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1. 发明授权

US07876417B2 Lithographic systems and methods with extended depth of focus 有权
标题翻译：光刻系统和方法具有更深的焦点深度
公开(公告)号：US07876417B2
公开(公告)日：2011-01-25
申请号：US11490593
申请日：2006-07-21
申请人： Edward Raymond Dowski, Jr. , Gregory E. Johnson , Kenneth S. Kubala , Wade Thomas Cathey, Jr.
发明人： Edward Raymond Dowski, Jr. , Gregory E. Johnson , Kenneth S. Kubala , Wade Thomas Cathey, Jr.
IPC分类号： G03B27/00
CPC分类号： G03F7/705 , G02B27/0025 , G03F1/36 , G03F7/70125 , G03F7/70308
摘要： An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.
摘要翻译：具有扩展焦点深度的光学光刻系统将光致抗蚀剂涂层暴露在晶片上，并且包括具有瞳孔平面功能的照明子系统，掩模版和成像透镜，以形成靠近该光刻胶的掩模版的空间图像光刻胶。瞳孔平面功能提供了扩展的焦点深度，使得可以以松弛的容忍度，降低的成本和/或增加的生产量来制造或使用该系统。即使在存在失焦或未对准的情况下，该系统也可用于在集成电路内形成精确的通孔。

2. 发明授权

US07088419B2 Lithographic systems and methods with extended depth of focus 有权
标题翻译：光刻系统和方法具有更深的焦点深度
公开(公告)号：US07088419B2
公开(公告)日：2006-08-08
申请号：US10858337
申请日：2004-06-01
申请人： Edward Raymond Dowski, Jr. , Gregory E. Johnson , Kenneth S. Kubala , Wade Thomas Cathey, Jr.
发明人： Edward Raymond Dowski, Jr. , Gregory E. Johnson , Kenneth S. Kubala , Wade Thomas Cathey, Jr.
IPC分类号： G03B27/00
CPC分类号： G03F7/705 , G02B27/0025 , G03F1/36 , G03F7/70125 , G03F7/70308
摘要： An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.
摘要翻译：具有扩展焦点深度的光学光刻系统将光致抗蚀剂涂层暴露在晶片上，并且包括具有瞳孔平面功能的照明子系统，掩模版和成像透镜，以形成靠近该光刻胶的掩模版的空间图像光刻胶。瞳孔平面功能提供了扩展的焦点深度，使得可以以松弛的容忍度，降低的成本和/或增加的生产量来制造或使用该系统。即使在存在失焦或未对准的情况下，该系统也可用于在集成电路内形成精确的通孔。

3. 发明授权

US07436595B2 Extended depth of field optical systems 有权
标题翻译：扩展的景深光学系统
公开(公告)号：US07436595B2
公开(公告)日：2008-10-14
申请号：US10758740
申请日：2004-01-16
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G02B5/18 , G06K9/40
CPC分类号： G02B21/14 , G01S3/7835 , G01S11/12 , G02B5/00 , G02B7/365 , G02B7/40 , G02B27/0025 , G02B27/46 , G02B27/52
摘要： A system for increasing the depth of field and decreasing the wavelength sensitivity and the effects of misfocus-producing aberrations of the lens of an incoherent optical system incorporates a special purpose optical mask into the incoherent system. The optical mask has been designed to cause the optical transfer function to remain essentially constant within some range from the in-focus position. Signal processing of the resulting intermediate image undoes the optical transfer modifying effects of the mask, resulting in an in-focus image over an increased depth of field. Generally the mask is placed at a principal plane or the image of a principal plane of the optical system. Preferably, the mask modifies only phase and not amplitude of light. The mask may be used to increase the useful range of passive ranging systems.
摘要翻译：用于增加景深和降低波长灵敏度的系统以及非相干光学系统的透镜产生失焦产生像差的效果将专用光学掩模并入到非相干系统中。光掩模被设计成使得光学传递函数在从对焦位置的一定范围内基本保持恒定。所得到的中间图像的信号处理消除了掩模的光学传递修改效果，导致在增加的景深上的对焦图像。通常，掩模被放置在主平面或光学系统的主平面的图像上。优选地，掩模仅修改相位而不是光的振幅。掩模可用于增加被动测距系统的有用范围。

4. 发明授权

US07031054B2 Methods and systems for reducing depth of field of hybrid imaging systems 有权
标题翻译：混合成像系统景深降低的方法和系统
公开(公告)号：US07031054B2
公开(公告)日：2006-04-18
申请号：US10682014
申请日：2003-10-09
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr. , Sherif S. Sherif
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr. , Sherif S. Sherif
IPC分类号： G02B21/36 , G02B23/00
CPC分类号： G02B27/0025 , G02B27/50
摘要： An imaging system for imaging an object onto an image plane. An optical arrangement forms an intermediate image of the object at an intermediate plane with a first value of axial resolution. The imaging system also includes a digital processor configured to process the intermediate image to form a final image of the object. The imaging system further includes a specially designed optical element that cooperates with the optical arrangement and the digital processor to define a second value of axial resolution that is greater than the first value.
摘要翻译：一种用于将物体成像到图像平面上的成像系统。光学布置在具有轴向分辨率的第一值的中间平面处形成物体的中间图像。成像系统还包括被配置为处理中间图像以形成对象的最终图像的数字处理器。成像系统还包括与光学装置和数字处理器配合的特殊设计的光学元件，以定义大于第一值的轴向分辨率的第二值。

