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    • 5. 发明授权
    • Method of evaluating signal conditions in a probe measurement network
having a plurality of separate measurement channels
    • 评估具有多个单独测量通道的探针测量网络中的信号条件的方法
    • US5659255A
    • 1997-08-19
    • US669097
    • 1996-06-26
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • G01R31/26G01R1/00G01R1/067G01R1/073G01R31/02G01R31/28G01R35/00H01L21/66
    • B82Y15/00G01R1/06705G01R1/073G01R31/2886G01R35/00G01R35/005G01R1/06772
    • A method of evaluating the signal conditions in a probe measurement network of the type having a plurality of separate measurement channels, where each channel communicates through a corresponding device-probing end. The method includes providing an assembly which includes a conductive planar probing area on the upper face of a base and a reference junction connected to the probing area by a high-frequency transmission structure. The method further includes placing the respective device-probing end of a first one of the measurement channels into contact with the planar probing area, transmitting a high-frequency signal through both the measurement channel and the reference junction and, thereafter, measuring the signal. This step is repeated for the other measurement channels and the signal conditions in the different channels are then evaluated by comparing the measured signals, where such evaluation is facilitated by maintaining, via the high-frequency transmission structure, a transmission line of substantially constant high-frequency transmission characteristic between each device-probing end coming into contact with the planar probing area and the reference junction.
    • 一种评估具有多个单独测量通道的探针测量网络中的信号状况的方法,其中每个通道通过相应的设备探测端进行通信。 该方法包括提供一种组件,其包括在基座的上表面上的导电平面探测区域和通过高频传输结构连接到探测区域的参考点。 该方法还包括将测量通道中的第一个测量通道的相应设备探测端与平面探测区域接触,通过测量通道和参考接点两者传输高频信号,然后测量信号。 对其他测量通道重复该步骤,然后通过比较测量信号来评估不同通道中的信号条件,其中通过经由高频传输结构维持基本上恒定的高频传输线的传输线, 每个设备探测端与平面探测区域和参考接点接触之间的频率传输特性。
    • 8. 发明授权
    • Interconnect assembly for use in evaluating probing networks
    • 用于评估探测网络的互连组件
    • US06803779B2
    • 2004-10-12
    • US10459259
    • 2003-06-11
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • G01R3102
    • B82Y15/00G01R1/06705G01R1/06772G01R1/073G01R31/2886G01R35/00G01R35/005
    • An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween despite, for example, variable positioning of the device-probing ends of the network on the probing areas. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area. Because the transmission structure uniformly transfers signals, the relative condition of the signals as they enter or leave each end will substantially match the condition of the signals as measured or presented by the reference unit, thereby enabling calibration of the network in reference to the device-probing ends. The assembly is particularly well-adapted for the evaluation of probe measurement networks of the type used for testing planar microelectronic devices.
    • 用于评估探针测量网络的互连组件包括基底,在基底的上表面上以相互共面的关系的相应的内部和外部探测区域,参考结点和连接探测区域和参考结点的高频传输结构 使得高频信号可以均匀地传输,尽管例如可以在探测区域上对网络的设备探测端进行可变定位。 用于评估网络的信号通道的优选方法包括将参考单元连接到参考点,并且将与感兴趣的信号通道相对应的每个设备探测端连续定位在内部探测区域上。 由于传输结构均匀地传送信号,因此信号在进入或离开每一端时的相对状况将基本上与由参考单元测量或呈现的信号的条件相匹配,从而可以参考设备 - 探测结束。 该组件特别适用于评估用于测试平面微电子器件的探针测量网络。
    • 9. 发明授权
    • Reference transmission line junction for probing device
    • 用于探测装置的参考传输线路结
    • US06608496B1
    • 2003-08-19
    • US09611806
    • 2000-07-07
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • G01R3102
    • B82Y15/00G01R1/06705G01R1/06772G01R1/073G01R31/2886G01R35/00G01R35/005
    • An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween despite, for example, variable positioning of the device-probing ends of the network on the probing areas. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area. Because the transmission structure uniformly transfers signals, the relative condition of the signals as they enter or leave each end will substantially match the condition of the signals as measured or presented by the reference unit, thereby enabling calibration of the network in reference to the device-probing ends. The assembly is particularly well-adapted for the evaluation of probe measurement networks of the type used for testing planar microelectronic devices.
    • 用于评估探针测量网络的互连组件包括基底,在基底的上表面上以相互共面的关系的相应的内部和外部探测区域,参考结点和连接探测区域和参考结点的高频传输结构 使得高频信号可以均匀地传输,尽管例如可以在探测区域上对网络的设备探测端进行可变定位。 用于评估网络的信号通道的优选方法包括将参考单元连接到参考点,并且将与感兴趣的信号通道相对应的每个设备探测端连续定位在内部探测区域上。 由于传输结构均匀地传送信号,因此信号在进入或离开每一端时的相对状况将基本上与由参考单元测量或呈现的信号的条件相匹配,从而可以参考设备 - 探测结束。 该组件特别适用于评估用于测试平面微电子器件的类型的探针测量网络。
    • 10. 发明授权
    • System for evaluating probing networks
    • 系统评估探测网络
    • US5973505A
    • 1999-10-26
    • US175062
    • 1998-10-19
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • Eric W. StridJerry B. SchappacherDale E. CarltonK. Reed Gleason
    • G01R31/26G01R1/00G01R1/067G01R1/073G01R31/02G01R31/28G01R35/00H01L21/66
    • B82Y15/00G01R1/06705G01R1/073G01R31/2886G01R35/00G01R35/005G01R1/06772
    • An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred there-between despite, for example, variable positioning of the device-probing ends of the network on the probing areas. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area. Because the transmission structure uniformly transfers signals, the relative condition of the signals as they enter or leave each end will substantially match the condition of the signals as measured or presented by the reference unit, thereby enabling calibration of the network in reference to the device-probing ends. The assembly is particularly well-adapted for the evaluation of probe measurement networks of the type used for testing planar microelectronic devices.
    • 用于评估探针测量网络的互连组件包括基座,在基座的上表面上以相互共面关系的相应的内部和外部探测区域,参考点和连接探测区域和参考结点的高频传输结构 使得尽管例如在探测区域上网络的设备探测端的可变定位,但是高频信号可以均匀地传送到其中。 用于评估网络的信号通道的优选方法包括将参考单元连接到参考点,并且将与感兴趣的信号通道相对应的每个设备探测端连续定位在内部探测区域上。 由于传输结构均匀地传送信号,因此信号在进入或离开每一端时的相对状况将基本上与由参考单元测量或呈现的信号的条件相匹配,从而可以参考设备 - 探测结束。 该组件特别适用于评估用于测试平面微电子器件的类型的探针测量网络。