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2. 发明授权

US5644140A Apparatus for checking semiconductor wafers with complementary light sources and two cameras 失效
标题翻译：用互补光源和两台相机检查半导体晶片的装置
公开(公告)号：US5644140A
公开(公告)日：1997-07-01
申请号：US425824
申请日：1995-04-20
申请人： Ernst Biedermann , Manfred Ben El Mekki , Kenneth Weisheit , Thomas Griebsch , Gerhard Ross
发明人： Ernst Biedermann , Manfred Ben El Mekki , Kenneth Weisheit , Thomas Griebsch , Gerhard Ross
IPC分类号： G01N21/88 , G01N21/94 , G01N21/956 , G01R31/311 , H01L21/66 , G01N21/86
CPC分类号： G01R31/311 , G01N21/8806 , G01N21/9501 , H01L22/12 , H01L2924/0002
摘要： One embodiment of an apparatus for checking semiconductor wafers includes a receiver for a semiconductor wafer to be checked. A light illuminates the wafer. A hemispherical hood has a surface and a hemispherical region defining an interior inside the hemispherical region. A further hood is disposed in the vicinity of the light. A camera is disposed at the hemispherical hood and has a lens looking into the interior inside the hemispherical hood. A evaluator is connected to the camera for controlling the camera and receiving, buffer-storing, processing and outputing data transmitted by the camera. Another embodiment includes a first light directly illuminates the wafer with light of a first color and a second light indirectly illuminates the wafer with light of a second color being complementary to the first color. A surface of the hood is of the second color. The further hood is opaque to incident light, permitting the wafer to be illuminated directly by the first light, and permitting the wafer to only be illuminated indirectly by the second light. A first camera has a filter admitting only light of the first color and a second camera has a filter admitting only light of the second color and being disposed at an angle greater than 0.degree. relative to a center point of the receiver for the semiconductor wafer to be checked.
摘要翻译：用于检查半导体晶片的装置的一个实施例包括用于要检查的半导体晶片的接收器。光照亮晶片。半球形罩具有限定半球形区域内部的内表面和半球形区域。在灯附近设置另外的罩。相机设置在半球形罩处，并且具有透镜，其位于半球形罩内。评估器连接到照相机，用于控制照相机和接收，缓冲存储，处理和输出照相机发送的数据。另一个实施例包括第一光直接用第一颜色的光照射晶片，而第二光利用与第一颜色互补的第二颜色的光间接照射晶片。罩的表面是第二种颜色。进一步的遮光罩对入射光是不透明的，允许晶片被第一光直接照射，并允许晶片仅被第二光间接照射。第一相机具有仅允许第一颜色的光的滤光器，并且第二相机具有仅允许第二颜色的光并且相对于用于半导体晶片的接收器的中心点以大于0°的角度设置的滤光器被检查。

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