5. 发明授权

US08004762B2 Extended depth of field optical systems 有权
标题翻译：扩展的景深光学系统
公开(公告)号：US08004762B2
公开(公告)日：2011-08-23
申请号：US12250343
申请日：2008-10-13
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G02B5/18 , G06K9/40
CPC分类号： G02B21/14 , G01S3/7835 , G01S11/12 , G02B5/00 , G02B7/365 , G02B7/40 , G02B27/0025 , G02B27/46 , G02B27/52
摘要： Systems and methods for generating an optical image include forming an optical image with at least one optical element of an optical imager while modifying wavefront phase. Modifying the phase does not reduce an optical bandpass limited by an aperture of the optical imager. The systems and methods also include detecting the optical image over a range of spatial frequencies such that there are no zeros in an optical transfer function of the optical imager over detected spatial frequencies within the optical bandpass and over an extended depth of focus that is larger than a depth of focus occurring without modifying wavefront phase.
摘要翻译：用于产生光学图像的系统和方法包括在修改波前相位的同时用光学成像器的至少一个光学元件形成光学图像。修改相位不会减少由光学成像器的孔径限制的光学带通。这些系统和方法还包括在空间频率范围内检测光学图像，使得光学成像器的光学传递函数中的零不会超过光学带通内的检测到的空间频率，并且在扩展的焦深范围内，大于发生深度焦点而不修改波前相位。

6. 发明授权

US5870179A Apparatus and method for estimating range 失效
标题翻译：用于估计范围的装置和方法
公开(公告)号：US5870179A
公开(公告)日：1999-02-09
申请号：US473372
申请日：1995-06-07
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G01C3/08 , G02B7/36 , G02B27/00 , G02B7/04 , G04C21/00 , H04N7/18
CPC分类号： G02B27/0025 , G01C3/08 , G02B7/36
摘要： Range or distance to points is estimated within a scene, while simultaneously imaging the scene. The range to various points within the scene is estimated by imaging at least a first color of light from the scene through an optical mask and a lens onto a CCD, and then digitally processing the first color light intensity values stored in the CCD. At least a second color of light passes through the mask essentially unchanged and is separated from the first color of light before reaching the CCD and used for imaging the scene. The optical mask is designed such that the optical system transformation matrix for the first color of light is rank deficient for a particular set of object ranges. In this way, linear functions can be found to annihilate given sampled image data at a plurality of ranges, independent of the intensity of the light received from the object. A statistical detector is used to determine the closest associated range to the actual range of the point within the scene.
摘要翻译：在场景中估计范围或距离，同时对场景进行成像。通过将来自场景的光的至少第一颜色通过光学掩模和透镜成像到CCD上，然后对存储在CCD中的第一颜色光强值进行数字处理，来估计场景内的各个点的范围。至少第二种颜色的光基本上不变地通过掩模，并且在到达CCD之前与第一颜色的光分离并用于对场景进行成像。光掩模被设计成使得用于第一颜色的光的光学系统变换矩阵对于特定的一组对象范围是等级不足的。以这种方式，可以发现线性函数以与从对象接收的光的强度无关的多个范围湮灭给定的采样图像数据。统计检测器用于确定与场景内的点的实际范围最接近的关联范围。

7. 发明授权

US5748371A Extended depth of field optical systems 失效
标题翻译：扩展的景深光学系统
公开(公告)号：US5748371A
公开(公告)日：1998-05-05
申请号：US823894
申请日：1997-03-17
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G03B11/00 , G01S3/783 , G02B13/00 , G02B27/00 , G02B27/46 , G02B5/18
CPC分类号： G02B27/0075 , G01S3/7835 , G02B27/0025 , G02B27/46
摘要： A system for increasing the depth of field and decreasing the wavelength sensitivity and the effects of misfocus-producing aberrations of the lens of an incoherent optical system incorporates a special purpose optical mask into the incoherent system. The optical mask has been designed to cause the optical transfer function to remain essentially constant within some range from the in-focus position. Signal processing of the resulting intermediate image undoes the optical transfer modifying effects of the mask, resulting in an in-focus image over an increased depth of field. Generally the mask is placed at a principal plane or the image of a principal plane of the optical system. Preferably, the mask modifies only phase and not amplitude of light. The mask may be used to increase the useful range of passive ranging systems.
摘要翻译：用于增加景深和降低波长灵敏度的系统以及非相干光学系统的透镜产生失焦产生像差的效果将专用光学掩模并入到非相干系统中。光掩模被设计成使得光学传递函数在从对焦位置的一定范围内基本保持恒定。所得到的中间图像的信号处理消除了掩模的光学传递修改效果，导致在增加的景深上的对焦图像。通常，掩模被放置在主平面或光学系统的主平面的图像上。优选地，掩模仅修改相位而不是光的振幅。掩模可用于增加被动测距系统的有用范围。

