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    • 2. 发明申请
    • HIGH ELECTRON MOBILITY TRANSISTOR
    • 高电子移动晶体管
    • US20160233326A1
    • 2016-08-11
    • US15133207
    • 2016-04-19
    • EPISTAR CORPORATIONHUGA OPTOTECH Inc.
    • Hsein-chin CHIUChien-Kai TUNGHeng-Kuang LINChih-Wei YANGHsiang-Chun WANG
    • H01L29/778H01L29/417H01L29/15H01L29/20H01L29/205
    • H01L29/7784H01L29/157H01L29/2003H01L29/205H01L29/41758H01L29/42316H01L29/7787
    • A high electron mobility transistor comprises a substrate, an epitaxial stack arranged above the substrate and having a first region and a second region surrounding the first region, a matrix electrode structure arranged in the first region. The matrix electrode comprises a plurality of first electrodes arranged on the epitaxial stack, a plurality of second electrodes arranged on the epitaxial stack and adjacent to the plurality of first electrodes, a plurality of third electrodes arranged adjacent to the plurality of first electrodes and second electrodes. One of the plurality of first electrodes comprises a first side, a second side, a third side and a fourth side. The first side and the third side are opposite sides, and the second side and the fourth side are opposite sides. Two of the plurality of second electrodes are arranged on the first side and the third side, and two of the plurality of third electrodes are arranged on the second side and the fourth side.
    • 高电子迁移率晶体管包括衬底,布置在衬底上方并且具有围绕第一区域的第一区域和第二区域的外延层,布置在第一区域中的矩阵电极结构。 矩阵电极包括布置在外延堆叠上的多个第一电极,布置在外延堆叠上并与多个第一电极相邻的多个第二电极,与多个第一电极和第二电极相邻布置的多个第三电极 。 多个第一电极中的一个包括第一侧,第二侧,第三侧和第四侧。 第一侧和第三侧是相对侧,第二侧和第四侧是相对的两侧。 多个第二电极中的两个布置在第一侧和第三侧上,并且多个第三电极中的两个布置在第二侧和第四侧上。