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1. 发明授权

US07842935B2 Raster frame beam system for electron beam lithography 失效
标题翻译：光栅光栅系统
公开(公告)号：US07842935B2
公开(公告)日：2010-11-30
申请号：US11458043
申请日：2006-07-17
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： H01J37/00
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译：用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束同时将多个像素写入衬底。

2. 发明申请

US20050274911A1 Raster frame beam system for electron beam lithography 有权
标题翻译：光栅光栅系统
公开(公告)号：US20050274911A1
公开(公告)日：2005-12-15
申请号：US10661719
申请日：2003-09-11
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： G03F7/20 , H01J37/08
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译：用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束同时将多个像素写入衬底。

3. 发明申请

US20060055911A1 High resolution printer and a method for high resolution printing 失效
标题翻译：高分辨率打印机和高分辨率打印方法
公开(公告)号：US20060055911A1
公开(公告)日：2006-03-16
申请号：US10940347
申请日：2004-09-13
申请人： Ehud Tirosh , Gilad Almogy , Meir Aloni , Doron Meshulach
发明人： Ehud Tirosh , Gilad Almogy , Meir Aloni , Doron Meshulach
IPC分类号： G03B27/32 , G03F7/20
CPC分类号： G03F7/70291 , G03F7/70408
摘要： The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method includes: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; whereas at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image. The invention provides a system that includes: (i) means for determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; whereas at least one intermediate scheme comprises directing at least one interference pattern towards at least one location corresponding to at least one group of highly dense shapes; (ii) a programmable optical radiation source for generating an array of light entities in response to an intermediate scheme; (iii) optics for directing the array of light entities towards the object to form the intermediate image; and (iv) a translator for moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.
摘要翻译：本发明提供了一种用于打印包括至少一组高密度形状的图像的方法和打印机，所述方法包括：（i）确定多个中间方案，以允许在对象上打印相应的中间图像; 而至少一个中间方案包括将至少一个干涉图案引向至少一个对应于至少一组高度致密形状的位置; （ii）响应于中间方案产生光实体阵列; （iii）将光实体阵列引向物体以形成中间图像; 以及（iv）相对于光实体移动对象，同时重复生成并指示以图像曝光对象的步骤。本发明提供了一种系统，其包括：（i）用于确定多个中间方案的装置，例如允许在对象上打印对应的中间图像; 而至少一个中间方案包括将至少一个干涉图案引导至对应于至少一组高密度形状的至少一个位置; （ii）可编程光辐射源，用于响应于中间方案产生光实体阵列; （iii）用于将光实体阵列引向物体以形成中间图像的光学器件; 以及（iv）用于相对于光实体移动物体的翻译器，同时重复生成并指示以图像曝光对象的步骤。

4. 发明申请

US20060243922A1 Raster Frame Beam System For Electron Beam Lithography 有权
公开(公告)号：US20060243922A1
公开(公告)日：2006-11-02
申请号：US11458052
申请日：2006-07-17
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： G21K5/10
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

5. 发明授权

US07846649B2 High resolution printer and a method for high resolution printing 失效
标题翻译：高分辨率打印机和高分辨率打印方法
公开(公告)号：US07846649B2
公开(公告)日：2010-12-07
申请号：US10940347
申请日：2004-09-13
申请人： Ehud Tirosh , Gilad Almogy , Meir Aloni , Doron Meshulach
发明人： Ehud Tirosh , Gilad Almogy , Meir Aloni , Doron Meshulach
IPC分类号： G03C5/04
CPC分类号： G03F7/70291 , G03F7/70408
摘要： The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method including: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.The invention provides a system that includes: (i) means for determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern towards at least one location corresponding to at least one group of highly dense shapes; (ii) a programmable optical radiation source for generating an array of light entities in response to an intermediate scheme; (iii) optics for directing the array of light entities towards the object to form the intermediate image; and (iv) a translator for moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.
摘要翻译：本发明提供了一种用于打印包括至少一组高密度形状的图像的方法和打印机，所述方法包括：（i）确定多个中间方案，以允许在对象上打印相应的中间图像; 其中至少一个中间方案包括将至少一个干涉图案引导至对应于至少一组高密度形状的至少一个位置; （ii）响应于中间方案产生光实体阵列; （iii）将光实体阵列引向物体以形成中间图像; 以及（iv）相对于光实体移动对象，同时重复生成并指示以图像曝光对象的步骤。本发明提供了一种系统，其包括：（i）用于确定多个中间方案的装置，例如允许在对象上打印对应的中间图像; 其中至少一个中间方案包括将至少一个干涉图案引导到对应于至少一组高度致密形状的至少一个位置; （ii）可编程光辐射源，用于响应于中间方案产生光实体阵列; （iii）用于将光实体阵列引向物体以形成中间图像的光学器件; 以及（iv）用于相对于光实体移动物体的翻译器，同时重复生成并指示以图像曝光对象的步骤。

6. 发明授权

US07521700B2 Raster frame beam system for electron beam lithography 有权
标题翻译：光栅光栅系统
公开(公告)号：US07521700B2
公开(公告)日：2009-04-21
申请号：US11458052
申请日：2006-07-17
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： H01J37/304 , G03F7/213
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译：用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束同时将多个像素写入衬底。

7. 发明申请

US20060243918A1 Raster Frame Beam System For Electron Beam Lithography 失效
标题翻译：光栅光栅系统
公开(公告)号：US20060243918A1
公开(公告)日：2006-11-02
申请号：US11458043
申请日：2006-07-17
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatan Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： A61N5/00
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译：用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束同时将多个像素写入衬底。

8. 发明授权

US07098468B2 Raster frame beam system for electron beam lithography 有权
公开(公告)号：US07098468B2
公开(公告)日：2006-08-29
申请号：US10661719
申请日：2003-09-11
申请人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
发明人： Meir Aloni , Mula Friedman , Jimmy Vishnipolsky , Gilad Almogy , Alon Litman , Yonatah Lehman , Doron Meshulach , Ehud Tirosh
IPC分类号： G21K5/10 , H01J37/08 , A61N5/00 , G21G5/00
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.

9. 发明申请

US20080186556A1 AUTOMATIC OPTICAL INSPECTION USING MULTIPLE OBJECTIVES 有权
标题翻译：自动光学检测使用多个目标
公开(公告)号：US20080186556A1
公开(公告)日：2008-08-07
申请号：US12099709
申请日：2008-04-08
申请人： Gilad Almogy , Bryan C. Bolt , Oded Arnon , Boaz Kenan , Ehud Tirosh , Michael Corliss
发明人： Gilad Almogy , Bryan C. Bolt , Oded Arnon , Boaz Kenan , Ehud Tirosh , Michael Corliss
IPC分类号： G02B26/08
CPC分类号： G01N21/8903
摘要： Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.
摘要翻译：提供了利用每个摄像机具有多个目标的图像扫描模块的自动光学检测（AOI）的装置和技术。扫描机构包括光学部件，以顺序地将来自多个目标中的每一个的光学信号转向对应的相机。

10. 发明申请

US20060170910A1 Automatic optical inspection using multiple objectives 有权
公开(公告)号：US20060170910A1
公开(公告)日：2006-08-03
申请号：US11047435
申请日：2005-01-31
申请人： Gilad Almogy , Bryan Bolt , Oded Arnon , Boaz Kenan , Ehud Tirosh , Michael Corliss
发明人： Gilad Almogy , Bryan Bolt , Oded Arnon , Boaz Kenan , Ehud Tirosh , Michael Corliss
IPC分类号： G01N21/00
CPC分类号： G01N21/8903
摘要： Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.

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