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    • 3. 发明授权
    • Burnishing head with fly height control spacer
    • 抛光头与飞行高度控制间隔
    • US06296552B1
    • 2001-10-02
    • US09493290
    • 2000-01-28
    • Zine-Eddine BoutaghouMark James SchaenzerWilliam Omar LinersJoel William HoehnAndreas Argyros Polycarpou
    • Zine-Eddine BoutaghouMark James SchaenzerWilliam Omar LinersJoel William HoehnAndreas Argyros Polycarpou
    • B24B100
    • B24D13/14B24B39/06G11B5/8404Y10S977/863Y10S977/881Y10S977/89
    • A burnishing head configured to provide extremely close control of the burnishing height, to minimize stiction between the burnishing head and a disc being burnished, and to optimize the tribological relationship between the burnishing head and a disc being burnished. The burnishing head includes one or more spacer pads, associated with selected ones of the burnishing pads on the burnishing head, which remain in contact with the surface of a disc being burnished. The height from the contact surface of the spacer pad to the contact surface of the burnishing pad determines the effective burnishing height. The burnishing head also includes moats, or recessed areas, surrounding the burnishing pads to minimize the stiction caused by generation of a liquid meniscus between the disc and contacting elements of the burnishing head, and which act as collection points for particulates generated by the burnishing process. The spacer pads preferably include microtextured contact surfaces to minimize stiction and wear and further include a diamond-like carbon coating to further improve wear characteristics.
    • 抛光头被配置为提供对抛光高度的非常接近的控制,以最小化抛光头和被抛光的光盘之间的粘性,并且优化抛光头和被抛光的光盘之间的摩擦学关系。 抛光头包括与抛光头上的抛光垫中选定的抛光垫相关联的一个或多个间隔垫,其与被抛光的盘的表面保持接触。 从间隔垫的接触表面到抛光垫的接触表面的高度决定了有效的抛光高度。 抛光头还包括围绕抛光垫的护城河或凹陷区域,以最小化在盘和抛光头的接触元件之间产生液体弯液面引起的粘性,并且其用作由抛光过程产生的颗粒的收集点 。 间隔垫优选地包括微结构的接触表面以最小化粘结和磨损,并且还包括类金刚石碳涂层以进一步改善磨损特性。