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1. 发明授权

US06294475B1 Crystallographic wet chemical etching of III-nitride material 失效
标题翻译： III族氮化物材料的晶体湿化学蚀刻
公开(公告)号：US06294475B1
公开(公告)日：2001-09-25
申请号：US09338709
申请日：1999-06-23
申请人： E. Fred Schubert , Dean A. Stocker
发明人： E. Fred Schubert , Dean A. Stocker
IPC分类号： H01L2120
CPC分类号： H01L21/30617
摘要： A method of processing III-Nitride epitaxial layer system on a substrate. The process includes exposing non-c-plane surfaces of the III-nitride epitaxial layer system, for example by etching to a selected depth or cleaving, and crystallographical etching the epitaxial layer system in order to obtain crystallographic plane surfaces. In an exemplary embodiment, the III-Nitride epitaxial layer system includes GaN. In accordance with one aspect of the exemplary embodiment, the etching step includes reactive ion etching in a chlorine-based plasma, PEC etching in a KOH solution or cleaving, and the crystallographical etching step includes immersing the epitaxial layer system in a crystallographic etching chemical, such as phosphoric acid, molten KOH, KOH dissolved in ethylene glycol, sodium hydroxide dissolved in ethylene glycol, tetraethyl ammonium hydroxide, or tetramethyl ammonium hydroxide. Speaific etching planes are chosen in accordance with varying the orientation of the exposing step, the etching chemical, and the temperature at which the epitaxial layer system is etched.
摘要翻译：一种在衬底上处理III-氮化物外延层系的方法。该工艺包括将III族氮化物外延层系统的非c面表面曝光，例如通过蚀刻至所选择的深度或切割，以及对外延层系统进行晶体刻蚀以获得晶面平面。在示例性实施例中，III-氮化物外延层系统包括GaN。根据示例性实施例的一个方面，蚀刻步骤包括在氯基等离子体中的反应离子蚀刻，在KOH溶液中蚀刻PEC或切割，并且晶体学蚀刻步骤包括将外延层系统浸入结晶蚀刻化学品中，溶解在乙二醇中的磷酸，熔融的KOH，KOH，溶于乙二醇的氢氧化钠，氢氧化四乙基铵或氢氧化四甲基铵。根据暴露步骤的方向，蚀刻化学品以及外延层系统被蚀刻的温度来选择突出的蚀刻平面。

2. 发明授权

US08027811B2 Processing of spectrometer pile-up events 有权
标题翻译：光谱仪堆积事件的处理
公开(公告)号：US08027811B2
公开(公告)日：2011-09-27
申请号：US12142737
申请日：2008-06-19
申请人： Patrick Paul Camus , Gregory S. Fritz , Thomas B. Jacobs , Dean A. Stocker , Dale Anders Wade
发明人： Patrick Paul Camus , Gregory S. Fritz , Thomas B. Jacobs , Dean A. Stocker , Dale Anders Wade
IPC分类号： G06F15/00
CPC分类号： G01T1/171
摘要： In an energy dispersive spectrometer wherein event (particle/photon) detection is performed by counting events spaced by greater than a shaping time, events which are spaced by less than the shaping time are also collected and counted. These “combined events” are treated similarly to “single events” which are spaced by greater than the shaping time, and can be used to generate combined-event spectra for comparison and/or use with the conventional single-event spectra. The combined-event spectra can be compared to the single-event spectra to provide an indication of data quality; can be subtracted from the single-event spectra to remove artifacts, and/or can be deconvolved into a single-event spectrum to increase the resolution of the single-event spectrum.
摘要翻译：在能量色散光谱仪中，其中事件（粒子/光子）检测通过计数大于成形时间的事件进行计数，同时收集和计数间隔小于成形时间的事件。这些“组合事件”的处理类似于间隔大于整形时间的“单个事件”，并且可以用于生成用于与常规单事件光谱进行比较和/或使用的组合事件光谱。组合事件光谱可以与单事件光谱进行比较，以提供数据质量的指示; 可以从单事件光谱中减去去除伪像，和/或可以去卷积成单事件光谱以增加单事件光谱的分辨率。

