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1. 发明申请

US20090034361A1 SYSTEMS AND METHODS FOR MIXING FLUIDS 审中-公开
标题翻译：混合流体的系统和方法
公开(公告)号：US20090034361A1
公开(公告)日：2009-02-05
申请号：US12119869
申请日：2008-05-13
申请人： Duy K. TRANG , Matthieu E. Peterschmitt , Raul A. Martin , M. Usman Ghani , Jian Wang , Jeffrey E. Lorelli , Axel Soulet , Christophe Colin , Ronald S. Inman
发明人： Duy K. TRANG , Matthieu E. Peterschmitt , Raul A. Martin , M. Usman Ghani , Jian Wang , Jeffrey E. Lorelli , Axel Soulet , Christophe Colin , Ronald S. Inman
IPC分类号： B01F15/02 , B01F15/04
CPC分类号： B01F3/0865 , B01F5/0057 , B01F5/045 , B01F5/0463 , B01F5/0609 , B01F5/0682 , B01F5/0688 , B01F13/1013 , B01F13/1027 , B01F15/00136 , B01F15/0022 , B01F15/00285 , B01F2215/0096 , H01L21/6704
摘要： Methods and fluid delivery systems mix fluids together. A blender of the system receives and blends at least two chemical compounds together for delivery to one or more vessels, tanks or process tools, such as chemical baths that facilitate processing (e.g., cleaning) of semiconductor wafers or other components. A first fluid enters into a bore of a mixing chamber of the blender through an aperture in a wall of the chamber to enable blending of the first fluid with a second fluid injected into a central region of the bore.
摘要翻译：方法和流体输送系统将液体混合在一起。该系统的混合器将至少两种化合物混合在一起，将其输送到一个或多个容器，罐或加工工具，例如促进半导体晶片或其它组件的处理（例如，清洁）的化学浴池。第一流体通过室的壁中的孔进入混合器的混合室的孔中，以使第一流体与注入孔的中心区域的第二流体相混合。

2. 发明授权

US08191397B2 Methods for checking and calibrating concentration sensors in a semiconductor processing chamber 有权
标题翻译：在半导体处理室中检查和校准浓度传感器的方法
公开(公告)号：US08191397B2
公开(公告)日：2012-06-05
申请号：US12332796
申请日：2008-12-11
申请人： Francois Doniat , Ronald S. Inman , Nathan Stafford , Axel Soulet , Jean-Louis Marc
发明人： Francois Doniat , Ronald S. Inman , Nathan Stafford , Axel Soulet , Jean-Louis Marc
IPC分类号： G01N21/00
CPC分类号： G01N27/06
摘要： The present invention provides methods for checking and calibrating one or more concentration sensors in an open or closed system. More specifically, in one embodiment of the present invention, the disclosed method allows for the checking and calibration of one or more concentration sensors in which removal of the liquid from the system is required. In two additional embodiments, the disclosed methods allow for the checking and calibration of one or more concentration sensors without having to remove the liquid from the closed system thereby minimizing contamination of the system while at the same time greatly reducing or eliminating contact of the user with the liquid.
摘要翻译：本发明提供了用于在开放或封闭系统中检查和校准一个或多个浓度传感器的方法。更具体地说，在本发明的一个实施例中，所公开的方法允许检查和校准需要从系统中去除液体的一个或多个浓度传感器。在两个附加实施例中，所公开的方法允许检查和校准一个或多个浓度传感器，而不必从封闭系统中移除液体，从而最小化系统的污染，同时大大减少或消除用户与液体。