8. 发明授权

US07218448B1 Extended depth of field optical systems 失效
标题翻译：扩展的景深光学系统
公开(公告)号：US07218448B1
公开(公告)日：2007-05-15
申请号：US09070969
申请日：1998-05-01
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G02B5/18 , G06K9/40
CPC分类号： G02B21/14 , G01S3/7835 , G01S11/12 , G02B5/00 , G02B7/365 , G02B7/40 , G02B27/0025 , G02B27/46 , G02B27/52
摘要： A system for increasing the depth of field and decreasing the wavelength sensitivity of an incoherent optical system incorporates a special purpose optical mask into the incoherent system. The optical mask has been designed to cause the optical transfer function to remain essentially constant within some range from the in-focus position. Signal processing of the resulting intermediate image undoes the optical transfer modifying effects of the mask, resulting in an in-focus image over an increased depth of field. Generally the mask is placed at or near an aperture stop or image of the aperture stop of the optical system. Preferably, the mask modifies only phase and not amplitude of light, though amplitude may be changed by associated filters or the like. The mask may be used to increase the useful range of passive ranging systems.
摘要翻译：用于增加非相干光学系统的景深和降低波长灵敏度的系统将专用光学掩模结合到非相干系统中。光掩模被设计成使得光学传递函数在从对焦位置的一定范围内基本保持恒定。所得到的中间图像的信号处理消除了掩模的光学传递修改效果，导致在增加的景深上的对焦图像。通常，掩模放置在光学系统的孔径光阑的孔径光阑或图像附近。优选地，掩模仅修改相位而不是振幅，尽管幅度可以由相关联的滤波器等改变。掩模可用于增加被动测距系统的有用范围。

9. 发明授权

US6069738A Apparatus and methods for extending depth of field in image projection systems 有权
标题翻译：用于在图像投影系统中扩展景深的装置和方法
公开(公告)号：US6069738A
公开(公告)日：2000-05-30
申请号：US307644
申请日：1999-05-07
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G02B26/06 , G02B27/00 , G03F7/20 , G02B5/18 , G02B3/08 , G02K9/42
CPC分类号： G02B27/0025 , G02B26/06 , G02B27/0075 , G03F7/70241 , G03F7/70433
摘要： An optical system for providing an in-focus, extended depth of field image on a projection surface includes an encoded mask or light encoder for preceding the light to include object information (or, equivalently, information about the desired image), and an extended depth of field (EDF) mask, for extending the depth of field of the projection system. In addition to including object information, the encoded mask encodes the light from the light source to account for the variations introduced by the EDF mask in extending the depth of field, so that no post processing is required.
摘要翻译：用于在投影表面上提供对焦，延伸的景深图像的光学系统包括编码的掩模或光编码器，用于在光之前使光包括对象信息（或等效地，关于期望图像的信息）和扩展深度的场（EDF）掩模，用于扩展投影系统的景深。除了包括对象信息之外，编码的掩码对来自光源的光进行编码，以解释EDF掩模在扩展景深时引入的变化，使得不需要后处理。

10. 发明授权

US6021005A Anti-aliasing apparatus and methods for optical imaging 失效
标题翻译：抗锯齿设备和光学成像方法
公开(公告)号：US6021005A
公开(公告)日：2000-02-01
申请号：US5374
申请日：1998-01-09
申请人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
发明人： Wade Thomas Cathey, Jr. , Edward Raymond Dowski, Jr.
IPC分类号： G02B27/00 , G02B27/46 , G02B3/00 , G02B9/00
CPC分类号： G02B27/0025 , G02B27/46
摘要： An anti-aliasing filter for use in an incoherent imaging system reduces the resolution of the optical image to prevent aliasing, without requiring a reduction in the amount of light captured by the system, and without adversely affecting image quality or requiring complex optical systems. The filter modifies the wavefront of light emanating from the object in a curved, non-symmetrical manner, in such a way as to effectively attenuate spatial frequencies in the image to values less than some desired small level for all spatial frequencies beyond a predetermined bandlimit. The filter may be reflective or transmissive.
摘要翻译：用于非相干成像系统的抗混叠滤波器降低了光学图像的分辨率以防止混叠，而不需要减少由系统捕获的光量，并且不会不利地影响图像质量或需要复杂的光学系统。滤光器以弯曲的，非对称的方式修改从物体发出的光的波前，以便有效地将图像中的空间频率衰减到小于超过预定带限限制的所有空间频率的一些期望的小电平的值。滤波器可以是反射的或透射的。

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