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    • 6. 发明授权
    • Method for electrolessly depositing a metal onto a substrate using
mediator ions
    • 使用介质离子将金属无电沉积到基底上的方法
    • US6042889A
    • 2000-03-28
    • US202536
    • 1994-02-28
    • Gerald Lee BallardJohn Gerard Gaudiello
    • Gerald Lee BallardJohn Gerard Gaudiello
    • H05K1/09C23C18/40C23C18/48H01L23/14H05K3/24B05D3/04
    • H05K3/244C23C18/40H05K3/24Y10S428/936Y10T428/12535Y10T428/12903
    • An electroless metal plating bath composition, a corresponding method for electrolessly depositing a metal onto a substrate surface, as well as the resulting, metallized substrate, are disclosed. The inventive bath composition includes water, a soluble source of the metal ions it is desired to chemically reduce at, and deposit onto, the substrate surface of interest, and a complexing agent for the metal ions. In addition, the bath composition includes a soluble source of any one or more of a select group of what are termed mediator ions, which group includes palladium (Pd), platinum (Pt), silver (Ag), ruthenium (Ru), iridium (Ir), osmium (Os) and rhodium (Rh) ions, as well as a complexing agent for the mediator ions. Moreover, the bath composition includes a chemical reducing agent, which primarily serves to chemically reduce the mediator ions at the substrate surface of interest. Significantly, by using an appropriate ratio of the concentration of the metal ions in solution to the concentration of the mediator ions in solution, and depending upon which mediator ions are used, the inventive bath composition serves to electrolessly deposit the metal of interest onto the substrate surface of interest, with the resulting deposited metal containing less than or equal to about 3.0 atomic percent, or less than or equal to about 2.0 atomic percent, or even less than or equal to about 1.0 atomic percent, of the corresponding mediator metal.
    • 公开了一种无电金属电镀浴组合物,用于将金属无电沉积到衬底表面上的相应方法,以及所得到的金属化衬底。 本发明的浴组合物包括水,需要化学还原并沉积到感兴趣的基底表面上的金属离子的可溶性源,以及用于金属离子的络合剂。 此外,浴组合物包括任何一种或多种所谓的介体离子的选择组的可溶性源,该组包括钯(Pd),铂(Pt),银(Ag),钌(Ru),铱 (Ir),锇(Os)和铑(Rh)离子,以及介体离子的络合剂。 此外,浴组合物包括化学还原剂,其主要用于化学还原感兴趣的基底表面处的介体离子。 重要的是,通过使用溶液中的金属离子的浓度与溶液中的介体离子的浓度的适当比例,并且取决于使用哪种介体离子,本发明的浴组合物用于将感兴趣的金属无电沉积到衬底上 所形成的沉积金属含有相应的介体金属的小于或等于约3.0原子百分比,或小于或等于约2.0原子百分比,或甚至小于或等于约1.0原子百分比。