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1. 发明申请

US20090007846A1 DIFFUSER GRAVITY SUPPORT 有权
标题翻译： DIFFUSER GRAVITY支持
公开(公告)号：US20090007846A1
公开(公告)日：2009-01-08
申请号：US12234359
申请日：2008-09-19
申请人： ERNST KELLER , John M. White , Robin L. Tiner , Jiri Kucera , Soo Young Choi , Beom Soo Park , Michael Starr
发明人： ERNST KELLER , John M. White , Robin L. Tiner , Jiri Kucera , Soo Young Choi , Beom Soo Park , Michael Starr
IPC分类号： C23C16/00
CPC分类号： H01J37/3244 , C23C16/45565
摘要： An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gases through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.
摘要翻译：公开了一种用于支撑气体分布板的大部分中心部分的装置和方法。至少一个支撑构件能够通过配合连接件接合和分离扩散器，而不阻止气体或气体流过扩散器，并且被设计成向在其周边支撑的扩散器提供垂直悬架，或者能够支撑扩散器没有周界支撑。在一个方面，所述至少一个支撑构件是气体输送导管的一部分，并且在另一个实施例中是与气体输送导管分离的多个支撑构件。至少一个支撑构件能够将垂直升降或垂直压缩平移到扩散器的中心区域。还公开了一种用于控制从气体输送管道到气体分配板的气流的方法和装置。

2. 发明授权

US08075690B2 Diffuser gravity support 有权
标题翻译：扩散器重力支撑
公开(公告)号：US08075690B2
公开(公告)日：2011-12-13
申请号：US12234359
申请日：2008-09-19
申请人： Ernst Keller , John M. White , Robin L. Tiner , Jiri Kucera , Soo Young Choi , Beom Soo Park , Michael Starr
发明人： Ernst Keller , John M. White , Robin L. Tiner , Jiri Kucera , Soo Young Choi , Beom Soo Park , Michael Starr
IPC分类号： C23C16/455 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： H01J37/3244 , C23C16/45565
摘要： An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gases through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.
摘要翻译：公开了一种用于支撑气体分布板的大部分中心部分的装置和方法。至少一个支撑构件能够通过配合连接件接合和分离扩散器，而不阻止气体或气体流过扩散器，并且被设计成向在其周边支撑的扩散器提供垂直悬架，或者能够支撑扩散器没有周界支撑。在一个方面，所述至少一个支撑构件是气体输送导管的一部分，并且在另一个实施例中是与气体输送导管分离的多个支撑构件。至少一个支撑构件能够将垂直升降或垂直压缩平移到扩散器的中心区域。还公开了一种用于控制从气体输送管道到气体分配板的气流的方法和装置。

3. 发明授权

US07429410B2 Diffuser gravity support 有权
标题翻译：扩散器重力支撑
公开(公告)号：US07429410B2
公开(公告)日：2008-09-30
申请号：US11188922
申请日：2005-07-25
申请人： Ernst Keller , John M. White , Robin L. Tiner , Jiri Kucera , Soo Young Choi , Beom Soo Park , Michael Starr
发明人： Ernst Keller , John M. White , Robin L. Tiner , Jiri Kucera , Soo Young Choi , Beom Soo Park , Michael Starr
IPC分类号： H05H1/24
CPC分类号： H01J37/3244 , C23C16/45565
摘要： An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.
摘要翻译：公开了一种用于支撑气体分布板的大部分中心部分的装置和方法。至少一个支撑构件能够通过配合连接件接合和分离扩散器，而不阻止气体或气体流过扩散器，并且被设计成向在其周边支撑的扩散器提供垂直悬架，或者能够支撑扩散器没有周界支撑。在一个方面，所述至少一个支撑构件是气体输送导管的一部分，并且在另一个实施例中是与气体输送导管分离的多个支撑构件。至少一个支撑构件能够将垂直升降或垂直压缩平移到扩散器的中心区域。还公开了一种用于控制从气体输送管道到气体分配板的气流的方法和装置。