3. 发明申请

US20090151419A1 Methods For Checking And Calibrating Concentration Sensors In A Semiconductor Processing Chamber 有权
标题翻译：在半导体处理室中检查和校准浓度传感器的方法
公开(公告)号：US20090151419A1
公开(公告)日：2009-06-18
申请号：US12332796
申请日：2008-12-11
申请人： Francois Doniat , Ronald S. Inman , Nathan Stafford , Axel Soulet , Jean-Louis Marc
发明人： Francois Doniat , Ronald S. Inman , Nathan Stafford , Axel Soulet , Jean-Louis Marc
IPC分类号： G01D18/00
CPC分类号： G01N27/06
摘要： The present invention provides methods for checking and calibrating one or more concentration sensors in an open or closed system. More specifically, in one embodiment of the present invention, the disclosed method allows for the checking and calibration of one or more concentration sensors in which removal of the liquid from the system is required. In two additional embodiments, the disclosed methods allow for the checking and calibration of one or more concentration sensors without having to remove the liquid from the closed system thereby minimizing contamination of the system while at the same time greatly reducing or eliminating contact of the user with the liquid.
摘要翻译：本发明提供了用于在开放或封闭系统中检查和校准一个或多个浓度传感器的方法。更具体地说，在本发明的一个实施例中，所公开的方法允许检查和校准需要从系统中去除液体的一个或多个浓度传感器。在两个附加实施例中，所公开的方法允许检查和校准一个或多个浓度传感器，而不必从封闭系统中移除液体，从而最小化系统的污染，同时大大减少或消除用户与液体。

4. 发明授权

US5835230A Method for calibration of a spectroscopic sensor 失效
标题翻译：光谱传感器校准方法
公开(公告)号：US5835230A
公开(公告)日：1998-11-10
申请号：US890926
申请日：1997-07-10
申请人： James J. F. McAndrew , Ronald S. Inman
发明人： James J. F. McAndrew , Ronald S. Inman
IPC分类号： G01J3/28 , G01J3/42 , G01N21/03 , G01N21/27 , G01N21/31 , G01N21/59
CPC分类号： G01N21/276 , G01J3/42 , G01J2003/2866
摘要： A novel method for calibration of a spectroscopic sensor is provided. In the method, a spectroscopic system is provided. The system includes a measurement cell having one or more walls which at least partially enclose a sample region. The cell further includes a light entry port and a light exit port. The light entry port and the light exit port can be the same port or separate ports. Each of the ports contains a light transmissive window through which a light beam passes along an internal light path inside the measurement cell. The system further has an optical chamber which contains a light source for generating the light beam which passes through the light entry port into the cell, and a detector for measuring the light beam exiting the cell through the light exit port. The light beam passes along an external light path inside the optical chamber. In addition, a gas inlet is connected to the optical chamber. A calibration gas stream is introduced into the optical chamber. The calibration gas stream contains a calibrating gas species and a carrier gas. The calibrating gas species is present in the calibration gas stream in a known concentration. A spectroscopy measurement of the calibration gas stream is then performed. The method finds particular applicability in the calibration of an in-line spectroscopic sensor useful in the detection of molecules of interest in a semiconductor processing tool.
摘要翻译：提供了一种用于校准光谱传感器的新方法。在该方法中，提供了光谱系统。该系统包括具有至少部分地包围样品区域的一个或多个壁的测量单元。电池还包括光入口和光出口。光入口和光出口可以是相同的端口或单独的端口。每个端口包含透光窗口，光束通过该透光窗口沿测量单元内部的内部光路传播。该系统还具有光学室，该光学室包含用于产生通过光入口进入单元的光束的光源，以及用于测量通过光出口离开单元的光束的检测器。光束通过光学室内的外部光路。此外，气体入口连接到光学室。校准气流被引入到光学室中。校准气流包含校准气体种类和载气。校正气体种类以已知浓度存在于校准气流中。然后进行校准气流的光谱测量。该方法在用于检测半导体加工工具中的分子的在线光谱传感器的校准中具有特别的适用性。

5. 发明授权

US07312165B2 Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devices 失效
标题翻译：在半导体器件中使用的基板上的铪 - 锗氧化物的沉积
公开(公告)号：US07312165B2
公开(公告)日：2007-12-25
申请号：US11124451
申请日：2005-05-05
申请人： Gregory M. Jursich , Ronald S. Inman
发明人： Gregory M. Jursich , Ronald S. Inman
IPC分类号： H01L31/31
CPC分类号： H01L21/0228 , C23C16/40 , C23C16/45531 , H01L21/02181 , H01L21/02205 , H01L21/3141 , H01L21/31604 , H01L21/31645
摘要： Methods of film deposition using metals and metal oxides. A thin film of germanium oxide and an oxide of a non-germanium metal is deposited by ALD by alternating deposition of first and second precursor compounds, wherein the first precursor compound includes a metal other than germanium, and the second precursor compound includes germanium.
摘要翻译：使用金属和金属氧化物的薄膜沉积方法。通过交替沉积第一和第二前体化合物，通过ALD沉积氧化锗和非锗金属的氧化物的薄膜，其中第一前体化合物包括除锗之外的金属，第二前体化合物包括锗。

