulled up off from the tube thereby opening or partially opening the passageway in the tube for a media flow or pressure transfer. Partial opening may be for modulation purposes. There may be a tension mechanism attached to the diaphragm. A controller may apply an electrical potential to the electrodes for at least partially opening or closing the valve.
    • 具有顶部部分的柔性介质输送器,诸如管子,隔膜和具有用于管的支撑件的底部的阀结构。 隔膜的上表面和顶部的底表面可以具有连接的电极。 当电极上没有施加电位时,隔膜可以搁置在柔性管中并关闭柔性管中的通道,以有效地防止流体流动。 当向电极施加电势时,隔膜可以从管中拉出,从而打开或部分打开管中的通道用于介质流或压力传递。 部分打开可以用于调制目的。 可能存在连接到隔膜的张力机构。 控制器可以向电极施加电势以至少部分地打开或关闭阀。
    • 5. 发明授权
    • Dual diaphragm valve
    • 双隔膜阀
    • US06991213B2
    • 2006-01-31
    • US10915868
    • 2004-08-09
    • Tzu-Yu WangEugen I Cabuz
    • Tzu-Yu WangEugen I Cabuz
    • F16K31/02
    • G01L9/0072
    • A valve for regulating the flow of fluids (gas or liquid) using two flexible diaphragms in which an additional element is added to promote rolling contact between the diaphragms. The valve operates in a normally open configuration where fluid flows into the valve, passed through holes or openings in two electrostatically operative diaphragms and out of the valve. The holes or openings in one diaphragm are offset from the holes or openings in the other diaphragm, so that upon electro-static actuation, the diaphragms will seal together, closing the valve.
    • 用于使用两个柔性隔膜调节流体(气体或液体)的流量的阀,其中添加附加元件以促进膜片之间的滚动接触。 阀门处于常开状态,其中流体流入阀门,通过两个静电操作隔膜中的孔或开口,并从阀门出来。 一个隔膜中的孔或开口偏离另一个隔膜中的孔或开口,因此在静电致动时,隔膜将密封在一起,关闭阀门。
    • 6. 发明授权
    • Modified dual diaphragm pressure sensor
    • 改装双隔膜压力传感器
    • US06886410B1
    • 2005-05-03
    • US10748817
    • 2003-12-30
    • Tzu-Yu WangEugen I Cabuz
    • Tzu-Yu WangEugen I Cabuz
    • G01L7/08G01L9/00G01L9/12
    • G01L9/0072
    • A device for sensing pressure including a chamber defining part having a first diaphragm mounted in communication with the sealed chamber defining part, and a second diaphragm electrically insulated from the first, preferably by a spacer. The diaphragms are flexible and have a conductive surface. A sensor chamber is mounted on the other side of the second diaphragm. It has an opening in communication with a sensing atmosphere. One of the diaphragms includes openings it its surface to permit fluid to flow through the openings and the other diaphragm is solid and responds to change in pressure in the sensor chamber to move away from or toward the one diaphragm. Electrical connections measure the capacitance between the diaphragms as a function of the pressure in the sensor chamber.
    • 一种用于感测压力的装置,包括具有安装成与所述密封室限定部分连通的第一膜片的室限定部分,以及优选通过间隔件与所述第一膜片电绝缘的第二膜片。 隔膜是柔性的并且具有导电表面。 传感器室安装在第二隔膜的另一侧。 它与感测气氛有通信的开放。 其中一个隔膜包括其表面的开口,以允许流体流过开口,另一个隔膜是固体的,并且响应于传感器室中的压力变化以远离或朝向一个隔膜移动。 电气连接根据传感器室中的压力来测量隔膜之间的电容。
    • 10. 发明授权
    • Positive and negative pressure sensor
    • 正负压传感器
    • US06901807B1
    • 2005-06-07
    • US10915869
    • 2004-08-09
    • Tzu-Yu WangEugen I Cabuz
    • Tzu-Yu WangEugen I Cabuz
    • G01L7/08G01L9/00G01L9/12
    • G01L9/0072
    • A device for sensing pressure using two perforated rigid films in which a diaphragm is mounted between the first two films. The device senses positive and negative pressure through a port or opening to the region for which pressure data is desired. The device communicates capacitive pressure and changes in that pressure. The flexible diaphragm is spaced from the first and second films such that the flexible diaphragm is adapted to flex toward the first film when pressure increases in the opening and is adapted to flex toward the second film when pressure decreases in the opening to change the capacitance between the diaphragm and at least one of the first and second films. Spacers are used to position all three elements.
    • 用于使用两个穿孔刚性膜感测压力的装置,其中隔膜安装在前两个膜之间。 该装置通过端口感测到正压和负压,或者打开到期望压力数据的区域。 该装置传达电容压力和该压力的变化。 柔性隔膜与第一和第二膜间隔开,使得当压力在开口中增加时,柔性隔膜适于朝向第一膜弯曲,并且当开口中的压力降低以改变开口中的电容时适于朝向第二膜弯曲以改变第二膜之间的电容 隔膜和第一和第二膜中的至少一个。 所有三个元素都使用间隔器。