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1. 发明授权

US06834549B2 Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array 失效
公开(公告)号：US06834549B2
公开(公告)日：2004-12-28
申请号：US10407902
申请日：2003-04-03
申请人： Emily Yixie Shu , Goutam Paul
发明人： Emily Yixie Shu , Goutam Paul
IPC分类号： G01D716
CPC分类号： G03F1/62 , G01L1/22 , G01L5/00 , G03F1/64 , G03F1/82 , G03F7/70591 , G03F7/70983
摘要： A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.

2. 发明授权

US07515045B2 Wireless micro-electromechanical (MEMS) apparatus and method for real time characterization of motion parameters 有权
标题翻译：无线微机电（MEMS）装置和方法用于实时表征运动参数
公开(公告)号：US07515045B2
公开(公告)日：2009-04-07
申请号：US11238241
申请日：2005-09-29
申请人： Goutam Paul , Madhav Rangaswami , Devadas D. Pillai , Bimal Dey , Ralph M. Kling
发明人： Goutam Paul , Madhav Rangaswami , Devadas D. Pillai , Bimal Dey , Ralph M. Kling
IPC分类号： G08B1/08
CPC分类号： G08B13/10
摘要： A sensor package comprising a micro-electromechanical (MEMS) motion sensor, an analog-to-digital converter coupled to the MEMS motion sensor, and a wireless transceiver coupled to the analog-to-digital converter, wherein the sensor package can wirelessly communicate with one or more wireless receivers and, if present, with one or more other sensor packages. A process comprising attaching one or more sensor packages to one or more vehicles or devices (mobile or stationary), each sensor package comprising a micro-electromechanical (MEMS) motion sensor, an analog-to-digital converter coupled to the MEMS motion sensor, and a wireless transceiver coupled to the MEMS motion sensor; sensing the motion of the one or more vehicles or devices to which each sensor package is attached; and transmitting motion data from the sensor package to a wireless receiver or to another sensor package.
摘要翻译：包括微机电（MEMS）运动传感器，耦合到MEMS运动传感器的模数转换器和耦合到模数转换器的无线收发器的传感器封装，其中传感器封装可以与一个或多个无线接收器以及如果存在的话，还具有一个或多个其它传感器封装。一种方法，包括将一个或多个传感器封装附接到一个或多个车辆或设备（移动或固定），每个传感器封装包括微机电（MEMS）运动传感器，耦合到MEMS运动传感器的模数转换器，以及耦合到所述MEMS运动传感器的无线收发器; 检测每个传感器封装所附着的一个或多个车辆或装置的运动; 以及将传感器封装中的运动数据传送到无线接收器或另一传感器封装。

3. 发明申请

US20060219016A1 Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA) 失效
公开(公告)号：US20060219016A1
公开(公告)日：2006-10-05
申请号：US11097059
申请日：2005-03-31
申请人： Li-Peng Wang , Qing Ma , Valluri Rao , Goutam Paul
发明人： Li-Peng Wang , Qing Ma , Valluri Rao , Goutam Paul
IPC分类号： G01P15/02
CPC分类号： G01H1/00
摘要： An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.

4. 发明授权

US07559242B2 Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA) 失效
标题翻译：硅微加工超灵敏振动光谱传感器阵列（VSSA）
公开(公告)号：US07559242B2
公开(公告)日：2009-07-14
申请号：US11097059
申请日：2005-03-31
申请人： Li-Peng Wang , Qing Ma , Valluri Rao , Goutam Paul
发明人： Li-Peng Wang , Qing Ma , Valluri Rao , Goutam Paul
IPC分类号： G01D21/00
CPC分类号： G01H1/00
摘要： An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.
摘要翻译：一种包括衬底和形成在衬底上的振动传感器阵列的装置，该阵列包括两个或更多个振动传感器，其中阵列中的每个振动传感器具有与任何其它振动传感器不同的本底噪声和不同的工作频率范围在阵列中。一种方法，包括在衬底上形成振动传感器阵列，所述阵列包括两个或更多个振动传感器，其中所述阵列中的所述两个或更多个振动传感器中的每一个具有不同于其他噪声的基底和不同的工作频率范围阵列中的振动传感器。公开和要求保护其他实施例。

5. 发明申请

US20070069892A1 Wireless micro-electromechanical (MEMS) apparatus and method for real time characterization of motion parameters 有权
标题翻译：无线微机电（MEMS）装置和方法用于实时表征运动参数
公开(公告)号：US20070069892A1
公开(公告)日：2007-03-29
申请号：US11238241
申请日：2005-09-29
申请人： Goutam Paul , Madhav Rangaswami , Devadas Pillai , Bimal Dey , Ralph Kling
发明人： Goutam Paul , Madhav Rangaswami , Devadas Pillai , Bimal Dey , Ralph Kling
IPC分类号： G08B1/08
CPC分类号： G08B13/10
摘要： A sensor package comprising a micro-electromechanical (MEMS) motion sensor, an analog-to-digital converter coupled to the MEMS motion sensor, and a wireless transceiver coupled to the analog-to-digital converter, wherein the sensor package can wirelessly communicate with one or more wireless receivers and, if present, with one or more other sensor packages. A process comprising attaching one or more sensor packages to one or more vehicles or devices (mobile or stationary), each sensor package comprising a micro-electromechanical (MEMS) motion sensor, an analog-to-digital converter coupled to the MEMS motion sensor, and a wireless transceiver coupled to the MEMS motion sensor; sensing the motion of the one or more vehicles or devices to which each sensor package is attached; and transmitting motion data from the sensor package to a wireless receiver or to another sensor package.
摘要翻译：包括微机电（MEMS）运动传感器，耦合到MEMS运动传感器的模数转换器和耦合到模数转换器的无线收发器的传感器封装，其中传感器封装可以与一个或多个无线接收器以及如果存在的话，还具有一个或多个其它传感器封装。一种方法，包括将一个或多个传感器封装附接到一个或多个车辆或设备（移动或固定），每个传感器封装包括微机电（MEMS）运动传感器，耦合到MEMS运动传感器的模数转换器，以及耦合到所述MEMS运动传感器的无线收发器; 检测每个传感器封装所附着的一个或多个车辆或装置的运动; 以及将传感器封装中的运动数据传送到无线接收器或另一传感器封装。

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