6. 发明授权

US07141500B2 Methods for forming aluminum containing films utilizing amino aluminum precursors 有权
标题翻译：使用氨基铝前体形成含铝膜的方法
公开(公告)号：US07141500B2
公开(公告)日：2006-11-28
申请号：US10844579
申请日：2004-05-13
申请人： Gregory M. Jursich , Ronald S. Inman
发明人： Gregory M. Jursich , Ronald S. Inman
IPC分类号： H01L21/44
CPC分类号： C23C16/45553 , C23C16/403 , H01L21/02178 , H01L21/02181 , H01L21/02194 , H01L21/02205 , H01L21/0228 , H01L21/3145 , H01L21/31616 , H01L21/31645 , H01L21/318
摘要： A method of forming an aluminum containing film on a substrate includes providing a precursor having the chemical structure: Al(NR1R2)(NR3R4)(NR5R6); where each of R1, R2, R3, R4, R5 and R6 is independently selected from the group consisting of hydrogen and an alkyl group including at least two carbon atoms. The precursor is utilized to form a film on the substrate including at least one of aluminum oxide, aluminum nitride and aluminum oxy-nitride. Each of the R1–R6 groups can be the same or different and can by straight or branched chain alkyls. An exemplary precursor that has is useful in forming aluminum containing films is tris diethylamino aluminum.
摘要翻译：在基材上形成含铝膜的方法包括提供具有以下化学结构的前体：Al（NR 1 R 2 R 2）（NR 3 R 2） R 4 R 4）（NR 5 R 6）; 其中R 1，R 2，R 3，R 4，R 5， R 3和R 6独立地选自氢和包括至少两个碳原子的烷基。该前体用于在基底上形成包含氧化铝，氮化铝和氮氧化铝中的至少一种的膜。 R 1〜R 6基团中的每一个可以相同或不同，并且可以是直链或支链烷基。可用于形成含铝膜的示例性前体是三乙基氨基铝。

7. 发明授权

US06188475B1 In-line cell for absorption spectroscopy 失效
标题翻译：用于吸收光谱的在线电池
公开(公告)号：US06188475B1
公开(公告)日：2001-02-13
申请号：US09389103
申请日：1999-09-02
申请人： Ronald S. Inman , James J. F. McAndrew
发明人： Ronald S. Inman , James J. F. McAndrew
IPC分类号： G01N110
CPC分类号： G01N21/031 , G01N21/05 , G01N21/15 , G01N2021/151
摘要： Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
摘要翻译：提供了一种用于吸收光谱学的新颖的在线电池。电池包括样品区域，光入口和作为相同或分离的端口的光出口。每个端口与采样区域通信并且包含透光窗口。具有光反射表面的反射镜面向样品区域，并且提供了有效加热光反射表面的加热器。该细胞可用于测定样品中分子气体杂质的浓度。在半导体处理中发现了特殊的适用性。

8. 发明授权

US5949537A In-line cell for absorption spectroscopy 失效
标题翻译：用于吸收光谱的在线电池
公开(公告)号：US5949537A
公开(公告)日：1999-09-07
申请号：US890928
申请日：1997-07-10
申请人： Ronald S. Inman , James J.F. McAndrew
发明人： Ronald S. Inman , James J.F. McAndrew
IPC分类号： G01N21/03 , G01N21/05 , G01N21/15 , G01N1/10
CPC分类号： G01N21/031 , G01N21/05 , G01N21/15 , G01N2021/151
摘要： Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
摘要翻译：提供了一种用于吸收光谱学的新颖的在线电池。电池包括样品区域，光入口和作为相同或分离的端口的光出口。每个端口与采样区域通信并且包含透光窗口。具有光反射表面的反射镜面向样品区域，并且提供了有效加热光反射表面的加热器。该细胞可用于测定样品中分子气体杂质的浓度。在半导体处理中发现了特殊的适用性。

