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    • 7. 发明授权
    • Single element three terminal piezoresistive pressure sensor
    • 单元三端压阻式压力传感器
    • US08525279B2
    • 2013-09-03
    • US12794288
    • 2010-06-04
    • Usha R. GowrishettyKevin M. Walsh
    • Usha R. GowrishettyKevin M. Walsh
    • G01R29/22H01L21/302
    • G01L9/0055G01L1/2293
    • Embodiments of the invention provide for three-terminal pressure sensors (“3-TPS”), a method of measuring a pressure with a 3-TPS, and a method of manufacturing a 3-TPS. In some embodiments, the 3-TPS includes a semiconducting layer with cavity and a 3-TPS element having at least one piezoresistive layer overlapping at least a portion of the cavity and oriented at an angle selected to provide a desired sensitivity for the 3-TPS. The method of measuring a pressure with a 3-TPS is performed with a 3-TPS that includes an input terminal, first and second output terminals, and a 3-TPS element, the 3-TPS element overlapping at least a portion of a cavity at a predetermined angle. The method comprises providing an input signal to the input terminal of the 3-TPS, determining a difference between two output signals from the respective output terminals of the 3-TPS, and correlating the determined difference to a pressure.
    • 本发明的实施例提供三端压力传感器(“3-TPS”),使用3-TPS测量压力的方法和制造3-TPS的方法。 在一些实施例中,3-TPS包括具有空腔的半导体层和具有至少一个压阻层的3-TPS元件,该至少一个压阻层与空腔的至少一部分重叠并且以选定的角度定向以为3-TPS提供期望的灵敏度 。 使用3-TPS测量压力的方法是使用包括输入端子,第一和第二输出端子以及3-TPS元件的3-TPS进行的,所述3-TPS元件与空腔的至少一部分重叠 以预定角度。 该方法包括向3-TPS的输入端提供输入信号,确定来自3-TPS的相应输出端的两个输出信号之间的差值,并将所确定的差与压力相关。
    • 8. 发明授权
    • Radiation detector based on charge amplification in a gaseous medium
    • 基于气体介质中电荷放大的辐射检测器
    • US5614722A
    • 1997-03-25
    • US551472
    • 1995-11-01
    • Keith SolbergWilliam K. PittsKevin M. Walsh
    • Keith SolbergWilliam K. PittsKevin M. Walsh
    • G01T1/185G01T1/85
    • G01T1/185
    • A radiation detector includes a substrate having a cavity defined therein, an anode surface positioned in the bottom of the cavity and a cathode positioned adjacent the cavity opening. A drift electrode is juxtaposed over the substrate opposite the cavity and defines a region containing a gaseous medium. As ionized charge pairs are established in the gaseous medium due to radiation provided by an external radiation source, electrons drift toward the anode under the influence of a first electric field established between the anode and drift electrode. Thereafter, the electron undergoes avalanche multiplication with the gaseous medium in an avalanche region defined by a second intense electric field established between the anode and cathode. The structure of the present invention provides an electric field gradient geometry which permits optimal design of the avalanche region geometry, and which further minimizes photon feedback from the cathode.
