专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5017012A Viewing system for surface profiler 失效
标题翻译：表面分析仪查看系统
公开(公告)号：US5017012A
公开(公告)日：1991-05-21
申请号：US389430
申请日：1989-08-04
申请人： Edward J. Merritt, Jr. , Joan E. Samuels , Joseph R. Bietry
发明人： Edward J. Merritt, Jr. , Joan E. Samuels , Joseph R. Bietry
IPC分类号： G01B11/30
CPC分类号： G01B11/306
摘要： A previewing profiler includes apparatus to scan the surface of an object and to provide a display relating to the smoothness of the surface at a microscopic level. The system includes providing a polarized collimated laser beam through a Nomarski type prism and focusing the resulting beams on the surface to be scanned. The system further includes a user operable rotatable mirror which may be inserted, upon operator command, between the laser and Nomarski prism, which mirror is designed to leak a small percentage of the laser light. Another source of noncollimated polarized light, provided through a condensing lens, is provided to the rotatable mirror to be directed along the same path through the Nomarski prism and to be focused at a point above the surface being scanned, thereby providing a substantially larger illuminated area on the surface. The reflected light from both the laser beam and additional noncollimated light is focused on a CCD array and then displayed on a display. This permits the user to view the area to be profiled, including the profile line, prior to operating the profiler.
摘要翻译：预览轮廓仪包括扫描对象表面的装置，并提供与微观层面上的表面平滑度有关的显示。该系统包括通过Nomarski型棱镜提供偏振的准直激光束，并将得到的光束聚焦在待扫描的表面上。该系统还包括用户可操作的可旋转反射镜，其可以根据操作者的命令在激光和Nomarski棱镜之间插入，该反射镜被设计为泄漏一小部分激光。通过聚光透镜提供的另一非准直偏振光源被提供给可旋转反射镜，以沿着通过Nomarski棱镜的相同路径被引导并且被聚焦在被扫描的表面上方，从而提供大得多的照明区域在表面上。来自激光束和附加的非准直光的反射光聚焦在CCD阵列上，然后显示在显示器上。这允许用户在操作分析器之前查看要分析的区域，包括轮廓线。

IPRDB

热门服务

关于我们

友情链接

联系方式