4. 发明申请

US20060060138A1 Diffuser gravity support 有权
标题翻译：扩散器重力支撑
公开(公告)号：US20060060138A1
公开(公告)日：2006-03-23
申请号：US11188922
申请日：2005-07-25
申请人： Ernst Keller , John M. White , Robin Tiner , Jiri Kucera , Soo Choi , Beom Park , Michael Starr
发明人： Ernst Keller , John M. White , Robin Tiner , Jiri Kucera , Soo Choi , Beom Park , Michael Starr
IPC分类号： C23C16/00
CPC分类号： H01J37/3244 , C23C16/45565
摘要： An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.
摘要翻译：公开了一种用于支撑气体分布板的大部分中心部分的装置和方法。至少一个支撑构件能够通过配合连接件接合和分离扩散器，而不阻止气体或气体流过扩散器，并且被设计成向在其周边支撑的扩散器提供垂直悬架，或者能够支撑扩散器没有周界支撑。在一个方面，所述至少一个支撑构件是气体输送导管的一部分，并且在另一个实施例中是与气体输送导管分离的多个支撑构件。至少一个支撑构件能够将垂直升降或垂直压缩平移到扩散器的中心区域。还公开了一种用于控制从气体输送管道到气体分配板的气流的方法和装置。

5. 发明申请

US20070040041A1 Substrate temperature regulating support pins 失效
标题翻译：基板温度调节支脚
公开(公告)号：US20070040041A1
公开(公告)日：2007-02-22
申请号：US11206650
申请日：2005-08-18
申请人： Hien-Minh Le , Michael Starr
发明人： Hien-Minh Le , Michael Starr
IPC分类号： G05D23/12 , F25D23/12
CPC分类号： G05D23/121
摘要： A method and apparatus for regulating the temperature of substrates positioned within a chamber are provided. In one embodiment, a substrate support pin is provided that includes a body having a substrate support region defined at a first end and a mounting region defined at a second end of the body. A mounting feature is formed at the mounting region and is adapted to couple the body to a vacuum chamber body. A passage extends from the mounting region to the support region. An outlet formed through the body and orientated at an angle greater than zero relative to a centerline of the body is p provided to deliver fluids flowing through the passage out the first end of the body. In another embodiment, a chamber includes a pin configured to provide a temperature controlled fluid to an underside of a substrate supported on the pin.
摘要翻译：提供了一种用于调节位于腔室内的衬底的温度的方法和装置。在一个实施例中，提供了一种衬底支撑销，其包括具有限定在第一端处的衬底支撑区域和限定在身体的第二端处的安装区域的主体。安装特征形成在安装区域处，并且适于将主体连接到真空室主体。通道从安装区域延伸到支撑区域。提供通过本体形成的并且相对于主体的中心线以大于零的角度定向的出口，以将流过通道的流体输送出身体的第一端。在另一个实施例中，腔室包括构造成将温度控制的流体提供给支撑在销上的衬底的下侧的销。

6. 外观设计

USD766502S1 Vaporization apparatus 有权
公开(公告)号：USD766502S1
公开(公告)日：2016-09-13
申请号：US29465167
申请日：2013-08-24
申请人： Michael Starr
设计人： Michael Starr

7. 外观设计

USD767201S1 Vaporization apparatus 有权
标题翻译：气化装置
公开(公告)号：USD767201S1
公开(公告)日：2016-09-20
申请号：US29541996
申请日：2015-10-09
申请人： Michael Starr
设计人： Michael Starr

8. 发明申请

US20090226282A1 SYSTEM FOR TRANSPORTING AND INSTALLING ROOF TRUSSES 审中-公开
标题翻译：运输和安装屋顶托架系统
公开(公告)号：US20090226282A1
公开(公告)日：2009-09-10
申请号：US12392403
申请日：2009-02-25
申请人： Michael Starr
发明人： Michael Starr
IPC分类号： E04G21/14
CPC分类号： E04B7/028
摘要： A truss handling apparatus has a plurality of channels and retaining devices to retain a truss for transporting and installing of trusses on building structures. The truss handling apparatus interacts with the forks of a lift. The truss handling apparatus has a base with a platform and the plurality of channels. The retaining device of the truss handling apparatus engages the sloping side rafters or top of a truss.
摘要翻译：桁架处理装置具有多个通道和保持装置，以保持用于在建筑结构上运输和安装桁架的桁架。桁架处理装置与电梯的叉相互作用。桁架处理装置具有带有平台和多个通道的基座。桁架处理装置的保持装置接合桁架的倾斜侧椽子或顶部。

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