3. 发明授权

US07554091B2 Feedback circuit for output control in a semiconductor X-ray detector 有权
标题翻译：用于半导体X射线检测器中输出控制的反馈电路
公开(公告)号：US07554091B2
公开(公告)日：2009-06-30
申请号：US12023960
申请日：2008-01-31
申请人： William E. Drummond , David R. Fahrbach , James V. Howard , James R. Hyatt , Kevin K. Kim , Mark E. Misenheimer , Dean A. Stocker
发明人： William E. Drummond , David R. Fahrbach , James V. Howard , James R. Hyatt , Kevin K. Kim , Mark E. Misenheimer , Dean A. Stocker
IPC分类号： H01L27/146 , G01T1/24
CPC分类号： G01T1/2928
摘要： An X-ray detector using a semiconductor detector, most preferably a Silicon Drift Detector, utilizes a field effect transistor or other voltage-controlled resistance to generate an output voltage proportional to its input charge (which is generated by the X-ray photons incident on the semiconductor detector). To keep the charge (and thus the output voltage) to an acceptable range—one wherein the relationship between output voltage and input charge is substantially proportional—a feedback circuit is provided between the output and input terminals, wherein the charge on the input terminal is depleted when the output voltage begins leaving the desired range. Preferably, this is done by a comparator which monitors the output voltage, and provides a reset signal to the input terminal when it begins moving out of range. Alternatively or additionally, the reset signal may be a pulse supplied to the input terminal from a pulse generator activated by the comparator.
摘要翻译：使用半导体检测器，最优选硅漂移检测器的X射线检测器利用场效应晶体管或其它压控电阻来产生与其输入电荷成比例的输出电压（其由入射到X射线光子的X射线光子产生）半导体检测器）。为了将电荷（以及因此的输出电压）保持在可接受的范围 - 其中输出电压和输入电荷之间的关系基本成比例 - 在输出端和输入端之间提供反馈电路，其中输入端上的电荷为当输出电压开始离开所需的范围时耗尽。优选地，这通过监视输出电压的比较器来完成，并且当其开始移动超出范围时，向输入端提供复位信号。或者或另外，复位信号可以是从由比较器激活的脉冲发生器提供给输入端的脉冲。

4. 发明申请

US20080319714A1 PROCESSING OF SPECTROMETER PILE-UP EVENTS 有权
标题翻译：光谱仪堆积事件的处理
公开(公告)号：US20080319714A1
公开(公告)日：2008-12-25
申请号：US12142737
申请日：2008-06-19
申请人： Patrick Paul Camus , Gregory S. Fritz , Thomas B. Jacobs , Dean A. Stocker , Dale Anders Wade
发明人： Patrick Paul Camus , Gregory S. Fritz , Thomas B. Jacobs , Dean A. Stocker , Dale Anders Wade
IPC分类号： G06F15/00 , G01J3/28
CPC分类号： G01T1/171
摘要： In an energy dispersive spectrometer wherein event (particle/photon) detection is performed by counting events spaced by greater than a shaping time, events which are spaced by less than the shaping time are also collected and counted. These “combined events” are treated similarly to “single events” which are spaced by greater than the shaping time, and can be used to generate combined-event spectra for comparison and/or use with the conventional single-event spectra. The combined-event spectra can be compared to the single-event spectra to provide an indication of data quality; can be subtracted from the single-event spectra to remove artifacts, and/or can be deconvolved into a single-event spectrum to increase the resolution of the single-event spectrum.
摘要翻译：在能量色散光谱仪中，其中事件（粒子/光子）检测通过计数大于成形时间的事件进行计数，同时收集和计数间隔小于成形时间的事件。这些“组合事件”的处理类似于间隔大于整形时间的“单个事件”，并且可以用于生成用于与常规单事件光谱进行比较和/或使用的组合事件光谱。组合事件光谱可以与单事件光谱进行比较，以提供数据质量的指示; 可以从单事件光谱中减去去除伪像，和/或可以去卷积成单事件光谱以增加单事件光谱的分辨率。

5. 发明授权

US07339175B1 Feedback circuit for output control in a semiconductor X-ray detector 有权
标题翻译：用于半导体X射线检测器中输出控制的反馈电路
公开(公告)号：US07339175B1
公开(公告)日：2008-03-04
申请号：US11495867
申请日：2006-07-28
申请人： William E. Drummond , David R. Fahrbach , James V. Howard , Mark E. Misenheimer , Dean A. Stocker
发明人： William E. Drummond , David R. Fahrbach , James V. Howard , Mark E. Misenheimer , Dean A. Stocker
IPC分类号： G01T1/24
CPC分类号： G01T1/2928
摘要： An X-ray detector using a semiconductor detector, most preferably a Silicon Drift Detector, utilizes a field effect transistor or other voltage-controlled resistance to generate an output voltage proportional to its input charge (which is generated by the X-ray photons incident on the semiconductor detector). To keep the charge (and thus the output voltage) to an acceptable range—one wherein the relationship between output voltage and input charge is substantially proportional—a feedback circuit is provided between the output and input terminals, wherein the charge on the input terminal is depleted when the output voltage begins leaving the desired range. Preferably, this is done by a comparator which monitors the output voltage, and provides a reset signal to the input terminal when it begins moving out of range. Alternatively or additionally, the reset signal may be a pulse supplied to the input terminal from a pulse generator activated by the comparator.
摘要翻译：使用半导体检测器，最优选硅漂移检测器的X射线检测器利用场效应晶体管或其他压控电阻来产生与其输入电荷成比例的输出电压（其由入射到X射线光子的X射线光子产生）半导体检测器）。为了将电荷（以及因此的输出电压）保持在可接受的范围 - 其中输出电压和输入电荷之间的关系基本成比例 - 在输出端和输入端之间提供反馈电路，其中输入端上的电荷为当输出电压开始离开所需的范围时耗尽。优选地，这通过监视输出电压的比较器来完成，并且当其开始移动超出范围时，向输入端提供复位信号。或者或另外，复位信号可以是从由比较器激活的脉冲发生器提供给输入端的脉冲。

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