    • 辐射检测器包括具有限定在其中的腔的衬底,位于空腔底部的阳极表面和邻近腔开口定位的阴极。 漂移电极并置在与空腔相对的衬底上,并限定含有气体介质的区域。 由于由外部辐射源提供的辐射而在气体介质中建立电离电荷对,在阳极和漂移电极之间建立的第一电场的影响下,电子向阳极漂移。 此后,电子在由在阳极和阴极之间建立的第二强电场限定的雪崩区域中与气态介质进行雪崩倍增。 本发明的结构提供电场梯度几何形状,其允许雪崩区域几何的最佳设计,并进一步使来自阴极的光子反馈最小化。
    • 9. 发明授权
    • Optical imaging system utilizing a charge amplification device
    • 利用电荷放大装置的光学成像系统
    • US5602397A
    • 1997-02-11
    • US551556
    • 1995-11-01
    • William K. PittsKevin M. WalshKeith Solberg
    • William K. PittsKevin M. WalshKeith Solberg
    • H01J47/02
    • H01J47/02
    • An optical imaging system includes an array of optical imaging devices each comprising a device for providing charge amplification in a gaseous medium. A preferred embodiment of such a charge amplification device includes a substrate having a cavity defined therein, an anode surface positioned in the bottom of the cavity and a cathode positioned adjacent the cavity opening. A drift electrode is juxtaposed over the substrate opposite the cavity and defines a region containing a gaseous medium. As ionized charge pairs are established in the gaseous medium due to radiation provided by an external radiation source, electrons are attracted toward the anode where they undergo avalanche multiplication with the gaseous medium under the influence of an intense electric field established between the anode and cathode. As a result of the avalanche process, the gaseous medium within the avalanche region emits photons, predominately in the UV region, which are collected by the substrate and provided to a photon detector coupled thereto. The substrate is preferably provided with a wavelength shifting material operable to shift the UV light to the visible region, where it is thereafter imaged by the photon detector using, for example, conventional CCD camera technology.
    • 光学成像系统包括一组光学成像装置,每个光学成像装置包括用于在气体介质中提供电荷放大的装置。 这种电荷放大装置的优选实施例包括其中限定有空腔的基板,位于空腔底部的阳极表面和邻近腔开口定位的阴极。 漂移电极并置在与空腔相对的衬底上,并限定含有气体介质的区域。 由于由外部辐射源提供的辐射而在气体介质中建立了电离电荷对,电子被吸引到阳极,在阳极处,在阳极和阴极之间建立的强电场的影响下,电子对与气体介质进行雪崩倍增。 作为雪崩过程的结果,雪崩区域内的气体介质发射主要在UV区域中的光子,其由衬底收集并提供给耦合到其上的光子检测器。 衬底优选地设置有波长移动材料,其可操作以将UV光移动到可见光区域,此后,其使用例如常规CCD照相机技术由光子检测器成像。
    • 10. 发明申请
    • SINGLE ELEMENT THREE TERMINAL PIEZORESISTIVE PRESSURE SENSOR
    • 单元三端式压力传感器
    • US20100308791A1
    • 2010-12-09
    • US12794288
    • 2010-06-04
    • Usha R. GowrishettyKevin M. Walsh
    • Usha R. GowrishettyKevin M. Walsh
    • G01R29/22H01L21/302
    • G01L9/0055G01L1/2293
    • Embodiments of the invention provide for three-terminal pressure sensors (“3-TPS”), a method of measuring a pressure with a 3-TPS, and a method of manufacturing a 3-TPS. In some embodiments, the 3-TPS includes a semiconducting layer with cavity and a 3-TPS element having at least one piezoresistive layer overlapping at least a portion of the cavity and oriented at an angle selected to provide a desired sensitivity for the 3-TPS. The method of measuring a pressure with a 3-TPS is performed with a 3-TPS that includes an input terminal, first and second output terminals, and a 3-TPS element, the 3-TPS element overlapping at least a portion of a cavity at a predetermined angle. The method comprises providing an input signal to the input terminal of the 3-TPS, determining a difference between two output signals from the respective output terminals of the 3-TPS, and correlating the determined difference to a pressure.
    • 本发明的实施例提供三端压力传感器(“3-TPS”),使用3-TPS测量压力的方法和制造3-TPS的方法。 在一些实施例中,3-TPS包括具有空腔的半导体层和具有至少一个压阻层的3-TPS元件,该至少一个压阻层与空腔的至少一部分重叠并且以选定的角度定向以为3-TPS提供期望的灵敏度 。 使用3-TPS测量压力的方法是使用包括输入端子,第一和第二输出端子以及3-TPS元件的3-TPS进行的,所述3-TPS元件与空腔的至少一部分重叠 以预定角度。 该方法包括向3-TPS的输入端提供输入信号,确定来自3-TPS的相应输出端的两个输出信号之间的差值,并将所确定的差与压力相关。