9. 发明授权

US6084668A In-line cell for absorption spectroscopy 失效
标题翻译：用于吸收光谱的在线电池
公开(公告)号：US6084668A
公开(公告)日：2000-07-04
申请号：US114760
申请日：1998-07-13
申请人： James J.F. McAndrew , Ronald S. Inman
发明人： James J.F. McAndrew , Ronald S. Inman
IPC分类号： G01N21/03 , G01N21/05 , G01N21/15 , G01N1/10
CPC分类号： G01N21/031 , G01N21/05 , G01N21/15
摘要： Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light transmissive window in the light entry port and/or said light exit port is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor manufacturing in a semiconductor processing tool.
摘要翻译：提供了一种用于吸收光谱学的新颖的在线电池。电池包括样品区域，光入口和作为相同或分离的端口的光出口。每个端口与采样区域通信并且包含透光窗口。具有光反射表面的反射镜面向样品区域，并且提供了有效地加热入光口和/或所述光出口中的透光窗口的加热器。该细胞可用于测定样品中分子气体杂质的浓度。在半导体加工工具的半导体制造中发现了特定的适用性。

10. 发明授权

US5880850A Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy 失效
标题翻译：通过谐波检测光谱法在真空中敏感检测分子物种的方法和系统
公开(公告)号：US5880850A
公开(公告)日：1999-03-09
申请号：US951301
申请日：1997-10-16
申请人： James McAndrew , Ronald S. Inman
发明人： James McAndrew , Ronald S. Inman
IPC分类号： G01J3/433 , G01N21/39 , G01N21/00
CPC分类号： G01N21/39 , G01J3/4338
摘要： Provided is a novel method and system for harmonic detection spectroscopy. The method comprises providing a cell having a sample region which is circumscribed by at least one wall. The cell has at least one light entry/exit port, with each entry/exit port containing a light transmissive window having a surface facing the sample region and disposed so as to seal the cell in the circumferential direction. A sample gas flows through the sample region in a direction parallel to a cell central axis, and the cell operates at less than atmospheric pressure. A frequency and/or amplitude modulated light source is provided for directing a light beam through one of the at least one light transmissive windows into the cell. The light source modulation amplitude is set to a value which approximately maximizes the value of a harmonic signal at the center of the absorption feature due to the detected gas phase molecular species inside the sample region, and the center frequency of the light source is adjusted so that it is either locked to the center of the absorption feature or repetitively scanned over the frequency range which includes the feature. A spectra is then generated which may be recorded individually or averaged. A detector is provided for measuring the light beam exiting the cell through one of the at least one light transmissive windows. The light source and detector are contained within a chamber which is external to the cell and isolated from the sample region, the chamber and the sample region being placed in optical communication with each other through at least one of the at least one light transmissive windows. The pressure inside the chamber is controlled to a value which is positive relative to atmospheric pressure. The method can be used to detect gas phase molecular species in a sample. Particular applicability is found in semiconductor processing.
摘要翻译：提供了一种用于谐波检测光谱的新颖方法和系统。该方法包括提供具有被至少一个壁限定的样品区域的细胞。电池具有至少一个光入口/出口，每个入口/出口包含透光窗口，该透光窗口具有面向样品区域的表面，并设置成在圆周方向上密封电池。样品气体在平行于细胞中心轴线的方向上流过样品区域，并且细胞在小于大气压力下操作。提供了频率和/或幅度调制光源，用于将光束引导通过至少一个透光窗中的一个进入单元。由于检测到的样品区域内的气相分子种类，光源调制幅度被设定为大致使吸收特征中心处的谐波信号的值最大化的值，并且调整光源的中心频率它被锁定到吸收特征的中心或在包括该特征的频率范围上重复扫描。然后产生可以单独记录或平均记录的光谱。提供了一种检测器，用于通过至少一个透光窗中的一个来测量离开单元的光束。光源和检测器被包含在室内并且与样品区隔离的腔室中，腔室和样品区域通过至少一个透光窗口中的至少一个彼此光学连通。室内的压力被控制为相对于大气压力为正的值。该方法可用于检测样品中的气相分子种类。在半导体处理中发现了特殊的适用性。

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